Micro-nano structure machining machine tool and micro-nano structure machining methods

Abstract

The invention provides a micro-nano structure machining machine tool comprising a tool apron, a work steady, and a vibration device; the tool apron can move in the X-axis direction of the machine tooland is provided with a rotating shaft with an axis perpendicular to the X-axis direction of the machine tool; a tool is arranged at the end portion of the rotating shaft; the work steady is arrangedrelative to the tool apron and can move in the Z-axis direction of the machine tool; the vibration device is fixed on the work steady and comprises a base station, a first flexible vibration body, a second flexible vibration body, a workpiece platform, and a first flexible vibration portion for driving the first flexible vibration body and the second flexible vibration body to vibrate; the first flexible vibration body is connected with the base station and the workpiece platform, and the vibration sensing direction of the first flexible vibration body is the X-axis direction of the machine tool; the second flexible vibration body is connected with the base station and the workpiece platform, and the vibration sensing direction of the second flexible vibration body is the Z-axis directionof the machine tool; the first flexible vibration body and the second flexible vibration body are separately located on two adjacent sides of the workpiece platform; and one side, not connected with the first flexible vibration body and the second flexible vibration body, of the workpiece platform is disposed opposite to the tool. The invention also provides two micro-nano structure machining methods.

Description

technical field [0001] The invention relates to the field of micro-nano structure processing, in particular to a micro-nano structure processing machine tool and a micro-nano structure processing method. Background technique [0002] In the current field of engineering technology, more and more workers use micro-nano structured surfaces to achieve engineering technical problems such as anti-fouling, drag reduction, and anti-bacteria. However, due to the complexity of the micro-nano-structured surface itself and the high-precision and high-efficiency requirements of the manufacturing process, the application expansion of the micro-nano-structured surface is subject to many restrictions. [0003] At present, most people use ultra-precision machining technology to process the surface of micro-nano structure, mainly through the cooperation of fast tool servo technology and main cutting motion. However, in the machining process of this method, there are continuous changes in the...

AI Technical Summary

Problems solved by technology

However, in the machining process of this method, there are continuous changes in the relative turning line speed during the radial feeding process of the workpiece, insufficient dynamic response capability of the servo vibration cutting system, poor cutting flexibility of the surface of the micro-nano structure, and the morphology of the micro-nano structure under the influence of many factors. A series of problems, such as deviation, seriously restrict the efficient processing and manufacturing of multi-level micro-nano structured surfaces.

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