The invention relates to a high-precision Z-shaft carrier platform of
picosecond laser process equipment. A Z fixed plate is fixed on the base plate of a Z platform, a vertical guide rail is installedon the Z fixed plate, an elevating plate capable of moving upwards and downwards along the guide rail is installed on the guide rail, a piezoelectric
ceramic motor for controlling the elevating plateto move upwards and downwards is installed on the base plate of the Z platform, a vertical front side plate is fixed on the front side surface of the elevating plate, a vertical back side plate is fixed on the back side surface of the elevating plate, and the front side plate and the back side plate are arranged symmetrically in parallel; a sensor is arranged on the Z fixed plate, and the internal surface of the front side plate or the back side plate is provided with a sensing plate of the sensor; a reading head is arranged on the Z fixed plate, and a
grating gage is stuck to the internal surface of the front side plate or the back side plate; and fixture plates are arranged on the front side plate and the back side plate. The high-precision Z-shaft carrier platform of the
picosecond laser process equipment controls the Z-shaft to start, stop and elevate by using the high-resolution piezoelectric
ceramic motor. The
grating gage ensures the precision of elevation and positioning. Thebalancing mechanism solves the problems of insufficient thrust and static retaining force of the piezoelectric
ceramic motor.