The invention discloses an
optical fiber vibration sensing head, which consists of a vibration sensitive
chip, a dual
fiber collimator and an encapsulation shell, wherein the inside of the encapsulation shell under the dual
fiber collimator is provided with a cavity, the vibration sensitive
chip is arranged in the cavity and consists of micro light reflector, a
silicon supporting frame and a substrate
glass sheet; the
silicon supporting frame is bonded with the substrate
glass sheet; the micro light reflector is arranged in the
silicon supporting frame; a damping
air cavity is reserved between the micro light reflector and the substrate
glass sheet; two sides of the micro light reflector is symmetrically provided with torsion shafts; and one end of each of the torsion shaft is connected with the silicon supporting frame. An MEMS process is used to integrate a MEMS vibration sensitive
chip. Based on an asymmetric torsion micro light reflector structure, the MEMS vibration sensitive chip can be manufactured in batch. The torsion shafts are used as elastic elements, and the micro light reflector is used as a sensitive
mass block to reflect
vibration acceleration. The damping
air cavity is used for controlling the damping characteristic of torsion. The invention has the advantages of
batch production, low cost and high consistency.