The invention discloses a TaN
coating and a preparation method thereof and application. The preparation method of the TaN
coating comprises the following steps that a magnetron
sputtering technology is used, a Ta pure
metal target is taken as a target material, a
nitrogen gas and a protective gas are taken as working gases, a
negative bias voltage is applied to a substrate, a target electric rateis applied to the Ta pure
metal target, and a TaN
coating is deposited on the surface of the substrate, wherein the TaN coating has a face centered cubic
crystal structure which is preferentially oriented with (200), and a face centered cubic
crystal structure which is preferentially oriented with (111) or an amorphous structure. According to the TaN coating and the preparation method thereof andthe application, starting from the
nitrogen content in the
deposition process, the characteristics of various structures of the TaN coating is combined, a magnetron
sputtering method is adopted and the
nitrogen flow proportion is regulated and controlled to obtain the TaN coating with different structures; and the prepared TaN coating has high
hardness, has stable performance at 800 DEG C, has good
oxidation resistance, and has a potential application prospect in the field of South Sea high-temperature protection.