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TaN coating and preparation method thereof and application

A coating, face-centered cubic technology, applied in the field of magnetron sputtering, achieves the effects of high hardness, good oxidation resistance and simple preparation method

Inactive Publication Date: 2019-12-24
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to its special geographical environment, the South China Sea has the characteristics of high heat and high humidity, and has higher requirements for parts in terms of hardness, heat resistance, and corrosion resistance. Corrosion, 14% for heat damage, 18% for others, so the heat resistance of protective coatings applied in the South China Sea environment needs to be solved urgently

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  • TaN coating and preparation method thereof and application
  • TaN coating and preparation method thereof and application
  • TaN coating and preparation method thereof and application

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preparation example Construction

[0026] As an aspect of the technical solution of the present invention, it relates to a method for preparing a TaN coating, which includes:

[0027] provide a substrate;

[0028] Using magnetron sputtering technology, using Ta pure metal target as target material, nitrogen and protective gas as working gas, applying negative bias voltage to the substrate, applying target electric rate to Ta pure metal target, and depositing on the surface of the substrate to form TaN coating, the TaN coating has a face-centered cubic crystal structure with (200) as the preferred orientation, a face-centered cubic crystal structure or an amorphous structure with (111) as the preferred orientation;

[0029] The process conditions adopted by the magnetron sputtering technology include: the air pressure in the reaction chamber is 5×10 -3 Pa~6×10 -3 Pa, the target power applied to the Ta pure metal target is 3-3.5kW, the target voltage is 430-450V, the deposition bias is -100V--120V, the temperat...

Embodiment 1

[0053] A method for preparing a TaN coating in this embodiment adopts magnetron sputtering technology, the thickness of the TaN coating is about 1.5 μm, and mainly includes the following steps:

[0054] (1) Perform mechanical grinding and polishing on the surface of the titanium alloy sample to be plated, and then perform ultrasonic cleaning twice with acetone and alcohol respectively, and the ultrasonic time is 15 minutes each.

[0055] (2) Put the cleaned sample into the cavity, vacuumize to 5×10 -3 mbar, while heating, the heating temperature is 400°C.

[0056] (3) Target sputtering and sample etching. The target material was cleaned by sputtering for 5 minutes, and the titanium alloy sample was ion-etched for 15 minutes, and the bias voltage used for sub-etching was 1200V.

[0057] (4) Prepare and deposit TaN coating. A Ta metal target (purity 99.99wt.%) is used, high-purity nitrogen and argon are used as the gas, the flow rate of the argon gas is 240 sccm, and the flow...

Embodiment 2

[0060] A kind of preparation method of TaN coating in the present embodiment adopts magnetron sputtering technology, and the thickness of described TaN coating is about 900nm, mainly comprises the following steps:

[0061] (1) Perform mechanical grinding and polishing on the surface of the titanium alloy sample to be plated, and then perform ultrasonic cleaning twice with acetone and alcohol respectively, and the ultrasonic time is 15 minutes each.

[0062] (2) Put the cleaned sample into the cavity, vacuumize to 6×10 -3 mbar, while heating, the heating temperature is 420°C.

[0063] (3) Target sputtering and sample etching. The target material was cleaned by sputtering for 5 minutes, and the titanium alloy sample was ion-etched for 15 minutes, and the bias voltage used for sub-etching was 1200V.

[0064] (4) Prepare and deposit TaN coating. A Ta metal target (purity 99.99wt.%) is used, high-purity nitrogen and argon are used as gas, the flow rate of argon gas is 160 sccm, ...

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Abstract

The invention discloses a TaN coating and a preparation method thereof and application. The preparation method of the TaN coating comprises the following steps that a magnetron sputtering technology is used, a Ta pure metal target is taken as a target material, a nitrogen gas and a protective gas are taken as working gases, a negative bias voltage is applied to a substrate, a target electric rateis applied to the Ta pure metal target, and a TaN coating is deposited on the surface of the substrate, wherein the TaN coating has a face centered cubic crystal structure which is preferentially oriented with (200), and a face centered cubic crystal structure which is preferentially oriented with (111) or an amorphous structure. According to the TaN coating and the preparation method thereof andthe application, starting from the nitrogen content in the deposition process, the characteristics of various structures of the TaN coating is combined, a magnetron sputtering method is adopted and the nitrogen flow proportion is regulated and controlled to obtain the TaN coating with different structures; and the prepared TaN coating has high hardness, has stable performance at 800 DEG C, has good oxidation resistance, and has a potential application prospect in the field of South Sea high-temperature protection.

Description

technical field [0001] The invention relates to a simple preparation method of a high-temperature resistant protective coating, in particular to a magnetron sputtering method for regulating the internal structure of a TaN coating by regulating the flow rate of nitrogen gas and the application of the coating in high-temperature protection, belonging to the substrate The field of surface protection technology. Background technique [0002] Under the current background of focusing on the development of marine economy, the South my country Sea is an important strategic and resource location for our country. To improve my country's ability to develop and utilize marine resources and comprehensive sea control capabilities, we must vigorously develop ship equipment and marine engineering equipment. In recent years, the demand for the development of marine resources has become increasingly urgent, and the requirements for materials in the harsh environment of the South China Sea ha...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/35
CPCC23C14/0641C23C14/0036C23C14/35
Inventor 李金龙朱烨彪王立平
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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