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89results about How to "Improve process tolerance" patented technology

Silicon-based InGaAs PIN photoelectric detector based on heterogeneous integration and vertical optical coupling

The invention discloses a silicon-based InGaAs PIN photoelectric detector based on heterogeneous integration and vertical optical coupling. The silicon-based InGaAs PIN photoelectric detector comprises a silicon-on-insulator (SOI) substrate, a vertical coupling grating, a benzocyclobutene (BCB) bonding layer, an anti-reflecting layer, a first conductivity type indium phosphide layer, an intrinsic InGaAs layer and a second conductivity type indium phosphide layer, wherein the vertical coupling grating is produced in top silicon of the SOI substrate, the BCB bonding layer is covered on the vertical coupling grating, the anti-reflecting layer is located above the BCB bonding layer, the first conductivity type indium phosphide layer is located above the anti-reflecting layer, the intrinsic InGaAs layer is located above the first conductivity type indium phosphide layer, the second conductivity type indium phosphide layer is located above the intrinsic InGaAs layer, the vertical coupling grating is produced by etching the top silicon of the SOI substrate, the etching depth is 70-110 nm, the grating period is 600-680 nm, and the refractive index of the anti-reflecting layer is between refractive indexes of the BCB bonding layer and the first conductivity type indium phosphide layer. According to the silicon-based InGaAs PIN photoelectric detector, by means of an adhesiveness bonding process, InP/InGaAs/InP stack material layers are adhered to the grating which is etched on the SOI substrate, so that light and the InP/InGaAs/InP layers are vertically coupled, and suitable designs and prioritization schemes are provided for specific applications of the silicon-based InGaAs PIN photoelectric detector.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Electric welding safety goggles

InactiveCN102360144AImprove viewing angle uniformityReduce difficultyGogglesNon-linear opticsElectricityBiochemical engineering
The invention discloses a pair of electric welding safety goggles, which comprises a first base plate, a second base plate, a third base plate and a fourth base plate, wherein the first base plate and the second base plate are in opposite arrangement, the third base plate and the fourth base plate are in opposite arrangement, the second base plate and the fourth base plate are in adjacent arrangement, the electric welding safety goggles also comprise a first liquid crystal layer, a second liquid crystal layer, a first polaroid, a second polaroid, a third polaroid and a fourth polaroid, the first liquid crystal layer is arranged between the first base plate and the second base plate, the second liquid crystal layer is arranged between the third base plate and the fourth base plate, the first polaroid is arranged on the surface of the first base plate, the second polaroid is arranged on the surface of the second base plate, the third polaroid is arranged on the surface of the third base plate, the fourth polaroid is arranged on the surface of the fourth base plate, the first liquid crystal layer and the second liquid crystal layer are in twisting arrangement in reverse directions, in addition, the view angle direction difference is 180 degrees, and in addition, the twisting angle range of the first liquid crystal layer and the second liquid crystal layer is 72 to 88 degrees. The electric welding safety goggles have the characteristics that the view angle uniformity is high, the diffuse reflection is low, and the manufacture process is simple.
Owner:TIANMA MICRO ELECTRONICS CO LTD

Stabilized Whole Grain Flour

InactiveUS20080311274A1Increased processing toleranceImprove propertyBakery productsDough heat treatmentFlavorExtended storage
Stabilized whole grain corn flour having extended storage stability and modified functional properties, such as improved processing tolerance, improved dough properties and enhanced corn flavors, is described, as are methods of making such stabilized whole grain corn flour.
Owner:CARGILL INC

Silicon-based light transmitting-receiving component with parallel optical fiber transmission

InactiveCN103676037AMeet the requirements of coupling toleranceImprove coupling efficiencyCoupling light guidesLaserFiber optic transmission
The invention provides a silicon-based light transmitting-receiving component with parallel optical fiber transmission. The silicon-based light transmitting-receiving component with parallel optical fiber transmission comprises a silicon substrate, multiple electrodes, multiple lasers/detectors, multiple lenses, multiple optical fiber heads and an optical fiber cover plate, wherein the silicon substrate comprises a surface plane which is provided with recess parts, multiple wire slots and positioning parts; the positioning parts and the front ports of the wire slots are spaced by the recess parts; the electrodes are arranged in parallel and are arranged on the front section of the surface plane in a convex manner; the lasers/detectors are connected to the electrodes and are mounted on the surface plane through the positioning parts; the lenses are mounted in the recess parts to correspond to the lasers/detectors; the optical fiber heads are arranged in the wire slots; one ends of the optical fiber heads close to the lenses are covered with the optical fiber cover plate. Through the structure or the combination thereof, the silicon-based light transmitting-receiving component is realized, and accordingly the good effects of reducing the volume, bringing convenience to the manufacturing and lowering the cost are achieved.
Owner:WUHAN TELECOMM DEVICES

Method for metal configuration with photoresist deposition

ActiveCN106711017AAvoid Gold Residue PhenomenonAvoid side corrosionSemiconductor/solid-state device manufacturingPhotoresistMetal electrodes
The invention discloses a method for metal configuration with photoresist deposition. The method comprises: the surface of a substrate is coated with a photoresist; the substrate coated with the photoresist is baked, exposed, baked, and developed successively, wherein an included angle between the side wall of a photoresist graph after development and the surface of the substrate is between 80 degrees to 100 degrees; metal is deposited to the surface of the photoresist graph after development and the metal falls on the surface of the substrate at the opening of the photoresist; the metal on the surface of the substrate is removed; and the photoresist is removed. Therefore, a problem that the bottom width of the metal electrode or metal wire is much larger than the width of the top can be solved.
Owner:SUNTIFIC MATERIALS WEIFANG LTD

Infrared optical window with three-step anti-reflection structure and preparation method thereof

PendingCN108254811AImprove process toleranceReduce the difficulty of processingOptical elementsTransmittanceInfrared window
The invention discloses an infrared optical window with a three-step anti-reflection structure. The window comprises an infrared optical window body, the incident plane of the infrared optical windowbody is etched with the three-step anti-reflection structure, a preparation method comprises the steps that silicon wafer is pretreated, a metal pattern mask is used for etching the three-step anti-reflection structure on a silicon plate, the structure includes an etching first step structure layer, an etching second step structure layer and an etching third step structure layer, the method for etching the anti-reflection structure adopts an induction coupled plasma etching machine and a combination process of etching and passivation, the etching gas is SF6, the passivation gas is C4F8, and inert gas He is added during etching and passivation. The structure can obviously increase the transmittance of the infrared window, improve the sensitivity of infrared devices, and reduce influence ofthe height of a step structure, structural parameters and the variation of a step period and depth on the transmittance, and the preparation method improves process tolerance of device manufacturing,and reduces the difficulty of craft production.
Owner:UNIV OF ELECTRONIC SCI & TECH OF CHINA

Manufacturing method for ohmic contact with low specific contact resistance and low roughness

The invention discloses a manufacturing method for ohmic contact with low specific contact resistance and low roughness. The manufacturing method is characterized in that hardly compatible Mo metal is introduced to an ohmic contact metal seed to form a TiAlNiMoAu combination, thus the surface roughness and the specific contact resistance after alloying are reduced under the same alloying condition. In the manufacturing method, the low diffusivity of the Mo is utilized, and a binary alloy phase is matched, thus low contact resistance is realized, the roughness of the ohmic contact after alloying is also reduced, the overlay accuracy of a photolithographic process is improved, the number of process steps is reduced, the stability of the ohmic contact is improved, and a firm foundation is established for device process practicability.
Owner:THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP

Optical waveguide directional coupler

The invention relates to an optical waveguide directional coupler which comprises a substrate and two optical waveguides formed on the substrate. The substrate comprises a ridge area with an inverted-T-shaped section and a rectangle area connected with the ridge area. The ridge area comprises a raised inner ridge area smoothly connected with the rectangle area. The two optical waveguides cross the inner ridge area and the rectangle area, and each optical waveguide comprises a first straight waveguide section located in the inner ridge area, a curved waveguide section and a second straight waveguide section, wherein the curved waveguide section and the second straight waveguide section of each optical waveguide are located in the rectangle area, the curved waveguide section of each optical waveguide is connected with the first straight waveguide section and the second straight waveguide section of each optical waveguide is connected with the corresponding curved waveguide section. The first straight waveguide sections of the two optical waveguides are mutually parallel and a coupling action area is formed between the two first straight waveguide sections. The curved waveguide sections of the two optical waveguides extend outwards in a curved mode. The second straight waveguide sections of the two optical waveguides are mutually parallel.
Owner:HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1

Silicon-based electro-absorption modulator and preparation method thereof

The invention provides a silicon-based electro-absorption modulator and a preparation method thereof. The modulator uses voltage to adjust the light absorption coefficient of a semiconductor on the basis of an electro-absorption mode, and then the intensity of an optical signal is adjusted. Silicon is a weak electro-optical material, so that the silicon is introduced into material germanium whichhas a remarkable electro-optical absorption adjusting effect in a communication wave band C wave band and is compatible with the CMOS technology. Through an epitaxial growth modulation layer (200), light beams are smoothly coupled into and coupled out of the modulation layer (200), oscillation of light field power of the light beams between the modulation layer and a waveguide layer is not generated, the dependence relation between the insertion loss of a device and the length of the modulation layer is eliminated, meanwhile, different working wavelengths can be achieved by adjusting alloy components in the modulation layer (200), and the modulation efficiency is high.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

A patterned sapphire substrate and a preparation method thereof

The invention relates to the technical field of semiconductor manufacturing, in particular to a patterned sapphire substrate and a preparation method thereof. The patterned sapphire substrate comprises a sapphire flat sheet and a patterned silicon-containing organic coating formed on the surface thereof. A manufacture method comprises that follow steps of: (a) coating a silicon-containing organiccoating on the surface of a sapphire flat sheet; (b) coat a photoresist on that surface of the silicon-containing organic coating to form a photoresist layer, and photolithographically forming a maskpattern; (c) etching the silicon-containing organic coating under the protection of the photoresist layer, transferring the pattern to the silicon-containing organic coating, and removing the photoresist to obtain the patterned sapphire substrate. The invention replaces the traditional patterned sapphire substrate with a patterned silicon-containing organic coating, wherein the refractive index ofthe silicon-containing organic coating is lower than that of the sapphire, the scattering effect of the substrate on light can be effectively increased, and the luminous efficiency of the LED can beimproved; Moreover, its hardness is lower than that of sapphire, which increases the tolerance of photolithography and etching process and reduces the production cost.
Owner:孙逊运

A method for preparing ingots by layer-by-layer pouring based on slag protection

ActiveCN108889915BAvoid macrosegregationImprove feeding capacityIngotMolten steel
The invention discloses a layer-by-layer pouring method for preparing ingots based on slag protection, according to the specifications of the poured large ingots, Determine the amount of steel required, and dividing the steel amount into several parts, melting molten steel one by one, After the first molten steel is poured, A mould powder is adde to completely cover that surface of the molten steel, After the molten steel approaches complete solidification, a second part of molten steel is poured into the ingot mold, and a proper amount of protective powder is added; after the molten steel approaches complete solidification, a third part of molten steel is poured into the ingot mold, and a proper amount of protective powder is added, and the operation is repeated until all the molten steelis poured, and finally, the molten steel in the ingot mold is completely solidified and cooled. At each cas, that molten steel can be guaranteed to completely melt and float the protective slag in the ingot mould to the surface of the molten steel, The surface of molten steel is always completely covered by mold powder, which effectively solves the macrosegregation of large-scale ingot. The addedmold powder can not only absorb the inclusion in molten steel, but also clean the molten steel and avoid the oxidation and heat preservation on the surface of molten steel.
Owner:SHANGHAI UNIV
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