The invention provides a
galvanometer system correction device and a
correction method thereof, and relates to the technical field of precision
laser processing equipment. A
honeycomb panel is arranged in the middle of the outer frame of a bearing platform, a base plate for corrective is absorbed on the
honeycomb panel, and the
vacuum chamber of the
honeycomb panel is connected with a
dust collector; a PSD sensor for measuring the actual output
light spot center position of the
laser of a
galvanometer system is arranged on the vacuum absorption bearing platform; a CCD
image acquisition device is arranged above the base plate for correcting, and then is provided with a
light intensity regulating module and an
image acquisition board card; and a visual measurement
algorithm module is arranged. The invention can effectively inhibit the precision drift of the
galvanometer system, improve the efficiency of the galvanometer system when in correction model updating and in real-time correction calculation operation, improve the automatic degree of equipment, reduce the labor intensity of an operator, greatly improve the
processing precision of equipment, product quality and production efficiency, has simple structure and unique principle and method, and is particularly suitable for precision
laser processing equipment to use.