811 results about "Compounds of fluorine" patented technology

A plasma reactor for processing a workpiece such as a semiconductor wafer has a housing defining a process chamber, a workpiece support configured to support a workpiece within the chamber during processing and comprising a plasma bias power electrode. The reactor further includes plural gas sources containing different gas species, plural process gas inlets and an array of valves capable of coupling any of said plural gas sources to any of said plural process gas inlets. The reactor also includes a controller governing said array of valves and is programmed to change the flow rates of gases through said inlets over time. A ceiling plasma source power electrode of the reactor has plural gas injection zones coupled to the respective process gas inlets. In a preferred embodiment, the plural gas sources comprise supplies containing, respectively, fluorocarbon or fluorohydrocarbon species with respectively different ratios of carbon and fluorine chemistries. They further include an oxygen or nitrogen supply and a diluent gas supply. The controller is programmed to produce flow of different process gas species or mixtures thereof through different ones of said plural gas injection zones. The controller is further programmed to change over time the species content of the gases flowing through different ones of said plural gas injection zones.

Disclosed is a fluorine-containing compound represented by formula (1),wherein R1 represents a polymerizable double-bond containing group, R2 represents an acid-labile protecting group, R3 represents a fluorine atom or fluorine-containing alkyl group, and W represents a bivalent linking group. This compound can provide a fluorine-containing polymer compound that has a weight-average molecular weight of 1,000-1,000,000 and contains a repeating unit represented by formula (2),wherein R2, R3 and W are defined as above, each of R4, R5 and R6 independently represents a hydrogen atom, fluorine atom or monovalent organic group, at least two of R4, R5 and R6 may be combined to form a ring. This polymer compound can provide a resist composition capable of forming a pattern that is transparent to exposure light and superior in rectangularity.

Certain chemical compositions provide superior repellency, durability, and soil (stain) release properties when applied to a textile or fabric. Compositions may contain a fluorochemical-containing soil release component or a crosslinking component, or both, and also may contain an antimicrobial agent. In some applications, the crosslinking component may be hydrophobic, so as to be generally not compatible with aqueous environments. Compositions having less than about 6 weight percent of a fluorochemical-containing soil release component, based upon the weight of the treating composition, may be employed in some applications.

The invention relates to a metal surface treatment agent for metal surface pretreatment, in which silane coupling agent is the main composition. The treatment agent comprises the following raw materials: 1, 2- diethoxy estersil ethane (BTSE), gamma- aminopropyl silane (gamma-APS), water dispersible silicon dioxide, fluorine compound, acetic acid and water. On the basis of silane coupling agent film forming mechanism, by selecting and remixing the main composites silane: coupling agent (SA), surface conditioner and auxiliary film forming agent, a metal surface parkerizing substitute with silicon coupling agent as the main film forming agent is researched. The invention has the characteristics of innocuity, harmlessness, non-pollution, low-temperatrue fast processing, operation simplicity, wide material resource, low price, production clearness, etc.

A surface treatment agent, which contains:(A) a hydrolyzable metal alkoxide or a hydrolyzate thereof,(B) a fluorocompound containing a perfluoroalkyl group and a functional group reactive with the hydrolyzable metal alkoxide (A), and(C) an adhesion improvement agent,can provide a film having transparency and durability while maintaining excellent soil releasability and low refractive index.

The invention discloses an environment-friendly separation and recovery method of fluorine in a fluorine-containing waste liquid. According to the invention, a magnesium-containing compound is added into the fluorine-containing waste liquid as a precipitation agent, such that fluorine in the waste liquid is selectively precipitated; filtering is carried out, and fluorine-removed liquid and magnesium fluoride precipitate are obtained; the fluorine-removed liquid is used in waste water recycling; the magnesium fluoride precipitate is decomposed with sulfuric acid, such that a series of compounds of fluorine are obtained; decomposition residue is subjected to a dissolution-crystallization treatment, such that magnesium sulfate crystals are obtained; the obtained magnesium sulfate crystals are returned and recycled in the fluorine selective precipitation process; the crystallization mother liquor of magnesium sulfate is returned to the dissolution-crystallization process or the magnesium fluoride precipitation decomposition process. The method has the advantages of simple process, simple operation, low production cost, and good fluorine-removing effect. With the method, fluorine resource utilization is realized. The method also has the advantages of no fluorine-containing waste production and no three-waste emission.

The present invention relates to a fluorosilicone modified polyurethane water-proofing oil-proofing finishing agent and its preparation method. Said invention also provides its chemical structure formula. It is characterized by that it uses perfluor-olefin, hydroxyl silicon oil, epoxyethane and diisocyanate as raw material and makes them undergo the process of synthesis treatment so as to obtain the invented emulsion-fluorosilicone modified polyurethane water-proofing oil-proofing finishing agent.

An adhesive composition comprises (A) a linear polyfluoro compound containing alkenyl groups and having a perfluoropolyether structure backbone, (B) a fluorine-bearing organohydrogensiloxane, (C) a platinum compound, (D) a hydrophobic silica powder, (E) an isocyanurate having an epoxy and / or trialkoxysilyl group, (F) an organosiloxane containing an SiH group and an epoxy and / or trialkoxysilyl group, and (G) a carboxylic anhydride. The composition cures into a fluoroelastomer having excellent characteristics and achieves a firm adhesion to a broad range of metal and plastic substrates by brief heating at relatively low temperatures.

The invention discloses oil-proof paper and a production method thereof, and belongs to the technical field of oil-proof paper. The production method comprises the following steps: coating or sizing the base paper with composite oil-proof paint; and drying to obtain the finished paper, wherein the composite oil-proof paint comprises the following components in parts by weight: 100 parts of starch, 10-40 parts of a plasticizer, 5-100 parts of a coalescing agent and 1-30 parts of a fluorine-containing compound; the solid content of the paint is 5-15%. The composite oil-proof paint comprises the starch, the plasticizer, the coalescing agent and the fluorine-containing compound. The oil-proof paper disclosed by the invention has the advantages of relatively low cost and excellent oil-proof property.

The present invention relates to preparation method for an array substrate for the use in a liquid crystal display device, using an etchant composition comprising: a) 5-25 wt% of hydrogen peroxide (H2O2); b) 0.1-5 wt% of an organic acid; c) 0.1-5 wt% of a phosphate compound; d) 0.1-5 wt% of a water-soluble cyclic amine compound; e) 0.1-5 wt% of a water-soluble compound having a nitrogen atom and a carboxyl group in a molecule; f) 0.01-1.0 wt% of a fluorine-containing compound; g) 0.001-5 wt% of a polyhydric alcohol-based surfactant; and h) the balance of water based on the total weight of the composition.

A semiconductor device which has an interlayer insulating film comprised of molecules with silicon-oxygen bonds and silicon-fluorine bonds and contains a rare gas in concentration higher than 1011 atoms per cm2. The interlayer insulating film is preferably a fluorine-containing silicon oxide film which contains a rare gas. In a manufacturing process, an interlayer insulating is formed by a chemical vapor deposition from a material gas including a silicon-containing gas, a fluorine compound gas, a rare gas, and oxygen. The silicon-containing gas is preferably SiH4 gas, and the fluorine compound gas is preferably SiF4 gas. The flow rate of the rare gas is greater than three times the total flow rate of the SiH4 gas and SiF4 gas. The rare gas is at least one type of gas selected from neon (Ne), argon (Ar), krypton (Kr), and xenon (Xe).