58 results about "Inert gas dilution" patented technology

A method of remote plasma cleaning a processing chamber of CVD equipment, which has high cleaning rates, low cleaning operational cost and high efficiency, is provided. The method comprises supplying cleaning gas to the remote plasma-discharge device; activating the cleaning gas inside the remote plasma-discharge device; and bringing the activated cleaning gas into the processing chamber and which is characterized in that a mixed gas of F2 gas and an inert gas are used as the cleaning gas. A concentration of the F2 gas is 10% or higher. The F2 gas, which is a cleaning gas, is supplied to the remote plasma-discharge device from an F2 gas cylinder by diluting F2 gas at a given concentration by an inert gas.

The invention discloses an Al / Al2O3 heat storage material and a preparation method thereof. Aluminum oxide serves as a base material; and a spherical metallic aluminum 'core' is enclosed by a layer of aluminum oxide 'enclosure'. In the process of heat storage, metallic aluminum can absorb heat to be changed from a solid state to a liquid state and the temperature of the metallic aluminum rises; at the same time, the external aluminum oxide layer also can absorb the heat, so that the temperature of the external aluminum oxide layer rises; and in the process of heat transfer, the liquid metallic aluminum releases both hidden heat and sensible heat and the aluminum oxide enclosure releases the sensible heat. The preparation process of the Al / Al2O3 heat storage material is obviously different from a conventional method, and comprises the following steps of: atomizing the liquid metallic aluminum (above 660 DEG C) into tiny particles with an atomizing device; and cooling the tiny liquid metallic aluminum particles in an oxidizing atmosphere and oxidizing the external aluminum oxide layer to form the Al / Al2O3 phase-change heat storage material taking the metallic aluminum as the 'core' and taking aluminum oxide as the 'enclosure', wherein the oxidizing atmosphere may adopt oxygen, water vapor, carbon dioxide or air diluted by an inert gas. The preparation method is simple and easy to realize large-scale production.

To provide a novel fluorination treatment method whereby the surface of oxide glass can be treated for fluorination at low cost and with excellent adhesiveness.A method for treating the surface of oxide glass, which comprises contacting the surface of oxide glass with a gas of a fluorinating agent or a mixed gas having a fluorinating agent diluted with an inert gas, wherein the fluorinating agent is an elemental fluorine, or a fluorine compound capable of cleaving a bond between an oxygen atom and a metal atom in the framework of the oxide glass and forming a bond between a fluorine atom and the metal atom; and the concentration of hydrogen fluoride at the surface of oxide glass with which the fluorinating agent is in contact, is controlled to be at most 1 mol %.

The invention discloses a co-production preparation method of 2-chloro-3,3,3-trifluoropropene and 2,3-dichloro-1,1-difluoro propylene, comprising the following steps: activating and dewatering a Cr2O3-Al2O3 catalyst; then fluoridising; performing inerting on a 1,1,2,3- tetrachloro propylene mixed gas diluted by inert gas; causing hydrogen fluoride and 1,1,2,3-tetrachloro propylene mixed gas to react under the action of fluoridised and inerted Cr2O3-Al2O3 catalyst to obtain 2-chloro-3,3,3-trifluoropropene and 2,3- dichloro-1,1-difluoro propylene after an effluent is introduced in a rectifying tower; and obtaining the product after deacidification and distillation processing. With the method, the 2-chloro-3,3,3-trifluoropropene and the 2,3-dichloro-1,1-difluoro propylene can be simultaneously obtained. After the reaction, the conversion rate of the 1,1,2,3-tetrachloro propylene is 99%.

The present invention suppresses metallic contamination in a processing chamber and a breakage of a quartz member, while suppressing decrease in film formation rate in a thin film formation process immediately after dry cleaning of the inside of the processing chamber, and enhances the operation rate of a apparatus. The method according to the invention includes the steps of: removing the thin film on the inside of the processing chamber by supplying a fluorine gas solely or a fluorine gas diluted by an inert gas solely, as the cleaning gas, to the inside of the processing chamber heated to a first temperature; and removing an adhered material remaining on the inside of the processing chamber after removing the thin film by supplying a fluorine gas solely or a fluorine gas diluted by an inert gas solely, as the cleaning gas, to the inside of the processing chamber heated to a second temperature.

A carbon atom wire is disclosed, which is composed of carbon atoms linked to become a wire with 1.5-2 A for diameter, more than 95% of C content and less than 5% of O2 content. A process for preparing the carbon nanotubes and carbon atom wire by pyrolyzing solid carbon source is disclosed, which uses starch, cellulose, or polyacrylic resin as carbon source and transmission metal (Fe, Co, Ni or their alloys) as catalyst. Its pyrolysis includes decomposing at 450-600 deg.C in H2 or CO, post treating at 600-1000 deg.C and diluting by N2, Ar, or other inertial gases. Its advantages are high output rate and uniform diameter.

Composite joints for gas-tight members that exhibit different coefficients of thermal expansion are disclosed. Broadly, apparatus of the invention provides composite joints which include a girdle of a resilient material disposed between mating surfaces of a high strength metallic member and a nonmetallic member in an arrangement wherein a difference in fluid pressures across the joint provides compressive force upon the girdle through tapered mating surfaces thereby improving resistance to fluid leakage. Composite joints of the invention are particularly useful for joining a high strength weldable metallic conduit and a gas-tight ceramic member having a tubular structure, closed at one end, with a tapered mating surface at a distal end thereof contiguous with a portion of the girdle. Processes beneficially using joints in accordance with the invention include converting methane gas into value-added-products, for example, production of synthesis gas comprising carbon monoxide and molecular hydrogen. Advantageously, the synthesis gas is free of deleterious and / or inert gaseous diluents such as nitrogen.

The invention discloses a device and method for oxyhydrogen combination reaction. Said device comprises fluidized-bed reactor, the bottom of reactor is equipped with air containing oxygen inlet, said inlet is connected with hydrogen distributor, hydrogen distributor is fixed on tubular wall; a catalyst dense-flow area is equipped inside the reactor, heat exchanger is connected with said tubular wall; said dense-phase area is equipped with internal element connected with heat exchanger, the upper of said reactor is equipped with enlarged segment and gas-solid separation device connected with said enlarged segment; enlarged segment is equipped with heater; the tubular wall of reactor in axial direction is equipped with catalyst inlet, the bottom of reactor is equipped with devitalized catalyst outlet. The method essentially comprises controlling molecular ration between hydrogen and oxygen, controlling temperature, gas speed and air speed of catalyst in catalyst dense-phase area. The invention is characterized by strong elasticity of operation, convenient heat mobility, and high conversion rate for oxyhydrogen combination and need no inactive gas for dilution.

A method for transforming at least a part of the catalyst precursor hematite into χ-carbide (Fe5C2) and ε′-carbide (FeC2.2) without a large amount of fines generation. This method slows the transformation of the hematite to iron carbides by reducing the partial pressure of the synthesis gas by inert gas dilution. The activation time is about three to about five hours.

The invention relates to a method for preparing high-density zinc oxide nano granules. In the method, the high-density zinc oxide nano granules are grown by using diethyl zinc steam diluted by inert gas and steam of aqueous solution of hydrogen peroxide as reaction precursors, adopting an atomic layer deposition mode and using atomic layer deposition equipment, wherein the diethyl zinc steam and the steam of the aqueous solution of the hydrogen peroxide, serving as the reaction precursors, are alternately introduced into a reaction cavity in a pulse mode, and the two kinds of steam are blown and washed by using inert gas. The high-density zinc oxide nano granules are grown by using an atomic layer deposition technology, so the process is simple, and the production cost is low; the size of the nano granules can be accurately controlled; the zinc oxide nano granules with average diameter of about 5 to 25 nanometers, height of 2 to 10 nanometers and density of 1.0*10<10> to 1.0*10<11>cm<-2> can be obtained; and the zinc oxide nano granules can be used for a photoelectric conversion material for a solar cell.

A method of determining ventilation inhomogeneity in the lungs is provided. During the first step of the method, a lung volume series is calculated from a series of measured lung inert gas concentrations and lung inert gas volumetric change measured data series. As a second step, the series of lung volumes is completed with a series of value representing the total gas exchange efficiency in the lungs. A global inert gas dilution ratio may be used for this purpose. The gas exchange efficiency values are such that less ventilation is represented by lower numbers. As the third step, the gas exchange efficiency series is plotted as an ordinate and lung volume series as an abscissa to form a graph. From this graph both the lung volume and homogeneity of ventilation become directly apparent.

A method of determining ventilation inhomogeneity in the lungs is provided. During the first step of the method, a lung volume series is calculated from a series of measured lung inert gas concentrations and lung inert gas volumetric change measured data series. As a second step, the series of lung volumes is completed with a series of value representing the total gas exchange efficiency in the lungs. A global inert gas dilution ratio may be used for this purpose. The gas exchange efficiency values are such that less ventilation is represented by lower numbers. As the third step, the gas exchange efficiency series is plotted as an ordinate and lung volume series as an abscissa to form a graph. From this graph both the lung volume and homogeneity of ventilation become directly apparent.

The invention relates to a control method for preventing hydrogenation tail gas blast in anthraquinone method preparation of hydrogen peroxide. The control method mainly solves the problem of a low safety factor of the prior art. According to the control method, an outlet pipe at the top of a hydrogenation reactor is connected to a gas-liquid separator, a gas outlet pipe at the top of the gas-liquid separator is provided with an oxygen content on-line detector, an alarm value and an interlocking value are set, when oxygen content at a gas outlet at the top of the gas-liquid separator is greater than the alarm value, a work liquid fed into the hydrogenation reactor is reduced or the work liquid feeding process is stopped and when oxygen content at the gas outlet at the top of the gas-liquid separator is greater than the interlocking value, the work liquid feeding process on the hydrogenation reactor is stopped and inert gas is supplied for the gas-liquid separator to dilute oxygen. Therefore, the control method solves the existing problem and can be used for controlling hydrogenation tail gas blast in anthraquinone method preparation of hydrogen peroxide.

The invention relates to an acrylaldehyde preparation method by glycerin dehydration under inert gas dilution, particularly an acrylaldehyde preparation method by the glycerin which is the byproduct of the preparation of biodiesel. Under inert gas atmosphere, alumina and acid zeolite are taken as catalyst; under the conditions that the reaction temperature is 200-500 DEG C, the reaction pressure is 0.001-3.0MPa and the liquid airspeed is 0.1-100.0h<-1>, the glycerin is directly dehydrated to generate acrylaldehyde and byproduct hydroxyacetone. The technique is characterized in that dehydration reaction is carried out under inert gas atmosphere, thus the activity, selectivity and stability of the reaction are high, especially high concentration glycerin can be taken as raw material and is high in selectivity and stability; thus reducing waste liquid treatment capacity of post treatment and greatly reducing energy consumption and production cost.

The preparation process of standard acetaldehyde gas includes the following steps: feeding acetaldehyde solution into vacuumized bottle, gasifying acetaldehyde, heating to depolymerize paraldehyde in the acetaldehyde solution into acetaldehyde gas, cooling to room temperature, and diluting with inert gas to normal pressure to obtain standard acetaldehyde gas. Compared with available technology, the present invention has the advantages of being simple, fast and accurate, low cost, etc. The prepared standard acetaldehyde gas may be set stably for over 24 hr, and is used in environment atmosphere detection and acetaldehyde detection in industrial waste gas.

The invention discloses a catalyst for preparing corresponding olefins through dehydrogenation of low-carbon alkanes and application of the catalyst, and relates to low-carbon alkanes. The chemical composition of the catalyst comprises a precious metal element, a modification element and a carrier, wherein the mass percentage content of the precious metal is 0.3-20%, the mass percentage content ofthe modification element is 0.1-50%, and the balance is the carrier. The application of the catalyst for preparing the corresponding olefins through dehydrogenation of the low-carbon alkanes in direct olefin production comprises the specific steps that the catalyst is heated from room temperature to a reaction temperature of 450-800 DEG C at a heating rate not higher than 20 DEG C min<-1> under inert gas purging, and the heating treatment time is 10-120 min; and after the catalyst is pretreated, low-carbon alkane gas or low-carbon alkane mixed gas diluted by inert gas is introduced, the reaction gas composition comprises the following components in percentage by volume: 20-70% of low-carbon alkanes and the balance of inert gas, and the reaction gas enters a reactor and flows through a solid catalyst bed layer to be subjected to dehydrogenation reaction to generate the corresponding olefin product.

A piezoelectric element is manufactured by applying a masking agent to a surface of a piezoelectric material to form a film of the masking agent on the surface of the piezoelectric material. The film of the masking agent is patterned into a masking pattern. Oil repellent is selectively applied to surface portions of the substrate which are not covered with the patterned film. The patterned film is held in contact with a vapor of a solvent for the masking agent, diluted with an inert gas, to fluidize the film to a domed shape on the surface of the piezoelectric material. The diluted vapor is formed by bubbling the solvent with the inert gas. The dome-shaped film is then cured and the piezoelectric material is dry etched together with the cured film to process the piezoelectric material into a three-dimensional convex profile corresponding to the thickness distribution of the domed shape.

The invention discloses a pre-warning and control method for occurrence of an oil gas thermal explosion in a limited space. The fast consumption rate of oxygen when the oil gas thermal explosion occurs is taken as a pre-warning judgment criterion for the occurrence of the oil gas thermal explosion. A real-time oil gas environmental safety state can be obtained by monitoring oxygen concentration consumption rate data in an oil gas environment and performing analysis treatment on the data through a system. When the judgment shows that the risk of the oil gas thermal explosion is increased, an alarm is sent to a control system and / or field staff. After the oil gas thermal explosion control system is started, cold air cooling by a compressor, inert gas dilution purging, water mist humidification and other measures are adopted, the conditions for enabling the oil gas thermal explosion to occur are damaged, and the oil gas thermal explosion is further effectively controlled.

The invention discloses a method for preparing guaiacol. The method comprises two steps of firstly, putting cyclohexene oxide and methyl alcohol into a fixed bed reactor with supported solid acid catalyst according to a certain proportion, continuously reacting under inert gas protection so as to obtain o-methoxyl cyclohexanol; secondly, diluting the o-methoxyl cyclohexanol with inert gas, then passing through a dehydrogenation catalyst bed activated by H2, rectifying a coarse product so as to obtain the guaiacol. The method has the characteristics that the raw material has low cost, atom economy is high, yield of the product is high, and the separation technology is simple.

The invention provides an online optical fiber laser oxygen concentration monitoring and early warning system for an inner floating roof light oil product tank, and relates to the field of gas concentration detecting. The concentration of oxygen in the oil product tank can be accurately detected effectively, a feedback loop is used for driving inert gas to reduce the concentration of the oxygen in the tank through dilution, and therefore safety of the oil product tank is guaranteed. The online optical fiber laser oxygen concentration monitoring and early warning system comprises an oxygen concentration sensor, an oxygen concentration analyzer, an oxygen-oil gas concentration explosion limit early warning system and an inert gas diluting system. The oxygen concentration sensor is arranged on the side face in an arch apex of the inner floating roof light oil product tank and connected with the oxygen concentration analyzer through a wire jumper. The oxygen-oil gas concentration explosion limit early warning system is connected with the oxygen concentration analyzer and the inert gas diluting system, and the inert gas diluting system communicates with the interior of the light oil product tank through a pipeline.

The invention relates to a perfluorooctanoic acid fluoride preparation method. According to the invention, fluorine gas is diluted by inert gas and is subjected to caprylyl chloride under low temperature condition to prepare perfluorooctanoic acid fluoride. The technical means such as inert gas dilution, reaction temperature reduction, stirring or filling material increasing can be carried out so that the reaction of fluorine gas and caprylyl chloride is milder and more uniform, control is easy, yield of perfluorooctanoic acid fluoride is greatly increased, usage of an electrolytic tank metal anode is avoided, and the generation of a solid waste material is basically eliminated. Direct reaction of fluorine gas and caprylyl chloride can avoid the energy waste, increases perfluorooctanoic acid fluoride yield, reduces the generation of by products such as low fluorine carbon due to a scission reaction of long-chain carbon atoms, quality of the perfluorooctanoic acid fluoride product is guaranteed, and the method has great meaning for perfluorocapylic acid production enterprises.

The invention belongs to the technical field of laboratory gas bottle internal pressure monitoring, and particularly relates to a leakage alarm linkage system and a linkage alarm exhaust method. The leakage alarm linkage system mainly comprises a normally-open pneumatic valve, a normally-closed pneumatic valve, a leakage alarm probe, a leakage alarm host, a linkage anti-explosion exhaust device, alinkage closing device and a hazardous gas dilution device. The leakage alarm probe is installed near a hazardous gas bottle. When gas leakage is sensed, a signal is transmitted to the leakage alarmhost installed in a master control room or a manager office, the leakage alarm host gives out a sound-light alarm to inform a manager to carry out emergency treatment, meanwhile, the signal is transmitted to the linkage anti-explosion exhaust device and the linkage closing device, the linkage anti-explosion exhaust device is started, high-power exhaust is started, the linkage closing device is started, hazardous gas is prevented from being continuously output, the hazardous gas dilution device outputs inert gas to dilute the hazardous gas, the hazardous gas is exhausted outdoors through an exhaust pipeline, and therefore indoor safety is automatically guaranteed, and potential safety hazards are systematically eliminated.

When a disproportionated chlorosilane is to be produced by causing a starting material chlorosilane liquid to flow through a catalyst-packed layer which is packed with a weakly basic anion exchange resin as a disproportionation reaction catalyst to carry out a disproportionation reaction, before the disproportionation reaction is carried out, the disproportionation reaction catalyst is brought into contact with a processing gas obtained by diluting a chlorosilane with an inert gas to prevent the deterioration of the disproportionation reaction catalyst at the start of the reaction so as to carry out the disproportionation of the chlorosilane efficiently.

The invention discloses a method and a device for continuous preparation of carbamyl chloride. The method includes: diluting an amino compound by an inert gas and preheating it, letting the amino compound continuously enter a ceramic membrane microporous gas distributor at one end inside a tubular reactor and diffuse into the tubular reactor through pores on membrane tube walls of the ceramic membrane microporous gas distributor; preheating inert gas diluted phosgene, and making it continuously enter the tubular reactor through a phosgene inlet at the above end inside the tubular reactor along the membrane tube wall tangential direction of the gas distributor and mix with the diffused amino compound to undergo a reaction, and then carrying out separation so as to obtain carbamyl chloride. The device mainly comprises the tubular reactor and the membrane distributor. The method can effectively improve the yield of the isocyanate intermediate carbamyl chloride, is simple and has rapid reaction, thus being able to realize continuous industrial production. The device disclosed in the invention can well disperse the reaction raw materials and achieve a good mixing effect, thus being beneficial to improve the reaction yield and product quality and reducing side reaction in the reaction process.

The present invention relates to a process for production of a synthetic quartz glass having a fluorine concentration of 1,000 mass ppm or more, the process comprising: (a) a step of depositing and growing quartz glass fine particles obtained by flame hydrolysis of a glass forming raw material onto a substrate, to thereby form a porous glass body; (b) a step of keeping the porous glass body in a reaction vessel that is filled with elemental fluorine (F2) or a mixed gas comprising elemental fluorine (F2) diluted with an inert gas and contains a solid metal fluoride, to thereby obtain a fluorine-containing porous glass body; and (c) a step of heating the fluorine-containing porous glass body to a transparent vitrification temperature, to thereby obtain a fluorine-containing transparent glass body.

The invention relates to an anti-corrosion method for a mechanical oil extraction shaft, and belongs to the technical field of oilfield development and oil extraction. The anti-corrosion method comprises the following steps: the amount of inert gas needed by corrosion-free residue in oil shaft products is determined through a laboratory test; an oil pipe valve is opened firstly, an inert gas source is connected with a sleeve pipe connection pipe through a pipeline, and then a sleeve pipe valve is opened, so that the connection pipe is communicated with an annular space of an oil pipe and a sleeve pipe; the inert gas is injected into the annular space of the oil pipe and the sleeve pipe through the sleeve pipe inlet; a sample is taken from an oil pipe outlet for a laboratory test in the injection process of the inert gas; and the inert gas is injected until no corrosive residue exists in the sample of the oil pipe outlet. The anti-corrosion method is simple in operation, low in cost, and good in anti-corrosion effect. The inert gas is used for isolating the air or diluting and drying corrosive gas, metal inside the shaft or a ground conveying pipeline is effectively prevented from being corroded, maintenance frequency and cost are lowered, and work efficiency is improved.

A method for transforming at least a part of the catalyst precursor hematite into χ-carbide (Fe5C2) and ε′-carbide (FeC2.2) without a large amount of fines generation. This method slows the transformation of the hematite to iron carbides by reducing the partial pressure of the synthesis gas by inert gas dilution. The activation time is about three to about five hours.

The present invention provides a method for manufacturing a low-salt sodium hypochlorite solution in high efficiency. The method comprises: a step (1), a supply of 30 to 60% by mass of aqueous sodium hydroxide to a reaction vessel; step (2), introduced chlorine gas, which is diluted with an inert gas, to the aqueous sodium hydroxide itIt is supplied to the reaction tank and chlorination at 20-50 DEG C of reaction temperature; and the step (3), separating and removing precipitated byproduct, sodium chloride, from the reaction mixture to obtain the aqueous solution of sodium hypochlorite.

The invention discloses a device for increasing the nitric acid utilization rate in production. The device comprises a reaction kettle, a flow guiding tube, a gas distributor and a dripping funnel; the reaction kettle is provided with an upper cover, the upper cover is provided with a hole, and a discharging valve is arranged at the lower end of the upper cover; the flow guiding tube penetrates into the upper cover to be arranged in the reaction kettle; the dripping funnel is inserted into the flow guiding tube; and the gas distributor is arranged at the bottom of the reaction kettle. The device has the beneficial effects that 1, nitrogen oxide generated by the device is directly converted into nitric acid in a reaction system, and thus the utilization rate of nitric acid raw materials isincreased; 2, absorption liquid is replaced with an oxygen-containing reaction solution, polluted wastewater is not generated, an absorbent does not need to be purchased additionally, and only air needs to be utilized to increase oxygen is increased in reaction liquid through air; and 3, the nitrogen oxide generated in the reaction liquid is not mixed with inert gas, and thus the problem that theinert gas mixed with the nitrogen oxide is exhausted into air, and consequently the air is polluted is avoided, and the problem that the nitrogen oxide is diluted by the inert gas, the absorption rateis greatly decreased, and consequently the cost of absorption equipment is high is also avoided.

The invention discloses an Al / Al2O3 heat storage material and a preparation method thereof. Aluminum oxide serves as a base material; and a spherical metallic aluminum 'core' is enclosed by a layer of aluminum oxide 'enclosure'. In the process of heat storage, metallic aluminum can absorb heat to be changed from a solid state to a liquid state and the temperature of the metallic aluminum rises; at the same time, the external aluminum oxide layer also can absorb the heat, so that the temperature of the external aluminum oxide layer rises; and in the process of heat transfer, the liquid metallic aluminum releases both hidden heat and sensible heat and the aluminum oxide enclosure releases the sensible heat. The preparation process of the Al / Al2O3 heat storage material is obviously differentfrom a conventional method, and comprises the following steps of: atomizing the liquid metallic aluminum (above 660 DEG C) into tiny particles with an atomizing device; and cooling the tiny liquid metallic aluminum particles in an oxidizing atmosphere and oxidizing the external aluminum oxide layer to form the Al / Al2O3 phase-change heat storage material taking the metallic aluminum as the 'core' and taking aluminum oxide as the 'enclosure', wherein the oxidizing atmosphere may adopt oxygen, water vapor, carbon dioxide or air diluted by an inert gas. The preparation method is simple and easy to realize large-scale production.