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67 results about "Cubic silicon carbide" patented technology

Method for manufacturing porous diamond or porous cubic silicon carbide self-supporting film

The invention discloses a method for manufacturing a porous diamond or porous cubic silicon carbide self-supporting film. The method comprises the steps that a base material is provided, and surface of the base material is pretreated to obtain a higher diamond-shaped nuclei rate; the pretreated base material is put into a microwave plasma chemical vapor deposition or hot filament chemical vapor deposition reactor, and at the temperature of 600 DEG C to 900 DEG C, a diamond / cubic silicon carbide composite film is manufactured; selective etching is performed on the obtained composite film, at the temperature above 70 DEG C, the composite film is etched in mixed corrosion liquid of hydrofluoric acid and nitric acid, and the porous diamond self-supporting film is obtained, at the temperature above 500 DEG C, the composite film is heated in the air containing oxygen gas, and the porous cubic silicon carbide self-supporting film is obtained. Under the condition that any template and any electrode material are not used, the obtained porous diamond self-supporting film and the porous cubic silicon carbide self-supporting film have the controllable aperture, the controllable porosity and the controllable thickness, and the method is suitable for industrial application and fundamental research.
Owner:INST OF METAL RESEARCH - CHINESE ACAD OF SCI

Si-base reversed extension 3C-SiC monocrystal film and preparation method thereof

The invention relates to a cubic silicon carbide (3C-SiC) monocrystal film with reversed extension growth on a Si base and a preparation method thereof, belonging to the preparation field of novel Si-base wide band-gap semiconductors, wherein the cubic silicon carbide (3C-SiC) monocrystal film with reversed extension growth on the Si base is formed by diffusing carbon on the Si base to Si and reacting with the Si. The method adopts low-temperature chemical vapor deposition (LPCVD for short), comprising the following steps of: diffusing the carbon to the Si by utilizing methane decomposition at high temperature to effectively displace the Si, and forming the 3C-SiC monocrystal film with the stoichiometric ratio of 1:1 by using a reversed extension growth mechanism, wherein the thickness of the 3C-SiC monocrystal film can reach the micrometer level, the electronic Hall mobility at the room temperature reaches 1.22*10<3> cm<2>/(V.S), and the electronic Hall mobility in liquid nitrogen reaches 2.06*10<3> cm<2>/(V.S). The impurity concentration and the condition type of the 3C-SiC monocrystal film prepared in the method can be controlled through the impurity concentration and the condition type of a monocrystal silicon substrate, and the impurity concentration in the film is uniform. The preparation method can be used for obtaining the Si-base reversed extension 3C-SiC monocrystal film with low stress and high quality.
Owner:SICHUAN UNIV

Preparation method of diamond/silicon carbide three-dimensional composite structure and prepared product

The invention discloses a preparation method of a diamond / silicon carbide three-dimensional composite structure and a prepared product, and aims to solve the problem that a traditional micron crystal / nanometer crystal diamond multilayer film structure cannot be applied to a metal matrix containing a graphite phase catalytic effect due to strong dependence on the material type of the matrix. Under the condition of no need of additional matrix pretreatment, the preparation method realizes one-step intermittent growth of a diamond / cubic silicon carbide three-dimensional composite structure on multiple matrix materials (such as stainless steel, WC-Co, Si3N4 and the like), so that the treatment procedures are effectively reduced, the growth time is shortened, and the labor cost is saved. Meanwhile, the prepared three-dimensional composite structure can prominently improve the adhesivity, the wear resistance and the fracture toughness of coatings on the surface of the matrix, satisfies the application demands in the high-performance surface coating field, is better in application prospect, and is worthy of large-scale promotion and application.
Owner:姜辛 +2

Method for production of silicon carbide layer, gallium nitride semiconductor device and silicon substrate

ActiveUS20090045412A1Few crystalline defectPromotion of unnecessary disintegration can be avoidedPolycrystalline material growthSemiconductor/solid-state device manufacturingGallium nitrideCubic silicon carbide
A method for producing a silicon carbide layer on a surface of a silicon substrate includes the step of irradiating the surface of the silicon substrate heated in a high vacuum at a temperature in a range of from 500° C. to 1050° C. with a hydrocarbon-based gas as well as an electron beam to form a cubic silicon carbide layer on the silicon substrate surface.
Owner:SHOWA DENKO KK

Semiconductor device based on the cubic silicon carbide single crystal thin film

A semiconductor apparatus includes a cubic silicon carbide single crystal thin film of a multilayer structure including an AlxGa1-xAs (0.6>x≧0) layer and a cubic silicon carbide single crystal layer. The apparatus also includes a substrate on which a metal layer is formed. The multilayer structure is bonded to a surface of the metal layer with the AlxGa1-xAs (0.6>x≧0) in direct contact with the metal layer.
Owner:OKI ELECTRIC IND CO LTD

Cubic silicon carbide anticorrosive wear-resistant coating and preparation method thereof

The invention discloses a cubic silicon carbide anticorrosive wear-resistant coating. The cubic silicon carbide anticorrosive wear-resistant coating is prepared from the following raw materials in parts by mass: 40-60 parts of water-based resin, 10-20 parts of deionized water, 10-20 parts of titanium dioxide, 2-6 parts of cubic silicon carbide micro-powder, 5-10 parts of a filler, 0.1-0.5 part ofa defoaming agent, 0.1-0.5 part of a wetting agent, 0.05-0.2 part of a thickening agent and 0.2-0.6 part of a water-based drier. The invention also discloses a preparation method of the cubic siliconcarbide anticorrosive wear-resistant coating. The preparation method comprises the following steps: preparing a mixture by a step-by-step method, adding deionized water and assistants, and carrying out dispersing and filtering to obtain the coating. According to the coating, the water-based resin is used as a film-forming substance, so a curing agent is not required to be added, and the corrosionresistance and wear resistance of the coating are improved; the method provided by the invention is beneficial for full and uniform mixing of the components, ensures full play of the effects of the assistants, and does not need heating in the preparation process; and the coating can be used without blending, so the application range of the coating is enlarged.
Owner:XIAN BOER NEW MATERIAL CO LTD

Silicon-carbide-core nano compound particle coated by nitrogen-doped carbon shell and preparation method of particle

The invention discloses a silicon-carbide-core nano compound particle coated by a nitrogen-doped carbon shell. The silicon-carbide-core nano compound particle is formed by taking nano silicon carbide as the core and carbon generated on the surface of the silicon carbide in situ as the shell and doping nitrogen atoms into the carbon shell. The preparation method of the nano compound particle mainly comprises the following steps: dropping a saturated chloride solution into cubic silicon carbide particles or whiskers till the silicon carbide can be soaked by the solution completely; then drying after uniformly mixing, uniformly mixing the dried silicon carbide and tripolycyanamide or ammonium chloride, and then putting in a sintering furnace; heating to 1,000-1,500 DEG C in vacuum, argon gas or nitrogen gas atmosphere, and cooling to room temperature after preserving the heat for 0.5-3 hours; and soaking the powder after heat treatment with 37% concentrated hydrochloric acid, water-washing to neutrality, and drying. The preparation method of the nano compound particle disclosed by the invention is simple and safe, the nano compound particle which serves as a cathode catalyst of a fuel battery has high thermostability and chemical stability, so that the synthetic catalyst material has high durability, and the service life of the catalyst is prolonged.
Owner:YANSHAN UNIV

GaN blue light LED device using 3C-SiC-Si as substrate

The invention relates to a GaN blue light light-emitting diode (LED) device using 3C-SiC-Si as a substrate. A manufacturing method comprises the following steps of: preparing a silicon wafer, manufacturing a buffer layer, which consists of an ultrathin carbonizing layer, a blocking seed layer and a cubic silicon carbide epitaxial layer, of the device on a silicon wafer serving as a basic substrate layer; depositing GaN on the buffer layer to form a GaN structural layer; bonding an aluminum plate or a nickel plate plated with silver or magnesium on the GaN structural layer to form ohmic contact; and etching silicon to form the GaN blue light LED device with a self-support structure. By the implementation and application of the technology of the invention, diameters of LEDs wafers are increased (which can reach 12 maximally), the production cost and machining cost of LED chip materials are reduced greatly, the high-quality GaN depositing layer can be obtained effectively and also can be used as barrier layer with high chemical stability to etch the silicon, and the opportunity is created for the improvement on LED tube cores, the extraction of light and the elimination of high-temperature stress.
Owner:韩吉胜 +1

Silicon carbide nanometer line accompanied with string structure and preparation method thereof

The invention provides a silicon carbide nanowire with a string-shaped structure and a preparation method thereof, and relates to a quasi-one dimensional nanostructure and a preparation method thereof. The silicon carbide nanowire with the string-shaped structure is a single crystal of cubic silicon carbide. The method comprises the following steps of: putting amorphous carbon / silicon dioxide nano composite powder into a crucible and place the crucible in an atmosphere sintering furnace; passing through argon into the furnace after the furnace is vacuumized to ensure that initial air pressure reaches between 0.1 and 2.0MPa; then, heating the furnace up to a temperature of between 1500 and 1800 DEG C at a rising speed of between 5 and 30 DEG C / minute for 0.5 to 6 hours; and cooling the powder to room temperature in the furnace to obtain the silicon carbide nanowire with the string-shaped structure. A diameter of a central line or a central rod is distributed in a range of between 50 and 100 nanometers, and a diameter of the silicon carbide nanowire with the string-shaped structure on the central line or the central rod is distributed in a range of between 100 and 500 nanometers. The silicon carbide nanowire with the string-shaped structure and the preparation method have the advantages of simple preparation process, low cost and short preparation period, and can realize control to the structure and the appearance of a product.
Owner:HARBIN INST OF TECH

Method for processing cuboid silicon carbide whiskers through natural fine quartz

The invention relates to a method for processing cuboid silicon carbide whiskers through natural fine quartz. The method includes the steps of mixing natural fine quartz with water, adjusting the pH value to be 7.8-8.3, adding a dispersing agent, conducting sedimentation and filtering, taking out filtrate, centrifugally separating the filtrate to obtain centrifugate, drying the centrifugate to obtain natural fine quartz concentrate, adding carbon power to the natural fine quartz concentrate, conducting microwave carbonizing treatment, conducting cooling to the room temperature to obtain cuboid silicon carbide micro powder, putting the cuboid silicon carbide micro powder into a medium-frequency induction heating furnace, conducting heat to 1800-2000 DEG C, and conducting reaction for 6-10 h to obtain the cuboid silicon carbide whiskers. According to the method, reaction is complete, the impurity content is greatly reduced, the cuboid silicon carbide yield and purity are greatly improved, the processing method is simple, and cuboid silicon carbide can be easily prepared on a large scale.
Owner:武汉拓普准晶新材料有限公司

Method for preparing cubic silicon carbide crystals and device thereof

InactiveCN111394788AEffectively maintains carbonization growth rateMaintain the carbonation growth ratePolycrystalline material growthFrom condensed vaporsCubic silicon carbideCarbide silicon
The invention belongs to the technical field of crystal growth, and provides a method for preparing cubic silicon carbide crystals. The method comprises the following steps: silicon carbide powder andseed crystals are put into a closed graphite crucible; wherein the seed crystal is arranged in the center of the top of the graphite crucible, the silicon carbide powder is arranged on the outer sideof the seed crystal, the silicon carbide powder is isolated from the seed crystal by adopting a graphite ring, the silicon carbide powder is sublimated to the surface of the seed crystal, and coolingcrystallization is performed on the seed crystal to grow cubic silicon carbide crystals. According to the method for preparing the cubic silicon carbide crystal, traditional high-temperature and low-pressure growth conditions are avoided, the crystal growth space is greatly increased through an innovative vertical charging mode compared with a traditional method, and therefore the high-quality cubic silicon carbide crystal can be stably prepared under the low-temperature and high-pressure conditions.
Owner:江苏超芯星半导体有限公司

Method for manufacturing silicon carbide thin film

A method for manufacturing a silicon carbide thin film comprises steps of: (a) utilizing a mechanical pump to remove gases in a chamber such that the pressure in the chamber is reduced to a bass pressure; (b) utilizing a microwave generator to generate microwaves at 1200W to 1400W so as to form microwave plasma inside the chamber; and (c) introducing into the chamber a silicon-based compound containing chlorine atoms that serve as a precursor, during the time that the temperature of a substrate disposed in the chamber is stable at 400° C. to 500° C., in which the temperature of the substrate is risen by the microwave plasma without heating the substrate additionally, so as to form a film of cubic silicon carbide on the substrate. In the present invention, the SiC thin film has good crystallinity and is manufactured by using MPECVD in a low temperature process.
Owner:NATIONAL TSING HUA UNIVERSITY
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