The invention discloses an LTCC (Low Temperature Co-Fired
Ceramic)-based passive LC (Inductive-Capacitive)
humidity sensor. The LTCC-based passive LC
humidity sensor comprises thirteen
layers from top to bottom, wherein the
layers with odd numbers are
all ceramic dielectric layers, the layers with even numbers are all
metal layers, the second
capacitance metal layer is exposed out of a window of the first
dielectric layer, so that the
capacitance layer can sense the
humidity, the fourth, sixth, eighth, tenth and twelfth
metal layers are all
inductance metal layers, and two ends of inductors positioned in the fourth and twelfth metal layers are connected with two ends of the second
capacitance metal layer by through holes to form a parallel
LC circuit. The LTCC-based passive LC humidity sensor is realized by utilizing an LTCC technology, and can be used for effectively reducing the production process and greatly reducing the production cost, and a quality factor of a
ceramic material is high, so that the loss of the circuit is low. More importantly, the LTCC
ceramic material is good in stability and not sensitive to environmental changes, and a
ceramic sintering body is compact in structure and low in
moisture permeability, so that the sensor can be applied in a high-humidity environment without encapsulation.