The invention discloses a bipolar two-dimensional fully flexible high-precision
servo platform, which comprises a base, a
macro moving platform, first and second
voice coil motors, a micro moving platform, first and second bimorphs, first and second displacement sensors and a controller connected with the
voice coil motors, the bimorphs and the displacement sensors. The
servo platform provided by the invention adopts a fully flexible structure and is formed by connecting the
macro moving platform and the micro moving platform in series, and the
macro moving platform and the micro moving platform respectively adopt a parallel structure, are respectively and directly driven by the
voice coil motors and the bimorphs, move by relying on the transmission of flexible hinge
structure based macro and micro moving platform guide rails, do not need to be assembled and lubricated, have no gaps and friction, and make large-
stroke, high-speed and high-precision movement while ensuring movement decoupling and improving
carrying capacity. The first and second displacement sensors are respectively used for measuring displacement signals of the
servo platform in X and Y directions and feeding back to the controller to realize the full
closed loop control of the servo platform.