Bipolar two-dimensional fully flexible high-precision servo platform

Abstract

The invention discloses a bipolar two-dimensional fully flexible high-precision servo platform, which comprises a base, a macro moving platform, first and second voice coil motors, a micro moving platform, first and second bimorphs, first and second displacement sensors and a controller connected with the voice coil motors, the bimorphs and the displacement sensors. The servo platform provided by the invention adopts a fully flexible structure and is formed by connecting the macro moving platform and the micro moving platform in series, and the macro moving platform and the micro moving platform respectively adopt a parallel structure, are respectively and directly driven by the voice coil motors and the bimorphs, move by relying on the transmission of flexible hinge structure based macro and micro moving platform guide rails, do not need to be assembled and lubricated, have no gaps and friction, and make large-stroke, high-speed and high-precision movement while ensuring movement decoupling and improving carrying capacity. The first and second displacement sensors are respectively used for measuring displacement signals of the servo platform in X and Y directions and feeding back to the controller to realize the full closed loop control of the servo platform.

Description

technical field [0001] The invention relates to a two-dimensional precision servo platform, in particular to a fully flexible and high-precision servo platform capable of realizing large-stroke movement in two-dimensional space based on the dual drive of a voice coil motor and a piezoelectric bichip. Background technique [0002] At present, in recent years, with the continuous advancement of science and technology and industrial technology, the fields of microelectronics manufacturing, ultra-precision machinery manufacturing, micro-robot operation, precision measuring optical instruments, and biomedical operations have developed rapidly. The importance of high-precision motion control systems Increasingly prominent, there is an urgent need for positioning and operating systems with large travel (cm level), high speed (m / s level) and high precision (submicron and nanometer level). Therefore, the position of the ultra-precise motion servo platform with large stroke is becomin...

AI Technical Summary

Problems solved by technology

However, in order to reduce the coupling motion between the micro-motion platform and the macro-motion platform, the micro-motion platform adopts a bridge-type amplification mechanism. Although the output displacement is amplified, the output force is reduced, thereby reducing the force of the micro-motion platform on the macro-motion platform. , but the stress of the flexible hinge also increases, which is easy to cause the fatigue damage of the hinge

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