551 results about "Micromirror array" patented technology

A hyperspectral imaging system having an optical path. The system including an illumination source adapted to output a light beam, the light beam illuminating a target, a dispersing element arranged in the optical path and adapted to separate the light beam into a plurality of wavelengths, a digital micromirror array adapted to tune the plurality of wavelengths into a spectrum, an optical device having a detector and adapted to collect the spectrum reflected from the target and arranged in the optical path and a processor operatively connected to and adapted to control at least one of: the illumination source; the dispersing element; the digital micromirror array; the optical device; and, the detector, the processor further adapted to output a hyperspectral image of the target. The dispersing element is arranged between the illumination source and the digital micromirror array, the digital micromirror array is arranged to transmit the spectrum to the target and the optical device is arranged in the optical path after the target.

A hyperspectral imaging system having an optical path. The system including an illumination source adapted to output a light beam, the light beam illuminating a target, a dispersing element arranged in the optical path and adapted to separate the light beam into a plurality of wavelengths, a digital micromirror array adapted to tune the plurality of wavelengths into a spectrum, an optical device having a detector and adapted to collect the spectrum reflected from the target and arranged in the optical path and a processor operatively connected to and adapted to control at least one of: the illumination source; the dispersing element; the digital micromirror array; the optical device; and, the detector, the processor further adapted to output a hyperspectral image of the target. The dispersing element is arranged between the illumination source and the digital micromirror array, the digital micromirror array is arranged to transmit the spectrum to the target and the optical device is arranged in the optical path after the target.

Provided is a method and system for developing a lithographic mask layout. The lithographic mask layout is adapted for configuring an array of micro-mirrors in a maskless lithography system. The method includes generating an ideal mask layout representative of image characteristics associated with a desired image. Next, an equivalent mask is produced in accordance with an average intensity of the ideal mask layout.

A WDM add / drop device for use in an optic communications system for adding and dropping optical wavelengths from a multiple-wavelength optical system. The device includes a set of lenses, a planar grating wavelength multiplexer and a micromirror array switchable for individual wavelengths of the multiple-wavelength signal between a transmit mode and a reflect mode. The grating angularly demultiplexes a multiple-wavelength optical signal in a first direction and the individual wavelengths are processed by the micromirror array and directed to the grating in a second direction. The micromirror array will either reflect select wavelengths to a first port or transmit select wavelengths to a second port. In a preferred embodiment, ports on a first multiport circulator input the multiple-wavelength optical signal to the WDM add / drop device and output the multiple-wavelength optical signal from the WDM add / drop device. A second multiport circulator provides to-be-added wavelengths to the WDM add / drop device and removes to-be-dropped wavelengths from the WDM add / drop device.

A maskless patterning apparatus allows for laser beam ablation of one or more layers of material while not etching an underlying different material layer. A micromirror array produces the desired complex pattern on the workpiece and a continuous feature and end point detection system provides location and material parameter changes to accurately control the pattern position and depth of etching. End point detection includes monitoring energy reflected from a specially prepared replica of the material to be ablated, whose thickness and consistency match the active workpiece area. The process terminates when the proper amount of material is removed.

A 1 dimensional or 2 dimensional array of micromirror devices comprises a device substrate with a 1st surface and a 2nd surface, control circuitry disposed on said 1st surface and a plurality of micromirrors disposed on said 2nd surface. Each micromirror comprises a reflective surface that is substantially optically flat, with neither recesses nor protrusions. Such a 1 dimensional or 2 dimensional array of micromirror devices may be used as a spatial light modulator (SLM). Methods of fabricating arrays of micromirror devices are also disclosed. Such methods generally involve providing a device substrate with a 1st surface and a 2nd surface, fabricating control circuitry on the 1st surface, and fabricating micromirrors on the 2nd surface, such that the reflective surfaces of the micromirrors are substantially optically flat, with neither recesses nor protrusions.

The present invention provides an imaging system generating a high resolution image using low resolution images taken by a low resolution image sensor. Also, the imaging system generates a wide angle of view image. Enhancement of resolution and enlargement of angle of view are accomplished by optical axis change, utilizing one or more micromirror array lenses without macroscopic mechanical movements of lenses. The imaging system also provides zoom and auto focusing functions using micromirror array lenses.

A illumination device sequentially projects a selective set of spatially encoded intensity light pulses toward a scene. The spatially encoded patterns are generated by an array of diffractive optical or holographic elements on a substrate that is rapidly translated in the path of the light beam. Alternatively, addressable micromirror arrays or similar technology are used to manipulate the beam wavefront. Reflected light is collected onto an individual photosensor or a very small set of high performance photodetectors. A data processor collects a complete set of signals associated with the encoded pattern set. The sampled signals are combined by a data processing unit in a prescribed manner to calculate range estimates and imaging features for elements in the scene. The invention may also be used to generate three dimensional reconstructions.

A modular three-dimensional (3D) optical switch that is scalable and that provides monitor and control of MEMS mirror arrays. A first switch module includes an array of input channels. Light beams received from the input channels are directed toward a first wavelength selective mirror. The light beams are reflected off of the first wavelength selective mirror and onto a first array of moveable micromirrors. The moveable micromirrors are adjusted so that the light beams reflect therefrom and enter a second switch module where they impinge upon a second array of moveable micromirrors. The light beams reflect off of the second array of moveable micromirrors and impinge upon a second wavelength selective mirror. The light beams reflect off of the second wavelength selective mirror and into an array of output channels. The alignment or misalignment of a data path through the switch is detected by directing two monitor beams through the data path, one in the forward direction and one in the reverse direction. The position of each of the monitor beams is detected after its reflection from the second moveable micromirror that it hits. The position data is used to determine the angles of the moveable micromirrors in the data path.

A beam focusing and scanning system using a micromirror array lens (optical system) includes a light source configured to emit light and a micromirror array lens, including at least one micromirror, optically coupled to the light source, configured to reflect the light onto a projection medium (projection plane). The optical system also includes at least one actuating component coupled to the at least one micromirror, configured to move the at least one micromirror to enable the at least one micromirror to focus the light on the projection medium. The advantages of the present invention include high speed variable focusing and scanning, large focal length variation, phase compensation, high reliability and optical efficiency, low power consumption and low cost.

A hyperspectral imaging system having an optical path. The system including an illumination source adapted to output a light beam, the light beam illuminating a target, a dispersing element arranged in the optical path and adapted to separate the light beam into a plurality of wavelengths, a digital micromirror array adapted to tune the plurality of wavelengths into a spectrum, an optical device having a detector and adapted to collect the spectrum reflected from the target and arranged in the optical path and a processor operatively connected to and adapted to control at least one of: the illumination source; the dispersing element; the digital micromirror array; the optical device; and, the detector, the processor further adapted to output a hyperspectral image of the target. The dispersing element is arranged between the illumination source and the digital micromirror array, the digital micromirror array is arranged to transmit the spectrum to the target and the optical device is arranged in the optical path after the target.

The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.

The optical tracking device of this invention comprises a lens unit, a control circuitry communicatively coupled to the lens unit, and an imaging unit optically coupled to the lens unit. The lens unit comprises at least one Micromirror Array Lens, wherein the Micromirror Array Lens comprises a plurality of micromirrors and is configured to have a plurality of optical surface profiles by controlling rotations or translations of the micromirrors. The optical tracking device of the invention further comprises an image processing unit, communicatively coupled to the imaging unit, configured to process the image information from the imaging unit and generates a control signal for the control circuit to control the lens unit. The optical tracking device of the present invention provides capability of tracking a target moving in a high speed, providing three-dimensional image information of the object, and compensating the aberration of the optical tracking device.

The invention provides a wafer-level package for a micromirror array. The wafer-level package includes a substrate including a wafer having a substrate surface with a plurality of actuatable micromirrors coupled to the substrate surface. An optical window is attached to the substrate surface to form at least one sealed cavity between an inner surface of the optical window and the substrate surface. A beam of light transmitted through the optical window is redirected by at least one actuatable micromirror within the sealed cavity.

An optical assembly, and in particular an optical assembly which uses a microlens array or a micromirror array to reduce speckle. It further concerns an optical component which comprises a micromirror array.

A three-dimensional display device includes a two-dimensional display displaying a first image, and a variable focusing lens receiving light from the two-dimensional display and forming a second image. The variable focusing lens reflects light from the two-dimensional display. The first image includes a predetermined number of first depthwise images that are displayed within a unit time, and the second image includes corresponding second depthwise images. Each depthwise image represents the portion of the first image having the same image depth, and the two-dimensional display displays one depthwise image at a time. The focal length of the variable focusing lens changes according to the depth of the depthwise image being displayed. A micromirror array lens is used as the variable focusing lens. The micromirror array lens has enough speed and focusing depth range for realistic three-dimensional display.

A micromirror array lens consists of many micromirrors with one degree of freedom rotation and one degree of freedom translation and actuating components. As a reflective variable focal length lens, the array of micromirrors makes all lights scattered from one point of an object have the same periodic phase and converge at one point of image plane. As operational methods for the lens, the actuating components control the positions of micromirrors electrostatically and / or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known semiconductor microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known semiconductor microelectronics technologies.

A vacuum packaged electromechanical micromirror array comprises a 1st packaging substrate, a 2nd packaging substrate, a device substrate with a 1st surface and a 2nd surface, control circuitry on said 1st surface, and micromirrors on said 2nd surface. The device substrate resides on the 1st packaging substrate with electrical connections between them. The electromechanical micromirror array is sealed in a vacuum package formed by the packaging substrates. The vacuum packaged micromirror array may be used as a spatial light modulator (SLM). Methods of fabricating the vacuum packaged array are disclosed. Such methods generally involve providing a device substrate with a 1st surface and a 2nd surface, fabricating control circuitry on the 1st surface, fabricating micromirrors on the 2nd surface, providing a 1st packaging substrate, mounting the device substrate on the 1st packaging substrate by flip-chip assembly, providing a 2nd packaging substrate, and sealing the packaging substrates by glass frit sealing.

The present invention provides a three-dimensional endoscope system comprising a three-dimensional imaging device and a three-dimensional display device using a variable focal length micromirror array lens. The micromirror array lens has enough focusing speed and focusing depth range for three-dimensional imaging and realistic three-dimensional display.

A maskless patterning apparatus allows for laser beam ablation of one or more layers of material while not etching an underlying different material layer. A micromirror array produces the desired complex pattern on the workpiece and a continuous feature and end point detection system provides location and material parameter changes to accurately control the pattern position and depth of etching. End point detection includes monitoring energy reflected from a specially prepared replica of the material to be ablated, whose thickness and consistency match the active workpiece area. The process terminates when the proper amount of material is removed.

A new three-dimensional imaging device has been needed to overcome the problems of the prior arts that the used variable focal length lenses that are still slow, have small focal length variation and low focusing efficiency, and requires a complex mechanism to control it. The invented three-dimensional imaging system uses the variable focal length micromirror array lens. Since the micromirror array lens has lots of advantages such as very fast response time, large focal length variation, high optical focusing efficiency, large size aperture, low cost, simple mechanism, and so on, the three-dimensional imaging device can get a real-time three-dimensional image with large depth range and high depth resolution.

In order to minimize light diffraction along the direction of switching and more particularly light diffraction into the acceptance cone of the collection optics, in the present invention, micromirrors are provided which are not rectangular. Also, in order to minimize the cost of the illumination optics and the size of the display unit of the present invention, the light source is placed orthogonal to the rows (or columns) of the array, and / or the light source is placed orthogonal to a side of the frame defining the active area of the array. The incident light beam, though orthogonal to the sides of the active area, is not however, orthogonal to any substantial portion of sides of the individual micromirrors in the array. Orthogonal sides cause incident light to diffract along the direction of micromirror switching, and result in light ‘leakage’ into the ‘on’ state even if the micromirror is in the ‘off’ state. This light diffraction decreases the contrast ratio of the micromirror. The micromirrors of the present invention result in an improved contrast ratio, and the arrangement of the light source to micromirror array in the present invention results in a more compact system. Another feature of the invention is the ability of the micromirrors to pivot in opposite direction to on and off positions (the on position directing light to collection optics), where the movement to the on position is greater than movement to the off position. A further feature of the invention is a package for the micromirror array, the package having a window that is not parallel to the substrate upon which the micromirrors are formed. One example of the invention includes all the above features.

A three-dimensional (3-D) display system using a variable focal length lens includes at least one two-dimensional (2-D) display device, configured to display at least one two-dimensional image. The display system also includes an array of micromirror array lenses optically coupled to the display device, each micromirror array lens of the array of micromirror array lenses placed at a different location with respect to the display device, configured to focus the at least one two-dimensional image from each different location to provide a three-dimensional (3-D) image. The advantages of the present invention include increased viewing angles and wide depth range of three-dimensional images.

A variable focal length lens comprising micromirrors with pure translation is invented. The lens consists of many micromirrors and actuating components. The array of micromirrors with pure translation makes all lights scattered from one point of an object have the same periodic phase and converge at one point of image plane by using Fresnel diffraction theory. The actuating components control the positions of micromirrors electrostatically and / or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known semiconductor microelectronics technologies can remove the loss in effective reflective area due to electrode pads and wires. The lens can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known semiconductor microelectronics technologies. The micromirror array can also form arbitrary shape and / or size of a lens.

An array of micromirror array lenses is invented. The micromirror array lens consists of many micromirrors and actuating components. Each micromirror array lens is variable focal length lens with high speed focal length change. The lens can have arbitrary type and / or size as desired and desired arbitrary optical axis and can correct aberration by controlling each micromirror independently. Independent control of each micromirror is possible by known microelectronics technologies. The actuating components control the positions of micromirrors electrostatically and / or electromagnetically. The optical efficiency of the micromirror array lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The known microelectronics technologies remove the loss in effective reflective area due to electrode pads and wires.

A new three-dimensional imaging device has been needed to overcome the problems of the prior arts that the used variable focal length lenses that are still slow, have small focal length variation and low focusing efficiency, and requires a complex mechanism to control it. The invented three-dimensional imaging system uses the variable focal length micromirror array lens. Since the micromirror array lens has lots of advantages such as very fast response time, large focal length variation, high optical focusing efficiency, large size aperture, low cost, simple mechanism, and so on, the three-dimensional imaging device can get a real-time three-dimensional image with large depth range and high depth resolution.

Methods, arrays, and systems for the optical analysis of multiple chemical, biological, or biochemical reactions are provided. The invention includes methods for producing arrays of micromirrors on transparent substrates, each micromirror comprising a nanostructure or optical confinement on its top. The arrays are produced by a process in which lateral dimensions of both the nanostructures and micromirrors are defined in a single step, allowing for control of the relative placement of the features on the substrate, minimizing the process-related defects, allowing for improved optical performance and consistency. In some aspects, the invention provides methods of selectively etching large features on a substrate while not concurrently etching small features. In some aspects, the invention provides methods of etching large features on a substrate using hard mask materials.

A Micromirror Array Lens comprises a plurality of micromirrors arranged on a flat or a curved surface to reflect incident light. Each micromirror in the Micromirror Array Lens is configured to have at least one motion. The Micromirror Array Lens forms at least one optical surface profile reproducing free surfaces by using the motions of the micromirrors. The free surface can be any two or three-dimensional continuous or discrete reflective surface. The Micromirror Array Lens having the corresponding optical surface profile provides optical focusing properties substantially identical to those of the free surface. The Micromirror Array Lens can forms various optical elements such as a variable focal length lens, a fixed focal length lens, an array of optical switches, a beam steerer, a zone plate, a shutter, an iris, a multiple focal length lens, other multi-function optical elements, and so on.