All-ceramic ultrahigh-temperature pressure sensor and packaging method thereof

Abstract

The invention discloses an all-ceramic ultrahigh-temperature pressure sensor. The all-ceramic ultrahigh-temperature pressure sensor comprises a high-temperature-resistant ceramic pressure sensitive element, a high-temperature-resistant ceramic prototype packaging case and a high-temperature-resistant ceramic reading antenna, wherein the high-temperature-resistant ceramic pressure sensitive elementconsists of a high-temperature-resistant voltage dependent capacitor and a rectangular spiral inductance coil; the high-temperature-resistant ceramic pressure sensitive element is arranged on one side in the high-temperature-resistant ceramic prototype packaging case; high-temperature-resistant heat-proof and shock-proof cotton is arranged between the high-temperature-resistant ceramic pressure sensitive element and the high-temperature-resistant ceramic prototype packaging case; the high-temperature-resistant ceramic reading antenna is arranged on the other side in the high-temperature-resistant ceramic prototype packaging case; and the high-temperature-resistant ceramic reading antenna is coupled with an inductor in a pressure-sensitive LC loop to realize the transmission of pressure parameters. Through adoption of the all-ceramic ultrahigh-temperature pressure sensor, the problems of low working temperature and poor air tightness of a sensor prototype in the pressure parameter testing process are solved, and in-situ measurement of the pressure parameters in an ultrahigh-temperature environment of which the temperature is 1000 DEG C or more is realized.

Description

technical field [0001] The invention relates to the field of high-temperature-resistant ceramic pressure sensors, in particular to an all-ceramic ultra-high-temperature pressure sensor and a packaging method thereof. Background technique [0002] With the continuous development of large-scale equipment such as advanced aviation engines and thermal power generation gas turbines, the demand for in-situ dynamic testing of pressure parameters in harsh environments such as ultra-high temperature and strong impact is increasing, which has become a key technology "bottleneck" restricting the performance improvement of engines and gas turbines. ". Traditional high-temperature pressure sensors are mainly based on materials such as silicon and silicon carbide, and adopt an active signal transmission method connected by wires. The material performance and signal transmission method limit the working temperature range of the sensor, and it is impossible to realize the pressure parameter...

AI Technical Summary

Problems solved by technology

[0003] The invention provides an all-ceramic ultra-high temperature pressure sensor and its packaging method, which solves the problems existing in traditional pressure sensors and realizes stable measurement of pressure parameters in ultra-high temperature environments

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