The invention belongs to a multi-leg linear piezoelectric driver and a
workbench in the field of micro drivers.
Diamond-shaped driving legs extending from a substrate of a piezoelectric driver form a comb-shaped structure, and square piezoelectric
ceramic plates are bonded on the side surfaces of the driving legs, wherein the piezoelectric
ceramic plates are polarized along the thickness direction of the piezoelectric
ceramic plates, and the end faces of all the driving legs are on the same plane. Electrical signals are introduced to the
electrode surfaces of the piezoelectric ceramic plates,the first-order stretching vibrations and the first-order or second-order bending vibrations of the driving legs can be simultaneously excited, and the
coupling action of the two vibrations ensures that
mass points on the bottom surfaces of the driving legs do elliptic motions and the elliptic vibrations of a plurality of leg bottoms of the driver are accumulated and superposed into a macroscopiclinear motion. The driver is arranged on a base of the
workbench, and a
grating bar and a
grating head which are arranged on the base are used for providing a precise position of the
workbench to realize the
closed loop control of the workbench. Because the driver adopts a multi-leg
driving mode, the driving force is increased in multiples; the contact areas of the piezoelectric ceramic plates with air are large so as to be beneficial to radiating heat; the
assembly is convenient, and the cost is lower.