The invention relates to the field of semiconductor devices, and provides a HEMT device with a sandwich grid medium structure and a preparation method thereof. The HEMT device includes a substrate, a buffer layer arranged on the substrate, a GaN layer arranged on the buffer layer, a barrier layer, a source electrode, and a drain electrode that are arranged on the GaN layer, a passivation layer arranged on the source electrode, the drain electrode, and the barrier layer except a groove, a first dielectric layer coating the groove surface and the passivation layer surface, a second dielectric layer arranged on the first dielectric layer, a third dielectric layer arranged on the second dielectric layer and the first dielectric layer except the second dielectric layer, a gate electrode in contact with the third dielectric layer, a source electrode pad in contact with the source electrode, and a drain electrode pad in contact with the drain electrode, wherein one side, far away from the GaN layer, of the barrier layer is provided with the groove, and the second dielectric layer contains fluorinion. The high-threshold voltage normally off operation of the HEMT device can be realized, and the breakdown voltage of the device can be effectively improved.