Gallium oxide-based sunlight blind area detector based on zero gate bias

Abstract

The invention discloses a gallium oxide-based sunlight blind area detector based on zero gate bias. The gallium oxide-based sunlight blind area detector comprises: a substrate; a gallium oxide nano film located in the middle section of the upper surface of the substrate and subjected to oxygen annealing treatment in the preparation process of the sunlight blind area detector; a source electrode and a drain electrode which are located on the two sides of the gallium oxide nanometer film on the upper surface of the substrate respectively and are in lap joint with the gallium oxide nanometer film; a passivation layer which covers the upper surface of the gallium oxide nano film, wherein a gate groove which extends into the gallium oxide nano film is etched downwards from the middle part of the upper surface of the passivation layer; a gate dielectric which covers the surface of the gate groove and the upper surface of the passivation layer; and a gate electrode which is covered in the gate groove and above the gate dielectrics on the two sides, wherein the thickness of gate metal forming the gate electrode is 14 + / -4 nm to make light waves in a sunlight blind area penetrate through the gate electrode, and the design value of bias voltage of the gate electrode is 0 V. The sunlight blind area detector provided by the invention is low in power consumption.

Description

technical field [0001] The invention belongs to the technical field of solar blind area detection, and in particular relates to a gallium oxide-based solar blind area detector based on zero grid bias. Background technique [0002] When sunlight passes through the atmosphere, the light with a wavelength of less than 280nm is absorbed by the atmosphere, so the light of this part of the wavelength band rarely exists on the surface of the earth, so we call the light of this part of the wavelength band the solar blind zone. Based on the above characteristics, signal detection in the solar blind area has the advantages of less background noise interference and low false alarm, which makes the solar blind area detector widely used in missile tracking, space communication and other national defense fields, and is also used in flame detection , medical and other civilian fields have a wide range of applications. [0003] In order to obtain higher detection performance, current solar...

AI Technical Summary

Problems solved by technology

[0003] In order to obtain higher detection performance, the current solar blind spot detectors often need to load a higher external excitation voltage, which makes the power consumption of the existing solar blind spot detectors generally higher

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