The invention discloses an enhanced
silicon carbide MOSFET device. The enhanced
silicon carbide MOSFET device sequentially comprises back
metal, an N+ type heavily doped
SiC substrate, an N- epitaxiallayer, an insulating
dielectric layer and front
metal from bottom to top. According to the invention, a
Schottky diode is integrated into the
MOSFET device, and the area of a
Schottky barrier metal layer is flexibly increased or decreased to adjust and adapt to the current and specification of the MOSFET and the
Schottky diode, so that the effects of increasing the switching speed of the MOSFET,reducing the switching loss and the like are achieved, the performance and the reliability of the device can be greatly improved, and the application cost of the device is reduced. The enhanced
silicon carbide MOSFET device adopts a trench SiC MOSFET design, and a
conductive channel is changed from the traditional horizontal direction to the vertical direction, so that a
JFET effect between primitive cells of the traditional MOSFET is eliminated, and the current capability of the device is improved. The gate bottom P region at the bottom of the trench can protect and weaken an
electric field at the bottom of the trench, thereby playing a certain role in electrostatic shielding of
gate oxide at the bottom of the trench, and improving the reliability of the device. Meanwhile, certain help isprovided for
voltage resistance of the device.