The invention relates to a special baking oven and a special material rack thereof for
silicon material. The baking oven comprises a
thermal insulation shell, an inner container, a high temperature
air cavity, a hot air duct, a heater, a circulating fan, a dehumidifier, a dehumidification
pipe, a
humidity sensor, a temperature sensor, a frame body, idler wheels and a
silicon material box, wherein the high temperature
air cavity is arranged on top of the inner container, the hot air duct is arranged around the inner container, the heater is arranged in the baking oven, the circulating fan is arranged between the high temperature
air cavity and the hot air duct, the dehumidifier is communicated with the inner chamber of the inner container, and the
humidity sensor and the temperature sensor are arranged to realize
automation control of the baking oven. The movable baking shelf thereof can facilitate loading / unloading and in / out of
silicon material, save baking preparation time, and has the advantages of high baking efficiency and low
energy consumption. The whole silicon material box can be directly moved in the baking oven for baking, thereby greatly shortening technology preparation time and reducing labor strength of operators.