The invention discloses a panel type collection device and method for measuring a
secondary electron emission coefficient. A measuring device mainly comprises a rotary platform, a sample table, a heating device, a Faraday cylinder, a current
amplifier and a collection
electrode, wherein the inner wall of the Faraday cylinder is plated with a layer of carbon, the Faraday cylinder is connected with a bias
voltage device and the current
amplifier and is used for measuring a primary incidence current; the collection
electrode is in a panel structure, the upper surface of the collection
electrode is coated with a layer of fluorescent
powder so as to conveniently adjust and focus
electron beam faculae, and the lower surface of the collection electrode is plated with a layer of carbon so as to inhibit
electron multiplication phenomenon in a collection process; the collection electrode is connected with a bias
voltage device and the current
amplifier and is used for measuring secondary
electron stream emitted by the surface of a material. By utilizing a rotary device, multiple samples can be simultaneously measured, so that the measuring time is saved; by utilizing the heating device and a
temperature control device, the temperature of a sample can be accurately controlled in a range of 30-300 DEG C, and the heating device and a
temperature control device are used for researching the influence of the temperature on the
secondary electron emission coefficient; by providing the novel electron collection device for measuring the
secondary electron emission coefficient, the measurement of the secondary electron emission coefficients under different temperatures is realized.