Solid material secondary electron emission coefficient testing device with intelligent measurement and control technology

Abstract

The solid material secondary electron emission coefficient testing device with intelligent measurement and control technology of the present invention includes a mechanical system, an electrical control system and an analysis and detection system; the mechanical system includes a vacuum chamber, a vacuum pump, an electron gun, an electron collection device and a heating device, and Provide a vacuum environment, generate and collect secondary electrons; the electrical control system includes a power supply, a programmable controller and a temperature control circuit, and the programmable controller controls the power supply voltage through a digital and analog conversion module; the analysis and detection system includes an industrial computer , digital-to-analog conversion module, two-way oscilloscope card and touch control screen, and KingView is installed on the industrial computer to store, analyze and process the detected electronic signals, and display the secondary electron emission coefficient of the measured solid material The relation curve between electron energy and electron gun exiting electron energy. The invention can better meet the needs of industrial antistatic design, engineering material selection and static electricity prediction for measuring the secondary electron emission coefficient of solid materials.

Description

technical field [0001] The invention relates to the technical field of testing the secondary electron emission characteristics of solid materials, in particular to a testing device for the secondary electron emission coefficient of solid materials with intelligent measurement and control technology. Background technique [0002] The so-called secondary electron emission (Secondary Electron Emission) refers to the phenomenon that electrons (or ions) with a certain energy or speed bombard the surface of an object will cause electrons to be emitted from the surface of the object. The secondary electrons emitted from the surface of the sample can be more or less than the primary electrons in number, and also present a certain distribution in energy, including elastic scattering electrons, inelastic scattering electrons, true secondary electrons, and Auger electrons of primary electrons. etc. Sometimes there are other complex phenomena accompanied by the secondary electron emissi...

AI Technical Summary

Problems solved by technology

However, the early microcomputer was simply used as a display device. It realized a certain degree of graphics, but it was only used for the storage and processing of test results, and there was no real man-machine dialogue, that is, the display could not be controlled by clicking on the mouse or touch screen. Test the running status of the equipment, and there are many shortcomings: the display interface is symbolic and not intuitive; the related supporting software has simple functions, no fault alarm, and the problematic parts cannot be displayed intuitively on the computer; there is no complete and intuitive interface, the process The display is not obvious, and the parameter display is not concentrated

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