The invention relates to a BiFeO3-base sandwich structure film used for a ferroelectric memory and a process for preparation, belonging to the technical field of microelectronic
new materials, wherein the upper surface component and the lower surface component of the BiFeO3-base sandwich structure film both are BiFe1-xHxO3, H is doped high valence
ion with quadravalence or over quadravalence, the component of the intermediate layer is BiFe1-xLxO3, L is doped high valence
ion with trivalence or below trivalence. The process for preparation comprises adopting the
chemical solution method combined with the annealing technology in layer by layer, and preparing through depositing precursor solution in the surface
layers of different materials in the spin-
coating method. The invention greatly reduces the
drain current of the film through adopting a special sandwich structure, effectively reduces coercive field, significantly increases the
charge retention, obtains the ferroelectric film with low
drain current, large
residual polarization, low coercive field and excellent
charge retention under the annealing temperature of 500 DEG C-600 DEG C, and has great practicable prospects in further ferroelectric memories.