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Composite solid solution film based on sodium bismuth titanate and bismuth ferric and preparation method thereof

A bismuth sodium titanate-based and bismuth ferrite-based technology is applied to chemical instruments and methods, iron compounds, titanium compounds, etc. It can solve the problems of large leakage current, poor ferroelectric performance, and easy to produce impurities, and achieve low leakage , reduced leakage current, and stable dielectric properties

Inactive Publication Date: 2011-11-16
UNIV OF JINAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention aims at the disadvantages of the existing bismuth sodium titanate thin film crystal phase that is easy to produce impurity phases, large leakage current, and poor ferroelectric performance, and provides a composite solid solution thin film based on bismuth sodium titanate base and bismuth ferrite base. Binary thin films have the advantages of high remanent polarization, low leakage, and stable dielectric properties.

Method used

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  • Composite solid solution film based on sodium bismuth titanate and bismuth ferric and preparation method thereof
  • Composite solid solution film based on sodium bismuth titanate and bismuth ferric and preparation method thereof
  • Composite solid solution film based on sodium bismuth titanate and bismuth ferric and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0040] (1) According to 0.95Na 0.5 (Bi 0.95 Ce 0.05 ) 0.5 TiO 3 -0.05BiFe 0.97 Mn 0.03 O 3 Stoichiometric ratio, accurately weigh 0.2951g of CH 3 COONa; 1.8788g Bi(NO 3 ) 3 ·5H 2 O (excess 2%); 0.0781g Ce(NO 3 ) 3 ·6H 2 O, dissolved in 41.55ml ethylene glycol solution, magnetically stirred at a temperature of 40 ℃ until completely dissolved. Then add 0.1484g of Fe(NO 3 ) 3 ·9H 2 O and 0.0031g of C 6 H 9 MnO 6 ·2H 2 O, after magnetically stirring at room temperature until completely dissolved, add 4.15ml of glacial acetic acid, continue to stir and wait for the solution to cool to room temperature. Finally, add acetylacetone and tetraisopropyl titanate in a volume ratio of 1:1 to the above solution, that is, add 2.15ml acetylacetone first, and then add 2.15ml tetraisopropyl titanate dropwise. And continue to magnetically stir for 8 hours at room temperature. Finally, a syringe filter with a pore size of 0.2 μm is used to filter out dust and impurity particles, and a uniform and ...

Embodiment 2

[0044] (1) According to 0.9Na 0.5 (Bi 0.95 Ce 0.05 ) 0.5 TiO 3 -0.1BiFe 0.97 Mn 0.03 O 3 Stoichiometric ratio, accurately weigh 0.7456g of CH 3 COONa; 5.2728g of Bi(NO 3 ) 3 ·5H 2 O(2% excess); 0.1976g Ce(NO 3 ) 3 ·6H 2 O, dissolved in 31.30ml ethylene glycol solution, magnetically stirred at a temperature of 80 ℃ until completely dissolved. Then add 0.8648g of Fe (NO 3 ) 3 ·9H 2 O and 0.0152g of C 6 H 9 MnO 6 ·2H 2 O, after magnetically stirring at room temperature until it is completely dissolved, add 7.82ml of glacial acetic acid, continue to stir and wait for the solution to cool to room temperature. Add acetylacetone and tetraisopropyl titanate in a volume ratio of 1:1 to the above solution, that is, add 5.44ml acetylacetone first, and then add 5.44ml tetraisopropyl titanate dropwise. And continue magnetic stirring for 12 hours at room temperature. Finally, a syringe filter with a pore size of 0.2μm was used to filter out dust and impurity particles, and a uniform and tran...

Embodiment 3

[0048] (1) According to 0.7Na 0.5 (Bi 0.95 Ce 0.05 ) 0.5 TiO 3 -0.3BiFe 0.97 Mn 0.03 O 3 Stoichiometric ratio, accurately weigh 0.4349g of CH 3 COONa; 4.7416g Bi(NO 3 ) 3 ·5H 2 O (excess 2%); 0.1151g Ce(NO 3 ) 3 ·6H 2 O, dissolved in 29ml ethylene glycol solution, magnetically stirred at a temperature of 60 ℃ until completely dissolved. Then add 1.7903g Fe(NO 3 ) 3 ·9H 2 O and 0.0366g of C 6 H 9 MnO 6 ·2H 2 O, after magnetically stirring at room temperature until completely dissolved, 14.66ml of glacial acetic acid is added, stirring is continued and the solution is cooled to room temperature. Finally, add acetylacetone and tetraisopropyl titanate in a volume ratio of 1:1 to the above solution, that is, add 3.17ml acetylacetone first, and then add 3.17ml tetraisopropyl titanate dropwise. And continue magnetic stirring for 10 hours at room temperature. Finally, a syringe filter with a pore size of 0.2 μm was used to filter out dust and impurity particles, and a uniform and trans...

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Abstract

The invention discloses a composite solid solution film based on sodium bismuth titanate and bismuth ferric and a preparation method thereof. The film is represented by the general formula: (1-x)Na0.5(Bi0.95Ce0.05)0.5TiO(3-x)BiFe0.97Mn0.03O3, the sodium bismuth titanate is Na0.5(Bi0.95Ce0.05)0.5TiO3, and the bismuth ferric is BiFe0.97Mn0.03O3, wherein x is the molar content of BiFe0.97Mn0.03O3, which is greater than 0 and less than 1. According to the invention, the composite solid solution film is prepared by the spinning method-layer by layer annealing process, and does not have an impurityphase except that a pyrochlore impurity phase exists when x is less than or equal to 0.05; and moreover, the film has the advantages of low crystallizing temperature, low electric leakage, great residual polarization, stable dielectric property and the like, and can be well applied to novel high-density integrated piezoelectric ferroelectric devices in the future.

Description

technical field [0001] The invention relates to a binary ferroelectric thin film and a preparation method thereof, in particular to a binary bismuth sodium titanate-based and bismuth ferrite-based composite lead-free thin film and a preparation method thereof, belonging to perovskite structure-environment coordinated ferroelectric The field of electro-thin film technology. Background technique [0002] With the development of microelectronics technology and the trend of high integration, it is necessary to develop thin film materials with properties comparable to those of bulk materials. Ferroelectric thin films are widely used in many fields such as memory, piezoelectric sensors and actuators due to their various properties such as ferroelectricity and piezoelectric effect. Most of the widely used materials with superior performance are lead-based materials, such as Pb(Zr,Ti)O 3 , Pb(Mg,Nb)O 3 etc., wherein the content of PbO is as high as 60~70%. Lead is a non-degradab...

Claims

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Application Information

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IPC IPC(8): H01L41/18H01L41/22C01G23/00C01G49/00H01L41/39
Inventor 杨长红芦泽宇杨锋胡广达
Owner UNIV OF JINAN
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