The invention discloses a
quantum well
infrared detector of multiple
light scattering coupling. The
detector comprises a substrate layer, a lower
electrode layer which grows successively layer by layer, a
multiple quantum well layer with 50 periods and an upper
electrode layer. An array layer made of metallic balls which are immersed in organic
adhesive or balls which are coated with
metal is provided on the upper
electrode layer. The array layer is provided with a
metal contacting layer, and the
metal contacting layer is provided with a readout circuit by means of flip-
chip bonding
interconnection to realize the readout detection signals. The invention has the advantages that: firstly, the metal ball array replaces the traditional
grating. The electric rector which can be absorbed with transition by a
quantum well belt is produced by multiple light
coupling among the metallic balls. The electric rector parallels to the component of the
quantum well layer, so the
coupling between the normal incidence lights and the
quantum well is realized. Secondly, the metallic ball array replaces the traditional
indium column of flip-
chip bonding
interconnection to form an anisotropic conducting layer, so the conductive function is realized. Because of the advantages, on one hand, the
coupling efficiency of normal incidence lights is improved; on the other hand, the deposition of
indium bump is saved, and the flip-
chip bonding process is simplified.