The invention discloses an Mg based metallic
glass film and its preparation method. The chemical general formula of the film is MgaCubYc, wherein a, b, and c are atomic percentage, a is greater than or equal to 46.30 and smaller than or equal to 58.01, b is greater than or equal to 24.61 and smaller than or equal to 28.96, c is greater than or equal to 13.18 and smaller than or equal to 24.74, and the sum of a, b and c is 100. The invention also discloses a preparation method of the Mg based metallic
glass film, which is obtained by magnetron
sputtering. And the method includes: preparing Mg, Cu and Y into an
alloy target according to certain proportion; using a
monocrystalline silicon wafer and an ordinary
glass sheet as the film substrate; putting the
alloy target and the film substrate into a
sputtering chamber, and performing magnetron
sputtering, thus obtaining the Mg based metallic
glass film. The method of preparing the metallic glass film by magnetron sputtering only needs ordinary
water cooling to obtain an ultrahigh
cooling rate, the amorphous is easy to form, and by means of single target sputtering, the film components and thickness are adjustable, and the preparation cost is low. With large differences in amorphous and crystalline resistivity as well as
reflectivity, the Mg based metallic glass film has great application prospects in phase-change optical disks and
phase change memory.