The invention discloses a control technological method for the planeness of the surface of an LTCC (low temperature co-fired
ceramic) substrate. Specific steps are as follows: preparing raw
ceramic sheets for the preparation of an LTCC substrate, and
punching circuit through holes with a
punch press; tearing off a Mylar film; filling LTCC technological hole
metal slurry on the raw
ceramic sheets, using a roller to roll the holes so as to evenly press flat the protrusions of the holes filled with the
metal slurry, and printing LTCC technological
metal conductor
slurry on the raw ceramic sheets so as to form a circuit figure; aligning and stacking all the raw ceramic sheets layer by layer, and laminating so as to obtain a large bulk of LTCC raw ceramic blank; and after
cutting the large bulk of LTCC raw ceramic blank into circuits in the shape of small blocks,
sintering so as to obtain the compact and flat LTCC circuit substrate. Therefore, the technological process of planeness control for the surface of the LTCC substrate is achieved. The method, which is low in cost, simple and effective, is suitable for the development and production of substrates with a complex cavity structure of an embedded
chip requiring a lot for surface planeness, and substrates automatically micropackaged in a batch manner.