The invention discloses a micro-well based gas
sensor array and its making method. According to the invention, (1) the gas
sensor array adopts an MEMS (Micro-Electro-Mechanical Systems) technology, an interdigital
electrode is prepared on an SOI
wafer surface, an SU-8
photoresist is used to make a micro-well
isolation layer for preventing cross
contamination of sensitive materials among different interdigital electrodes during sensitive membrane preparation, and each
sensor array at least includes 4 interdigital
electrode units; (2) an independent heating unit is located under each interdigital
electrode, thus greatly improving the sensitivity and response
recovery time of the sensor; (3) an organic membrane, an organic / inorganic
composite membrane or an organic-inorganic
multilayer membrane is taken as the sensitive membrane, and by determining the resistance change during gas adsorption of the sensitive membrane, qualitative and quantitative detection of a gas can be realized; and (4) using a droplet
coating, gas jet or electronic injection technique to prepare the sensitive membrane. The gas sensor array has broad application prospects in the fields of atmospheric environment monitoring,
aerospace sealed cabin air quality testing and food security, etc.