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64results about How to "Stable etch rate" patented technology

High generation tablet personal computer ITO etching solution

ActiveCN105295923AImprove job stabilitySolve acid mist volatilizationSurface treatment compositionsAcetic acidEtching
The present invention discloses a high generation tablet personal computer ITO etching solution, which comprises, by weight, 4-16% of sulfuric acid, 7-22% of nitric acid, 0.1-10% of acetic acid, 0.01-5% of an additive, and the balance of water, wherein the additive contains an anionic gemini surfactant, and the anionic gemini surfactant is a phosphate type gemini surfactant and / or phosphate salt type gemini surfactant. According to the present invention, according to the ITO etching system using the sulfuric acid / nitric acid / acetic acid three-acid system, the gemini surfactant is added, such that the problems of acid mist volatilization and nitric acid decomposition due to local etching surface temperature increase during the ITO etching process are solved, the work stability of the etching solution is improved, and the etched line has characteristics of clear edge, no lateral etching, and no pinhole and gap generation.
Owner:JIANGYIN JIANGHUA MICROELECTRONICS MATERIAL

Acidic etching solution, as well as preparation method and application thereof

ActiveCN102586780ASuppress surface wavinessSimple etch speedPhosphoric acidEtching
The invention relates to an acidic etching solution, as well as a preparation method and an application thereof. The acidic etching solution comprises 1-20% by weight of hydrofluoric acid, 20-60% by weight of nitric acid, 1-20% by weight of fluosilicic acid and the balance of water. The preparation method comprises the following steps of: with fluorine hydride gas or hydrofluoric acid, 70-98% by weight of nitric acid water solution and silicon or silicon dioxide as raw materials, mixing according to the mixture ratio to get the acidic etching solution. The acidic etching solution is used for etching silicon wafers, GaAs wafers, GaP wafers or InP wafer. The acidic etching solution disclosed by the invention is different from the traditional etching solution, acetic acid, phosphoric acid and the like, which can cause greater burden on an environment, are not required, peculiar smell can be avoided, and wastes can also be reduced.
Owner:SHANGHAI ZHENGFAN TECH +2

TFT (thin film transistor) glass substrate reducer, preparation method thereof and TFT glass substrate reducing process

InactiveCN103922602AMeet thinning quality requirementsStable etch rateEtching rateChemistry
The invention provides a TFT (thin film transistor) glass substrate reducer. The TFT glass substrate reducer comprises 10-12% of hydrofluoric acid, 4-6% of ammonium bifluoride, 5-8% of nitric acid, 5-8% of sulfuric acid and the balance of water. The TFT glass substrate reducer is characterized by mixing all the components of the TFT glass substrate reducer together, thus obtaining a finished product. The TFT glass substrate reducer can stabilize the etching rate, has better borosilicate glass material etching effects, and can effectively control amplification of pits and scratch defects of the glass in a chemical etching process, soften the glass powder to solve the problem of edge raising in the etching process and meet the TFT glass substrate reducing quality requirement safely, stably and effectively, thus meeting the requirements of customers.
Owner:HUIZHOU CITY QINGYANG IND

Copper seed etching solution used for wafer level package

InactiveCN110499509AFacilitated reaction mechanismReduce the impact of side erosionReaction temperatureSurface-active agents
The invention discloses a copper seed etching solution used for wafer level package. The etching solution comprises the following components, 40-60g / L of hydrogen peroxide, 5-35g / L of inorganic acid,5-35g / L of organic acid, 1-30g / L of copper ions, 1-2g / L of chloride ions and 1-2g / L of surface active agents according to the concentration proportion. The components are mixed in proportion, the mixing reaction temperature is between 30 DEG C and 50 DEG C, the reaction time is 1s-400s, and the copper seed etching solution is formed after mixing. Chelating agents formed by mixing the hydrogen peroxide and the inorganic acid and the copper ions can be subjected to chelation to form water-soluble complexes, so that equilibrium is reached; and the chloride ions play a role in maintaining the PH value of a system in the solution, maintains charge balance of the system in the etching process and prolongs the service life of the etching solution. The copper seed etching solution has the characteristics of being stable in performance, suitable for superfine circuits, small in lateral erosion and hardly corrosive to copper and aluminum.
Owner:成功环保科技(南通)有限公司

Etching agent, etching method and etching agent preparation liquid

The objective of the present invention is to provide: an etching agent for a titanium-based metal on a semiconductor substrate, which is suppressed in decomposition of hydrogen peroxide, has a long service life, and has less need for control of the hydrogen peroxide concentration in the etching agent even in cases where the etching agent is used for a semiconductor substrate that has a titanium-based metal and copper metal or a copper alloy; an etching method; and an etching agent preparation liquid which is mixed with hydrogen peroxide for use. The present invention relates to: an etching agent for a titanium-based metal on a semiconductor substrate which has the titanium-based metal and copper metal or a copper alloy arranged on top of the titanium-based metal, said etching agent being an aqueous solution that contains at least (A) hydrogen peroxide, (B) a phosphonic acid-based chelating agent having a nitrogen atom in the structure, (C) an alkali metal hydroxide and (D) an organic acid having at least one hydroxyl group and at least three carboxyl groups; an etching method which is characterized by using this etching agent; and an etching agent preparation liquid which is mixed with hydrogen peroxide for use.
Owner:FUJIFILM CORP

Etching solution for silicon wafer

The invention discloses an etching solution for a silicon wafer. The etching solution is mainly prepared from electronic-grade nitric acid, electronic-grade hydrofluoric acid, electronic-grade sulfuric acid, electronic-grade phosphoric acid, electronic-grade acetic acid, a surfactant and ultrapure water, wherein the nitric acid serves as an oxidizing agent and can oxidize silicon into silicon oxide, the hydrofluoric acid serves as a dissolving agent and can dissolve and remove the silicon oxide so as to realize etching of the silicon wafer, the sulfuric acid can improve the viscosity of the solution, stabilize the reaction rate, not change the etching morphology and improve the etching uniformity, the phosphoric acid can also improve the viscosity of the solution, improve the mass transferresistance, decrease the etching rate and not change the etching morphology, the acetic acid serves as a diluent and can reduce the ionization degree of the nitric acid, inhibit the oxidation capacity of the nitric acid, decrease the reaction rate and influence the surface morphology after etching, and the surfactant can reduce the surface tension of the solution and improve the surface morphology of the etched silicon wafer. The etching solution has the advantages of being stable and controllable in etching rate and uniform and flat in etching surface.
Owner:湖北兴福电子材料股份有限公司

Metal ion concentration regulation device and method, and etching equipment

The invention discloses a metal ion concentration regulation device and method, and etching equipment. The metal ion concentration regulation device comprises a liquid supply pipeline, a metal ion regulation system, a metal ion detection system and a control circuit. The metal ion regulation system and the metal ion detection system are sequentially in the liquid supply pipeline in the direction of etching liquid flowing through the liquid supply pipeline and both communicate with the liquid supply pipeline. The control circuit is electrically connected with the metal ion regulation system and the metal ion detection system and is used for controlling the metal ion regulation system to regulate the concentration of metal ions in the etching liquid according to the current metal ion concentration, transmitted by the metal ion detection system, of the etching liquid and preset metal ion concentration upper and lower threshold values. Through cooperative operation of all the components, the metal ion concentration regulation device conducts regulation on the concentration of metal ions in the etching process, so that the etching rate tends to be stable, the etching effect is improved, and the probability of short circuiting, disconnection and the like of metal conducting wires is reduced.
Owner:BOE TECH GRP CO LTD

Pipeline system and method for improving stability of etching speed selectivity ratio

The invention relates to the field of microelectronics, in particular to a pipeline system and method for improving the stability of an etching speed selectivity ratio. According to the pipeline system and method for improving the stability of the etching speed selectivity ratio, disclosed by the invention, an auxiliary trench is additionally arranged and is connected with a plurality of process trenches to form a circulation, thereby etching solutions in various process trenches tend to be identical and the etching speeds tend to be identical; in addition, the volume of the etching solution participating in the circulation is increased and the content change of SiO2 is relatively reduced, thereby the etching speed selectivity ratio is relatively stable; acid change setting is omitted anda small amount of etching solution is drained at set intervals or after a certain amount of silicon chips are produced; and the etching solution is supplemented from the auxiliary trench, and therebythe problem of greater damage to an oxidation film caused when the content of SiO2 in the novel etching solution is relatively and excessively high and silicon nitride is etched is solved.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP

Etching apparatus

An etching apparatus, for etching copper or silver, which includes a hydrogen peroxide tank, an ammonium hydroxide tank, a water tank, an etching tank, a piping system and a temperature control device, is provided. The piping system connects the hydrogen peroxide tank, the ammonium hydroxide tank, the water tank to the etching tank, and the temperature control device is disposed around the hydrogen peroxide tank, the ammonium hydroxide tank and the etching tank to maintain the temperatures of them below the room temperature and above 12 degree centigrade. An etching process is also provided. First, hydrogen peroxide and ammonium hydroxide having a temperature in a temperature-range below the room temperature and above 12 degree centigrade, is provided. Then, water, hydrogen peroxide and ammonium hydroxide are mixed to be an etchant with a temperature maintained in said temperature temperature-range. Next, the etchant is utilized for etching copper or silver.
Owner:TAI WEI JEN +3

Etching liquid used for thick aluminum circuit board, and method

The invention provides etching liquid used for a thick aluminum circuit board, and a method. The etching liquid comprises the following main ingredients: concentrated hydrochloric acid, acetic acid, hydrofluoric acid and the balance of aluminum ions. The method specifically comprises the following steps that: laminating one surface of an aluminum foil with one layer of protection film, and laminating the other surface of the aluminum foil with a dry film; according to a preset condition, carrying out selective exposure on different positions of the dry film, removing the dry films on unexposedpositions to expose the aluminum foils under the dry films; and dissolving through the etching liquid to remove the exposed aluminum foils, and removing the dry films on the aluminum foils to obtainthe etched thick aluminum circuit board which needs to be prepared. By use of the etching liquid formed by hydrochloric acid, phosphoric acid, acetic acid and hydrofluoric acid at a certain ratio, thick aluminum etching can be realized, in addition, the acetic acid and the phosphoric acid added in the etching liquid can effectively improve the linearity of the circuit, the etching factor of the circuit is improved through the added hydrofluoric acid, an etching rate is stabilized through added aluminum chloride or dissolved aluminum, and therefore, thick aluminum etching meets use requirements.
Owner:MFLEX YANCHENG CO LTD
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