Etchant of molybdenum and/ or aluminum containing metal film for OLED (Organic Light Emitting Diode) and preparation method thereof

Abstract

The invention discloses an etchant of a molybdenum and / or aluminum containing metal film for an OLED (Organic Light Emitting Diode) and a preparation method thereof. The etchant comprises nitric acid aqueous solution, phosphoric acid aqueous solution, betaine ampholytic surfactant and water, wherein the nitric acid aqueous solution accounts for 1-10%, preferably 2-8%, of the total weight of the etchant; the phosphoric acid aqueous solution accounts for 40-80%, preferably 50-70%, of the total weight of the etchant,; the betaine ampholytic surfactant accounts for 0.1-5%, preferably 0.5-2%, of the total weight of the etchant; and the balance is water. By the adoption of the etchant, solid liquid interface tension between the etchant and the metal film can be effectively improved, and the surface wettability of metal is improved. The etching speed is stabilized, and etching precision is improved; and more importantly, a taper angle can be effectively controlled to 20-70 degrees, and no etching residue is generated. The etchant has the advantages of high efficacy, high precision and important application value.

Description

technical field [0001] The invention relates to a method for forming laminated wiring for signal wiring of an organic electroluminescent device, in particular to an etching solution containing molybdenum and / or aluminum metal film for OLED and a preparation method thereof. Background technique [0002] In the field of flat panel display, OLED has many outstanding properties such as ultra-thin, fully cured, self-illuminating, wide viewing angle, fast response speed, wide temperature adaptability, and flexible display, so its application prospect is higher than that of ordinary liquid crystal displays ( Liquid Crystal Display, LCD) is more abundant. At present, OLED has been successfully applied in many fields such as commerce, communication, computer, consumer electronics, industry, transportation, etc., and is regarded as one of the highly competitive future display technologies. [0003] The structure of an OLED is usually composed of a cathode, an electron transport layer...

AI Technical Summary

Problems solved by technology

[0005] Existing molybdenum metal film and aluminum metal film etchant mostly adopt the mixture of nitric acid, phosphoric acid, acetic acid and water, as Japanese Patent Application Laid-Open No. 7-176500 communique, when this mixture etchant is etching laminated film, it is difficult to remove molybdenum metal The cone angle of the film is controlled at 20°-70°

[0006] In addition, there is an etchant mixture of phosphoric acid, nitric acid, and acetic acid or alkylsulfonic acid, such as Japanese Patent Laid-Open No. 2005-85811, which etches molybdenum-based and aluminum-based metal film laminates, but it is prone to produce residues that affect etching precision

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