The invention discloses a preparation method of a
solar cell. The preparation method comprises the following steps: 1, conducting P
diffusion low-temperature deposition on a textured
silicon wafer toform a first lightly doped layer; 2, depositing a
mask layer on the first lightly doped layer; 3, after the
mask layer is removed by
laser at the position of a prefabricated
electrode of the
silicon wafer to form a film opening area, and cleaning the
silicon wafer; 4, conducting secondary low-temperature deposition on the film opening area of the silicon wafer to form a
phosphorus-rich layer; 5, removing the
mask layer on the surface of the silicon wafer, and forming PN junctions and P +-P ++ high-low junctions on the silicon wafer. The lightly doped layer is firstly formed on the surface of the textured silicon wafer, then a
mask layer is arranged, the first lightly doped layer at the
electrode area is removed by
laser to form the film opening area, then the
phosphorus-rich layer is deposited in the film opening area, and the PN junctions and the P +-P ++ high-low junctions are prepared in a one-step knot pushing mode. Since light expansion and the square resistance of a re-diffusionarea can be optionally adjusted, an operation window is wide, additionally the
mask layer is easily removed, and the process difficulty is low.