The present invention relates to a
semiconductor device and a manufacturing method thereof. When a
contact hole of a
semiconductor layer and a source and drain
electrode, a through-hole of a positive
electrode and the source and drain
electrode, a through-hole between connecting
metal lines or a
contact hole of the through-holes, are formed, at least one type of dry-process
corrosion of high
corrosion rate and
high selectivity is used for dry-process
corrosion; wet-process corrosion is adopted in the final corrosion treatment, so as to form the contact holes, the through-holes or the contact holes of the through-holes, which are provided with various conical angles and a plurality of contours; residues that are produced by corrosion can be completely eliminated in the wet-process and dry-process treatment; therefore, the contact holes, the through-holes or the contact holes of the through-holes have excellent contact characteristics. The
semiconductor device comprises a substrate, a film
transistor that is formed on the substrate and is provided with a semiconductor layer, a grid
insulation layer, a grid electrode and a interlayer
dielectric, and contact holes that penetrates the grid
insulation layer and the interlayer
dielectric, is exposed on the surface of the semiconductor layer and is provided with a plurality of contours. The upper part of the contact holes is provided with a contour for the wet-process corrosion; and the lower part has at least one of the contours for the wet-process corrosion and the dry-process corrosion.