The invention discloses a super junction IGBT device with low loss performance. The device comprises a collector
electrode, a P collector
electrode region, an N-buffer region, an N-pillar region, a P-pillar region, a
gate oxide layer, an N-base region, a P injection region, a first grid
electrode, a second grid electrode, an N + injection region, source electrode
metal, a P + injection region and a P-base region. According to the invention, negative ions are injected into the
oxide layer of the second grid electrode of the device, a depletion type P-channel MOS tube can be formed with a P-pillar region, an N-base region and a P injection region, the MOS tube can be used as a switch of a storage hole of the device, and when an IGBT is conducted, the MOS tube is closed and then stores the hole so that the
conductivity modulation effect is improved, the
on resistance of the device is reduced, and the conduction
power consumption is decreased; and when the IGBT is closed, the MOS tube is opened to release holes, a low-resistance channel is provided, hole outflow is accelerated, the switching speed is increased, and the switching loss is reduced.