39results about How to "High-precision pattern" patented technology

In the lithographic multilayer resist process, a material comprising a copolymer of a hydroxy-containing vinylnaphthalene with hydroxy-free olefins is useful in forming a resist undercoat. The undercoat-forming material has a high transparency and optimum values of n and k so that it functions as an antireflective coating during short-wavelength exposure, and has etching resistance during substrate processing by etching.

A main object of the present invention is to provide a pattern formed body capable of forming highly precise functional parts on various base materials, and a method for manufacturing the same. To achieve the object, the present invention provides a method for manufacturing a pattern formed body, having a plasma radiating step of radiating plasma to a patterning substrate having: a base material; an intermediate layer formed on the base material and containing a silane coupling agent or a polymer of the silane coupling agent; and a resin layer formed in a pattern form on the intermediate layer, wherein a fluorine gas is used as an introduction gas to radiate the plasma from the resin layer side.

The present disclosure provides a conductive pattern formed body with a conductive pattern formed efficiently and highly precisely in a simple process, a conductivity variable laminated body used for formation of the conductive pattern, and the like. The disclosure provides a conductivity variable composition characterized by containing insulating particle including a conductive inorganic material and an organic material adhered on the circumference of the conductive inorganic material, and a photocatalyst.

First and second magnetic layers of a magnetic head face each other. A toroidal coil layer having upper and lower layer coil pieces (ULCP and LLCP) is wound around one of the magnetic layers. The ULCP extend from a first insulating layer by downward steps to a top of a second insulating layer which is widened at ends of the first insulating layer. Side ends of the first insulating layer extend parallel to a height direction. The ULCP are orthogonal to the side ends. Each of the LLCP is formed on a third insulating layer and has a straight region extending in the same direction as the upper layer coil pieces and a curved region curved toward a facing surface or in a height direction on one end in the track width direction. An end of each of the straight and curved region is connected to an ULCP.

A highly fine organic electroluminescent device is provided. A method for manufacturing the organic electroluminescent device is provided for patterning a very fine light emitting layer, and a deposition mask is provided to be used in the patterning. For deposition of the light emitting layer, a mask member is provided with apertures (effective apertures) for forming the light emitting layer to be used for light emitting pixel and apertures (dummy apertures) not to be used for forming the light emitting pixel around an area (effective aperture area) separated by the outer edge of a group of the apertures. The light emitting layer is deposited by using the deposition mask.

A mask includes a silicon member, and a portion defining an opening penetrating the silicon member; and the corner of the opening is rounded.

There is provided a glass ceramic material for plasma display, in which glass fine grains (A) having a softening point of 570-640° C. are in 40-70 wt %, and glass fine grains (B) having a softening point of 480-540° C. are in 30-60 wt %, the glass ceramic material for plasma display being characterized in that the glass fine grains (A) comprise 2-12 wt % of SiO2, 50-58 wt % of B2O3, 10-20 wt % of Al2O3, 0-6 wt % of ZnO, 0-2.8 wt % of Li2O, and 10-22 wt % of at least one selected from MgO, CaO, SrO and BaO and that refractive index of the glass fine grains (A) is 1.53-1.56.

The object of the present invention is to provide a substrate for an organic EL element capable of forming an organic EL layer efficiently in a highly precise pattern in a short period of time, and an organic EL element having the preferable electric characteristics.To attain the object, the invention provides a substrate for an organic electroluminescent element comprising a base material, an electrode layer formed in a pattern on the base material, and a photocatalyst containing layer formed to cover the electrode layer and contains a photocatalyst and a binder so as to show the wettability change by the action of the photocatalyst accompanied by the energy irradiation, wherein the photocatalyst containing layer contains a portion with the signal intensity of the electron spin resonance spectrum derived from the hydroxy radical increased to 1,000 times or more in 1 second within 600 seconds of the start of the irradiation of the ultraviolet ray at the time of measuring the electron spin resonance spectrum while irradiating the ultraviolet ray.