The invention relates to a carbon ion source device with a reflector power supply. The carbon ion source device with the reflector power supply comprises an arc chamber, a cover plate, a lamp filament, a cathode, a reflector and a vent hole, the arcing chamber is used as a chamber for generating plasmas by collision of electrons and gas molecules; the cover plate is provided with a leading-out slit used for leading out plasma, and the plasma is led out of the arcing chamber. The filament generates a first group of electrons after being heated, and the first group of electrons are used for heating the cathode; after the cathode is heated, a second group of electrons is generated, and the second group of electrons is used for arcing; the reflecting electrode is arranged on one side, opposite to the cathode, in the arcing chamber and is used for constructing an electric field in the arcing chamber; and the vent hole is formed in the inner wall of the arcing chamber and is used for inputting gas into the arcing chamber. The ion source device provided by the invention can obtain a larger and purer carbon ion beam, the electric field intensity is convenient to adjust, the injection quality is improved, and the product yield is improved.