58 results about "Carbon plasma" patented technology

The vacuum-cathode arc source is adopted in the invention and the graphite is as the target cathode. Using the carbon plasma generated by the vacuum-cathode graphite arc deposits the diamond-like film on the diaphragm to be coated. The ivnention can produce in batch size of the compound speaker diaphragm coated with diamond like film in various shape specifications with good performances. The invention raises the frequency response characteristics of the speakers and improves the sound quality.

A method for forming a superhard amorphous carbon coating in vacuum, comprising the steps of: placing an article in a vacuum chamber, evacuating the chamber, treating a surface for the article with accelerated ions; applying, on the treated surface, a layer of a material that provides adhesion for subsequent layers, initiating pulsed electric-arc discharge on a graphite cathode, and obtaining a pulsed carbon plasma stream from a plurality of cathode spots that move along the cathode surface. After that, the carbon plasma is condensed in a predetermined area on the article surface to produce a superhard amorphous carbon coating, the article temperature being maintained within the range of 200 to 450 K through controlling a repetition frequency of the electric-arc discharge pulses. According to the invention, the carbon plasma pulsed stream has average ion energy of 25-35 eV and ion concentration of 1012, 1013 cm-3; axis of the carbon plasma stream being set at angle of 15-45° to a predetermined surface of an article. During application of the coating, the article temperature change Deltat is maintained within the range of 50-100 K.

A hybrid coating structure (500) includes a substrate (510) and a hybrid coating (100). The hybrid coating further includes a number of diamond-like carbon grains (110), each grains containing a number of superhard nano-particles (120) incorporated therein; and a number of corrosion-resistant nano-particles (130). The superhard nano-particles are comprised of a material selected from the group consisting of silicon carbide, titanium carbide, and titanium nitride. The corrosion-resistant nano-particles are comprised of a material selected from the group consisting of chrome and chrome nitride. A method for making a hybrid coating structure includes steps of: providing a substrate; producing carbon plasma, superhard particle plasma and corrosion-resistant particle plasma by a sputtering method; and depositing a hybrid coating.

A method for forming a junction region of a semiconductor device is disclosed. The steps of the method include providing a semiconductor substrate. A gate structure is formed on the semiconductor substrate. A dopant is implanted into the semiconductor substrate to form the junction region. An insulator layer is formed on the gate structure and the semiconductor substrate. A carbon-containing plasma treatment is performed to the insulator layer. A spacer is formed on a side-wall of the gate structure and the dopant is implanted into the semiconductor substrate to form a source / drain region next to the junction region. A heat treatment is performed to the semiconductor substrate.

The invention relates to electronic engineering, in particular to producing autoemission cathodes which are used in the form of an electrode source for different-purpose electrovacuum devices. The use of different materials for producing cold cathodes is one of investigation directions with respect of the use of different materials, including a hydrocarbon material based on a linear-chaining sp1-carbon. Said hydrocarbon material can be embodied in the form of carbon fibres or carbon film based on a linear-chaining sp1-carbon, including films produced by applying a carbon-powder suspension to a substrate. Said substrate can be made of a flexible material. In addition, the cathode can be made of a carbon film obtainable by the deposition thereof from carbon plasma. The inventive method for producing carbon fibres consists in carrying out the reaction of dehydrohalogenation of polymeric fibres from polyvinylidene-halogenides or polyvinyl-halogenides associated with successive heat treatment at a temperature ranging from 400 to 900° C. in vacuum in the order of 104 Pa. The use of the inventive cold cathodes makes it possible to produce electronic devices and light sources.