Method for growing metal carbide on metal surface

Abstract

The invention belongs to the preparation technology for growing metal carbide on metal surfaces and relates to a method for growing metal carbide on a metal surface. The method includes the preparation steps that firstly, tungsten, zirconium or a tungsten-zirconium alloy is sputtered onto the metal base body surface in a magnetron sputtering manner, and a compact thin film layer is formed; secondly, a metal base body is heated to 100-500 DEG C, and cooling is performed till room temperature is achieved after heat preserving is performed for 0.5-1 h; thirdly, carbon plasma is made to react witha thin film layer of the metal base body to generate tungsten carbide and / or zirconium carbide through a plasma chemical vapor deposition system. According to the method, a zirconium carbide or tungsten carbide or zirconium carbide and tungsten carbide composite layer can grow on the surface of a metal bar, plate or foil with the melting point larger than 500 DEG C, and the mechanical propertiesof the surface of the metal bar, plate or foil are improved and include strength, abrasion resistance, toughness and impacting strength.

Description

technical field [0001] The invention belongs to metal surface enhancement technology, and relates to a method of growing a layer of tungsten, zirconium or tungsten-zirconium alloy film layer on the metal surface, and then using the film layer to react with carbon plasma in situ to grow metal carbide, thereby realizing metal surface modification Purpose. Background technique [0002] Metal carbides, such as tungsten carbide (WC) and zirconium carbide (ZrC) have high hardness and melting point, wear resistance and corrosion resistance, excellent performance, low friction, excellent thermal conductivity, excellent chemical stability and other performance characteristics. , tribology and semiconductor fields have been more and more widely used. At present, the methods of growing metal carbides on the metal surface mainly include plasma spraying technology (Tao Shunyan, Ji Heng, Ding Chuanxian. Journal of Inorganic Materials, 2014, 19(1), 159-164), DC arc in-situ metallurgy proc...

AI Technical Summary

Problems solved by technology

However, the current research needs to add carbides on the metal surface or use different techniques to deposit carbides directly on the metal surface. In this way, the bonding force between the metal carbides and the metal is not strong, and there may be insufficient stress. matching problem

At the same time, the metal carbide, metal powder or carbon powder added during the deposition process may enter the interior of the material during the deposition process, affecting the internal structure and properties of the metal.

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