The invention discloses a preparation method of an abrasion-resistant and oxidation-resisting nanometer composite TiAlSiN superhard
coating. The preparation method is characterized in that a
basal body is pretreated and placed in electrical arc and magnetron
sputtering composite deposition equipment, a pillar arc Ti target is used as a Ti source, and the power
supply current of the pillar arc controls the
sputtering rate of the pillar arc Ti target; a flat surface Si target and a flat surface Al target are used as sources of corresponding elements, the flat surface Si target and the flat surface Al target are placed on the inner wall of a furnace body in an opposite manner, and the
sputtering rates of the targets are controlled by adjusting the power of a medium-frequency
pulse power supply; high-purity Ar is adopted as a main
ionization gas, and an effective
glow discharge process is guaranteed; and high-purity N2 is adopted as a reacting gas, is ionized and combined with the Ti, Si and Al elements so as to deposit on the surface of the
basal body to form a TiAlSiN
coating. The thickness of the prepared TiAlSiN
coating is 3.5 micrometers, and the microhardness of the coating is 40 GPa; and the friction factor is 0.7, the antioxidation temperature of the TiAlSiN coating achieves 1000 DEG C, and the TiAlSiN coating has good antioxidation property and abrasion-resistant property.