81results about How to "Ambient temperature has little effect" patented technology

The invention discloses a manufacturing method of an MEMS chip insensitive to packaging stress. The manufacturing method comprises the steps of firstly, taking an SOI wafer, forming a lower electrode by use of top-layer Si and etching the top-layer Si to form lower electrode patterns, secondly, taking a single crystal Si wafer and performing photoetching and Si etching to form a substrate wafer, thirdly, aligning the SOI wafer to the substrate wafer, performing silicon-silicon dioxide bonding and annealing to form a bonded wafer, and grinding the bottom-layer Si of the SOI wafer in the bonded wafer to form an MEMS activity structure layer, fourthly, depositing a metal layer on the MEMS activity structure layer to form a metal pad, fifthly, etching the MEMS activity structure layer and releasing the MEMS activity structure layer, sixthly, taking a single-crystal Si wafer, and performing photoetching and Si etching to form a cover plate wafer, seventhly, aligning and bonding the cover plate wafer to the bonded wafer and annealing to form a sealed wafer, and finally cutting the cover plate wafer and the sealed wafer to obtain the MEMS chip. The manufacturing method is short in process and high in rate of finished products; the manufactured MEMS chip is insensitive to the packaging stress.

The invention discloses a preparation method of a hybrid membrane for removing strontium ions in radioactive wastewater. The preparation method comprises the following steps that a chitosan-epoxy chloropropane cross-linking product and a metal titanium precursor are prepared and then added into a polyvinyl alcohol aqueous solution to obtain a membrane coating solution; a support body is coated with the membrane coating solution until a membrane is obtained, and the membrane is separated from the support body and dried to obtain the hybrid membrane without the support body, or the membrane and the support body are not separated and dried to obtain the hybrid membrane with the support body; or the membrane coating solution is dissolved with solvent firstly, then the support body is coated with the membrane coating solution until the membrane is obtained, and the membrane is separated from the support body to obtain the hybrid membrane without the support body, or the membrane and the support body are not separated to obtain the hybrid membrane with the support body. The hybrid membrane prepared through the method is good in temperature resistance and high in adsorption efficiency, has the high adsorption capacity on strontium ions in water and not only can be used for adsorption removal of the strontium ions in the radioactive wastewater but also can be used for adsorption separation of strontium ions in nonradioactive wastewater.

An anti-knock device of large distortion and heavy load visco-elasticity damper is composed by a large distortion visco-elasticity damper and lead compacting damper. The large distortion visco-elasticity damper is put in the middle and surrounded by several lead compacting dampers with the top and bottom linked to the armor plate to from an integrated damper.

The invention relates to an N-type coaxial thermistor type power transmission standard seat, which comprises a thermistor element structure cavity, a temperature control cavity, a transmission line and an N-type joint, wherein a square column onto which a thermistor is attached is arranged in the thermistor element structure cavity; the transmission line is matched and connected with the thermistor through a corrugated pipe; the thermistor element structure cavity and a part of the transmission line, which is close to one side of the square column, are embedded into the temperature control cavity; and an output end of the transmission line is connected with the N-type joint. The power transmission standard seat satisfies the requirement of wideband microwave power value traceability, and guarantees the accuracy and the reliability of microwave power value transmission.

The invention relates to a sensor of a micro-electromechanical system (MEMS), in particular to a high-gravity (g) acceleration sensor in a plane of the MEMS based on a resonance tunnelling structure (RTS), which solves the problems that the structure of the conventional MEMS high-g acceleration sensor cannot realize horizontal acceleration measurement and a detection result is easy to influence by a temperature. The high-g acceleration sensor in the plane of the MEMS based on the RTS comprises a silicon-based frame and a quality block, wherein two sides of the quality block are fixed with the silicon-based frame respectively by an independent supporting beam and two combination beams; the independent supporting beam is arranged along a central line of the quality block; the two combination beams are symmetrical about the central line of the quality block which is taken as a symmetry axis; each combination beam comprises a detection beam and two connection beams; a strain pressure sensitive element is arranged on the detection beam; the thickness and width of the detection beam are smaller than those of the connection beams; and the independent supporting beam, the quality block and the connection beams in the combination beams are equal in thickness. The acceleration sensor can realize the horizontal acceleration measurement and is reasonable and simple in structure, simple in process, and less influenced by an environmental temperature, works normally in a high-temperature environment, realizes three-axis integration easily and is applied to measurement of an impaction acceleration with a high-g value.

The present invention discloses a high performance polymer foaming cement thermal insulation material, which comprises, by weight, 30-50 parts of cement, 5-15 parts of fly ash, 0.1-0.4 part of anti-cracking fiber, 0-0.3 part of a reinforcing agent, 0-2 parts of redispersible latex powder or an emulsion, 25-35 parts of water, and 2.0-4.0 parts of a composite foaming agent. The preparation method comprises: weighing various components; adding the water, the anti-cracking fiber and the reinforcing agent; stirring for 1-2 minutes; then adding the fly ash and the cement, and stirring for 2-3 minutes; then adding the composite foaming agent, and stirring for 10-20 seconds; placing the resulting slurry in a mold, standing for 2-3 hours, and then carrying out demolding; and cutting after 24 hours, then packaging, and carrying out concrete curing until the curing time is 28 days. The foaming cement thermal insulation material of the present invention is a lightweight material with a fire-protection rating of class A, has characteristics of thermal insulation, durability, heat insulation, sound insulation and environment protection, and is used for building interior and exterior insulation materials, fire barriers, roofing thermal insulation materials, and the like.

The invention provides a heat radiation control method of a modularization data center. According to the method, a temperature sensor is utilized to sense internal temperature of a plurality of servers and temperature of central processing units in a plurality of the servers, if temperature of any central processing unit is abnormal, flow of first cooling fluid is adjusted, if any internal temperature is abnormal, a rotating speed of a heat radiation fan group is adjusted, and if the rotating speed of the heat radiation fan group reaches an upper limit, flow of second cooling fluid is adjusted. Through a heat radiation mode of the present invention, machine board heat radiation of a data center can be modularized, cooling fluid flow is controlled through a cooling fluid solenoid valve system, and the heat radiation mode has convenience in integral control.

The invention provides an intelligent body temperature monitor. The intelligent body temperature monitor comprises an infrared temperature sensor used for converting an infrared light signal emitted by a human cochlea to an electric signal, an audio chip used for controlling audio signals, a bone conduction earphone connected to the audio chip and used for playing the audio signals based on a bone conduction mode, and a dual-mode bluetooth module connected to the infrared temperature sensor and the audio chip and used for collection and calculation of electric signals, output of audio signals as well as communication with intelligent equipment based on bluetooth. The intelligent body temperature monitor has following beneficial effects: the dual-mode bluetooth module is utilized so that body temperature monitoring and audio transmission functions can be realized; body temperature can be monitored in a real-time mode through mobile phones and the like; the infrared temperature sensor is utilized and an in-ear wearing mode is utilized so that impact of ambient temperature can be effectively reduced; the bone conduction earphone is utilized; sounds can be conducted through human bones and ear pressure can be reduced; comfort level is increased; sleeping music can be played through the bone conduction earphone and facilitates sleeping of patients.

The invention belongs to the technical field of electric power detection and provides a photoelectric AC / DC voltage transducer based on the Pockels effect. The photoelectric AC / DC voltage transducer is not affected by environment temperature change, measurement precision is high, signal transmission is convenient, safety performance is high, power supply is not needed at a measurement point, and optical fiber signal transmission is immune to electromagnetic interference. The photoelectric AC / DC voltage transducer comprises a laser source, a transducer component, transmission fiber, a photoelectric detector and a backward-stage signal processing system, wherein the transducer component comprises a laser collimator I, a polarizer, a 1 / 4 wave plate, a crystal, an analyzer and a laser collimator II which are arranged along an optical path in sequence, the crystal is a cuboid, the length direction of the crystal is the light passing direction, the upper surface and the lower surface, perpendicular to the light passing direction, of the crystal are plated with metal layers serving as detection electrodes, the metal layers are used for loading voltage to be measured, the voltage direction is perpendicular to the light passing direction, and the backward-stage signal processing system obtains the voltage to be measured through a signal output by the photoelectric detector.

The invention discloses an infrared temperature measurement compensation method based on binocular camera ranging. The infrared temperature measurement compensation method comprises the steps of collecting human body image information by adopting a binocular camera, calculating the distance between the aperture center of the binocular camera and a human body, and compensating the temperature of aninfrared sensor. A binocular camera detection mode is adopted, the parallax of two images is calculated to obtain the distance between the human body and the sensor, an infrared temperature measurement software compensation algorithm is adopted to finally calculate the human body surface measurement temperature, the influence of the environment temperature on the measurement temperature is small,the precision is high, the performance is stable, and the deployment is more convenient.

The invention discloses a formula of intestine-protecting and lead-excreting fruit cakes and a processing method of the intestine-protecting and lead-excreting fruit cakes. The formula comprises the following raw materials in percentage by weight: 10%-40% of red dates, 5%-20% of crataegus pinnatifida bunge, 1%-5% of rosa laevigata michx, 1%-40% of malt syrup, 1%-20% of stachyose, 0.5%-1% of carrageenan, 0.5%-1% of pectin, 0.5%-1% of konjac glucomannan, 0.01%-0.05% of zinc gluconate, 0.01%-0.05% of calcium gluconate, 0.4%-2% of citric acid and 0.04%-0.2% of sodium citrate. The processing method comprises the following steps: selecting and processing fruits, and preparing auxiliary materials; washing and pre-boiling; crushing, pulping and grinding; sugaring, gelling, boiling, pouring and molding, drying and packaging a finished product to prepare the product. The prepared fruit cakes are transparent and brown and contain few red date peels and crataegus pinnatifida bunge peels; the fruit cakes have moderate sweetness and have the fruit flavors of the red dates, crataegus pinnatifida bunge, and rosa laevigata michx, and are of a snack food suitable for people of all ages; and stachyose and amino acids in fruits and the like can be used for reducing the absorption of lead in intestinal tracts, and pectin, the red dates, crataegus pinnatifida bunge and the like also can accelerate the metabolism of the lead so that the intestinal tracts can be protected.

The invention discloses a large-particle sustained and controlled release fertilizer. The fertilizer is prepared from the following raw materials in parts by mass: 10-25 parts of a nitrogen fertilizer, 8-12 parts of a phosphorus fertilizer, 15-25 parts of a potassium fertilizer, 2-5 parts of a medium and trace element fertilizer, 4-8 parts of a nitrification inhibitor and 1-5 parts of a seaweed active substance. The method comprises the steps: during use, carrying out coating controlled release on the nitrogen fertilizer by using a coating material to obtain the controlled-release nitrogen fertilizer; and mixing the controlled-release nitrogen fertilizer with the phosphate fertilizer, the potash fertilizer, the medium and micro element fertilizer and the seaweed active substance, adding the nitrification inhibitor for filling and slow release, extruding and granulating, curing, naturally cooling and screening to obtain the large-particle sustained and controlled release fertilizer. Theseaweed active substance is added into the large-particle sustained and controlled release fertilizer, so that the resistance of plants is improved; meanwhile, the nitrogen fertilizer is subjected tocoating controlled release by adopting a coating material, so that the prepared large-particle sustained and controlled release fertilizer combines sustained and controlled release and accurate fertilization can be realized; each sustained and controlled release fertilizer particle is uniform in nutrition, fixed in weight, convenient to apply and long in fertilizer efficiency period, and the fertilization frequency is reduced, so that the manual investment is reduced, and the utilization rate of the fertilizer is increased.

The invention relates to the fields of metallurgy and chemical engineering, particularly a gold extraction method by heap leaching. The method comprises the following steps: laying an base wad on a heap leaching site, wherein the base wad comprises a base layer, an impermeable layer and a protective layer from bottom to top, and a collector is arranged on the impermeable layer and under the protective layer; crushing raw ores, and heaping on the base wad to obtain an ore heap; burying a spray pipe into the ore heap, introducing a spray liquid into the spray pipe to spray the ore heap, and collecting by the collector to obtain a gold-containing rare solution, wherein the spray liquid is a sodium cyanide solution; and recovering the gold from the gold-containing rare solution. By adopting the buried-pipe spray process, the spray pipe is buried in the ore heap, so that the evaporation amount of the spray liquid in the spray pipe is small, and the water-saving benefit is obvious; and the method provided by the invention is slightly influenced by the ambient temperature, thereby ensuring continuous production in cold and arid regions.

An inspection method using a portable optical inspection apparatus adapted to be driven by a battery and capable of producing an accurate sensing result without being adversely affected by the environmental temperature conditions is disclosed. The light is radiated on a sensor chip for a predetermined length of time and the amount of a substance contained in a specimen placed on a sensing thin film is measured by an optical signal obtained from the sensing chip, using an optical inspection apparatus comprising the sensor chip including a substrate 5 , an optical waveguide layer 6 arranged on the substrate and the sensing thin film 7 attached on the surface of the optical waveguide layer, a light source 8 for radiating the light on the sensor chip and a photodetector 9 for receiving and converting the light output from the sensor chip into an electrical signal The light source is turned on and off a plurality of times for a predetermined length of time during which the inspection light is radiated. The amount of light with the light source on is measured by the photodetector thereby to determine the amount of the substance. In the process, the light amount with the light source off can also be measured so that the amount of the substance is determined from the difference between the light amount with the light source on and off.

A low-voltage draw-out switch cabinet propel interlocking mechanism is characterized in that a transmission screw and a roller bearing positioning part are metal parts; the roller bearing positioningpart comprises a fixed base and at least two vertically arranged rollers, wherein the rollers are arranged in a forward and backward interval along the axial direction of the transmission screw, the lower end of the roller is rotatably mounted on the fixed base through a bearing, and the upper end can extend into the spiral groove of the transmission screw and be drivingly matched with the transmission screw. The mechanism has the advantages that the positioning parts of the transmission screw and the roller bearing are all made of ferrous material, so that the positioning parts are less influenced by the ambient temperature, the structure is more stable, and the fracture fault is effectively avoided. Moreover, the roller bearing positioning part is simple in structure and convenient to assemble. When the roller is matched with the screw spiral groove of the transmission screw, the roller itself will rotate, which not only makes the operation easier, but also ensures that the roller bearing positioning part will not be stuck.

The invention relates to the technical field of cable monitoring, in particular to a device for monitoring a cable head fault online and monitoring method thereof. The device comprises an optical fiber temperature measurement probe, an instrument, an optical fiber patch cord, a sheath and a high-temperature strapping tape, wherein he optical fiber temperature measurement probe is fixed on the surface of a cable head corresponding to a hot spot through using a high-temperature adhesive tape, the optical fiber temperature measurement probe is connected with an instrument through the optical fiber patch cord, and the sheath wraps the outer sides of the optical fiber temperature measurement probe and the cable and is fastened and fixed by the high-temperature strapping tape.

The invention relates to the field of outdoor facility construction of electric power and telecommunications industries. The invention provides an energy-saving installation method of an outdoor cabinet, which buries the storage batteries of the outdoor cabinet in the ground after the storage batteries are partially processed, so that the energy-saving requirements of the outdoor cabinet can be effectively met, and the anti-theft grade of the storage battery is improved.

The invention provides a circulating water rapid refrigerating device. The circulating water rapid refrigerating device comprises a box body, a refrigerating pipeline and a heat exchange device. The heat exchange device is arranged in the box body, and comprises a first spiral pipe, a second spiral pipe and a horizontal pipe. The discharge end of the refrigerating pipeline is connected with the inlet end of the first spiral pipe, and the receiving end of the refrigerating pipeline is connected with the outlet end of the second spiral pipe. The heat exchange device further comprises a first radiation piece and a second radiation piece, wherein the first radiation piece and the second radiation piece are made of copper-aluminum alloy. The axis of the first radiation piece coincides with theaxis of the first spiral pipe, and the first radiation piece is fixedly connected with the outer wall of the first spiral pipe. The axis of the second radiation piece coincides with the axis of the second spiral pipe, and the second radiation piece is fixedly connected with the outer wall of the second spiral pipe. A baffle plate is arranged in the box body, and the baffle plate is connected withthe inner wall of the box body. The temperature of circulating water can be rapidly reduced, and the circulating water rapid refrigerating device is simple in structure and easy to maintain.

The invention discloses a simple microbalance which comprises a balance moving coil supporting part and a conversion display circuit, wherein the balance moving coil supporting part comprises a balance disc, a moving coil meter, a weighing moment arm and a balance indication arm; and the conversion display circuit comprises a moving coil current balancer, a current-to-voltage converter, an adjustable potentiometer, a digital display and a power supply. The simple microbalance disclosed by the invention has the advantages of simple structure, convenience in operation, small measurement error, high sensitivity and little ambient temperature influence, is capable of displaying the minimum weight of 0.001 microgramme, and is very suitable for microanalysis.

The invention relates to an independent circulating filtration temperature-control water-cooling hydraulic system. A hydraulic pump is connected with an oil tank through an oil suction filter; one path of an oil outlet end of the hydraulic pump is fed into the oil tank through a sequence valve and an oil return filter; one-way valves which are not connected at a normal state are connected to two ends of the oil return filter in parallel; one path of the oil outlet end of the hydraulic pump is fed into the oil tank through a throttle valve and a temperature-sensitive overflow valve; one path of the oil outlet end of the hydraulic pump is fed into the oil return filter through a two-way solenoid valve, a back pressure valve and a water cooler; one path of the oil outlet end of the hydraulic pump is connected with a two-inlet one-outlet three-way solenoid valve; the hydraulic pump is connected with one inlet of the three-way solenoid valve; an oil outlet end of the throttle valve is connected with the other inlet of the three-way solenoid valve; and an outlet of the two-inlet one-outlet three-way solenoid valve is connected with a liquid control proportion water valve for controlling the water cooler. According to the independent circulating filtration temperature-control water-cooling hydraulic system provided by the invention, when a petroleum coke conveyor works at an extremely cold environment, the environment temperature is low, and hydraulic oil needs to be heat to appropriate temperature so as to ensure the system to work reliably.

The invention provides a color pavement material. The color pavement material comprises a cementing material and an aggregate, the ratio of the cementing material to the aggregate is 5-20 / 100, wherein the aggregate is color cavity gap ceramic particles, and a phase transition material is absorbed in the cavity gap of the color cavity gap ceramic particles. According to the invention, a pore forming agent is added during the preparation process of the multi-cavity ceramic particles, general color cavity gap rate can reach 80%, and volume ratio of the effective adsorption phase transition material can reach 40%. The phase transition material is absorbed in the cavity gap of the multi-cavity gap ceramic particles, a phase transition process is carried out in the cavity gap of the multi-cavity gap ceramic particles, the cementing material and the phase transition material are tightly combined, stress concentration phenomenon is not generated due to minimal defect in the cementing material, internal stress generation can be avoided, and color effect of the color aggregate can be fully embodied.

The invention discloses a method for adsorption separation of radioactive strontium-containing wastewater by hybrid membranes. The method includes: firstly, feeding radioactive strontium-containing wastewater into a spiral-wound membrane separator, and adopting the hybrid membranes for adsorption separation of most of strontium ions in radioactive wastewater by cross-flow operation; secondly, feeding into a plate-type membrane separator, and adopting the hybrid membranes for adsorption removal of a small quantity of strontium ions in the wastewater by cross-flow operation; finally, performingreverse osmosis filtration treatment to remove residual trace strontium ions in the wastewater, so that the strontium ions in the radioactive strontium-containing wastewater are removed. The method for adsorption separation integrally has advantages of short process, simplicity and convenience in operation, easiness in cleaning and regeneration of the hybrid membranes, mild conditions, high selectivity, easiness in popularization and application and the like, large-scale removal of the strontium ions in the strontium-containing wastewater in the nuclear power industry can be realized, and themethod can also be used for adsorption removal of the strontium ions in non-radioactive wastewater.

The invention relates to a deicing wind power blade heating system detection device and method. After the deicing wind power blade heating system is started to be in a working state, an unmanned aerial vehicle visible light imager and an infrared thermal imager are controlled to synchronously shoot a visible light image and an infrared thermogram of one same area of a wind power blade; an area corresponding to the shot image on a wind power blade heating element position distribution diagram is determined by utilizing the visible light image, the infrared thermogram is superposed with the area, the positions of heating elements are calibrated on the infrared thermogram, temperature data corresponding to the positions of the heating elements are compared, and when the percentage that the temperature of the positions of parts of heating elements is lower than the corresponding temperature of the other heating elements exceeds a set threshold value, it is judged that the parts of heatingelements fail. The method is less influenced by the environment temperature, and the detection result is more accurate. The deicing wind power blade heating system can be remotely detected, manpower is saved, efficiency is improved, and safety is higher.

The invention discloses plastic plate molding equipment. The equipment comprises a first plastic extruding machine, a second plastic extruding machine, a third plastic extruding machine, first guide rollers, an upper-layer nonwoven fabric layer unwinding equipment first unwinding device, a lower-layer nonwoven fabric layer unwinding equipment second unwinding device, second guide rollers and traction devices which are arranged sequentially, wherein the first plastic extruding machine is used for extruding a middle-layer heat-insulation plate; the second plastic extruding machine is used for extruding an upper plastic sheet layer; the third plastic extruding machine is used for extruding a lower plastic sheet layer; a setting mold is fixedly connected onto a first setting device; a heat-insulation plate machine head is mounted on the first plastic extruding machine, an extruded heat-insulation plate blank is cooled and set by the setting mold of the first setting device, and a continuous heat-insulation plate is formed; the middle-layer heat-insulation plate, the modified plastic sheet layer on the upper side, the modified plastic sheet layer on the lower side and grid fabric or nonwoven fabric are bonded together in a hot-melt manner respectively; the heat-insulation plate is made of polystyrene (PS), polyvinyl chloride (PVC), polyurethane (PU), polypropylene (PP), polyethylene (PE) and ethylene-vinyl acetate (EVA); and the plastic sheet layers are made of PVC, PP, PE and PU. The grid fabric or the nonwoven fabric or a polymer adhesive layer has the good bonding property to a wall and does not fall off easily, and the service life is long.

A waste heat power generation type screw machine set is characterized by comprising a refrigerating circulating system and a double-screw expansion machine system. A power output shaft of the double-screw expansion machine system is connected with a power generation system, and a condensing coil of the refrigerating circulating system is placed in a generator of the double-screw expansion machine system. The waste heat power generation type screw machine set is reasonable in design and capable of effectively utilizing low grade heat energy emitted by buildings. The double-screw expansion machine system is used for achieving power generation utilization of waste heat energy resources, the energy consumption of the refrigerating circulating system can be reduced, the waste heat resources emitted to an external environment can be reduced, the temperature of an outdoor environment and the using cost of the refrigerating circulating system can be lowered, and emission of carbon dioxide can be reduced.

The invention discloses a cotton defoliant compounded from iso-PhABA and thidiazuron. The defoliant comprises iso-PhABA and thidiazuron in the mass ratio being (0.01-30):(5-70). The dosage form of thedefoliant comprises (but not limited) wettable powder, water dispersible granules or a suspension concentrate. The components are compounded reasonably and show a certain synergistic function, so that the defoliant has an excellent defoliation effect and shows better ripening acceleration and boll opening effects, and the yield and quality of cotton can be improved. Meanwhile, the defoliant contains no herbicides and ethephon components, and soil environment pollution and residues caused by heavy use of chemical defoliants and ethephon are reduced.

The invention discloses a wearable contact type dynamic intelligent body temperature monitoring device which comprises wearable monitoring equipment, and the wearable monitoring equipment comprises a double-temperature digital sensor, a PPG heart rate monitoring sensor, a communication unit, a display unit and a system micro-processing controller. The dual-temperature digital sensor, the PPG heart rate monitoring sensor, the communication unit and the display unit are respectively connected with the system micro-processing controller, the wearable monitoring equipment further comprises a shell (1), a circuit board is arranged in the shell (1), and the system micro-processing controller is arranged on the circuit board (6). The system can dynamically and continuously monitor the daily body temperature and the basal body temperature, and has the advantages of high monitoring accuracy and small influence of environment temperature.

The invention provides a bionic cilium microsensor based on bistable potential energy adjustment and a preparation method of the bionic cilium microsensor. The overall structure of the sensor is a multi-layer structure composed of cilia, an upper structure layer, a middle connecting layer and a lower supporting layer, wherein the upper structure layer comprises a suspension comb tooth fixing end,a folding beam, suspension comb teeth, detection comb teeth and modulation comb teeth. According to the invention, cilium columns and the upper structure layer are prepared on silicon on an insulatingsubstrate, and movement gaps are provided for the folding beam and the suspension comb teeth by etching the middle connecting layer. When the sensor works, the cilium columns drive the suspension comb teeth below to move in the flow velocity / shear stress direction, so that the gaps between the suspension comb teeth and the detection comb teeth are changed, and the flow velocity / shear stress is obtained according to the change of capacitance; when the flow velocity / shear stress is weak, the measurable displacement is obtained by applying a modulation voltage to the modulation comb teeth, enabling the potential energy of the system to be in a bistable state and adding a proper amount of white noise, namely, the capacitance change between the static comb teeth and the movable comb teeth canbe detected, and finally, the detection of a lower threshold value is realized.