Several mid UV photo acid generators (PAGs), a chemically amplified photo
resist (CAMP), and method for improving nested to isolated line bias are provided. Similarly, photo speed may also be improved. Unlike conventional mid UV PAGs, the present invention's PAG compounds,
resist composition, and method do not require a mid UV sensitizer. Specifically, PAGs are provided that bear a
chromophore capable of receiving mid UV
radiation, particularly I-line, and that are suitable for use in a chemically amplified photo
resist having a photo speed of 500 mJ / cm2 or less, but preferrably 200 mJ / cm2 or less. For example, the PAGs can be a
sulfonium or iodonium salt, such as anthryl, butyl, methyl
sulfonium triflate and bis(4-t-butylphenyl)iodonium 9,10-dimethoxyanthracene
sulfonate. The
chromophore forming a part of the PAGs can be selected from polyaromatic hydrocarbons, for example, chrysenes, pyrenes, fluoranthenes, anthrones, benzophenones, thioxanthones, anthracenes, and
phenanthrenes, but preferably anthracenes.