The invention provides an ionic
nitriding technology assisted by an arc
electron source. The ionic
nitriding technology assisted by the arc
electron source comprises the steps that S1, vacuumizing iscarried out; S2, preheating is carried out; S3, mechanical
corrosion is carried out, specifically,
argon is pumped to keep vacuum of 0.1-1Pa, the temperature is 200-600 DEG C, a bias
voltage is applied between a workpiece and a cavity body, meanwhile, a furnace inner arc
electron source is started, a main power
supply current is 40-150 A, and arc
discharge plasma is generated; an auxiliary
anode electrode power supply is turned on, a current is 10-100 A, an
electron current in the arc
discharge plasma is led to enter a
nitriding chamber space, and ironic bombardment mechanical
corrosion is carried out on the workpiece for 5-30mins; S4, nitriding is carried out, the furnace inner temperature is kept 200-600 DEG C, the
argon and
nitrogen are pumped, the vacuum degree is kept at 0.1-1Pa, a
voltage is applied between the workpiece and the cavity by a
direct current bias
voltage power supply, the arc
electron source main power supply is turned on, the current is 40-150 A, and the arc
discharge plasma is generated; the auxiliary
anode electrode power supply is turned on, the current is 10-100A, the
electron current of the arc discharge plasma is led to enter the nitriding chamber space,and ironic nitriding is carried out for 0.5-6 hours; and S5, cooling is carried out below 250 DEG C. According to the ionic nitriding technology assisted by the arc
electron source, a
glow discharge plasma can be enhanced, the reactivity is improved, time is shortened, and gas and
energy consumption are reduced.