An integrated biochemical sensor based on rib optical
waveguide comprises an MZI (Mach-Zehnder interferometer) detection
chip, an
optical fiber support, a plurality of
polymer cavities and a micro-channel
system which are machined on the same SOI (
silicon on insulator)
silicon wafer as well as photoelectric
detector and a detection circuit which are arranged in the
polymer cavities. The MZI detection
chip comprises the rib optical
waveguide, a medium groove, a
sample pool, a medium groove
beam splitter and a medium groove beam combiner.
Optical fiber is coupled with the rib optical
waveguide, and the rib optical waveguide is coupled to the photoelectrical
detector and the detection circuit. Light transmitted by an input end of the rib optical waveguide is split into two
branch light beams by the medium groove
beam splitter, the two
branch light beams are transmitted along two waveguide arms respectively, one waveguide arm is coupled to the
sample pool, the
light beam of the waveguide arm is subjected to
phase modulation by a sample in the
sample pool, the two light beams are combined into an output
light beam by the medium groove beam combiner, the photoelectric
detector and the detection circuit detect change of
light intensity and convert the output
light beam into an electrical
signal, and the sample in the sample
pool is detected. The sensor is easy to
machine, compact in structure, high in sensitivity and low in cost.