The invention relates to a production technology of controllable
silicon, which comprises the following steps of oxidizing, photoetching and penetrating a ring, penetrating and diffusing, diffusing a short base region, and photoetching a
cathode. The production technology is characterized in that the step of evaporating aluminum and
alloy and retaining an
alloy layer is added between the step of photoetching and penetrating the ring and the step of penetrating and diffusing. The production technology has the advantages that 1, as the
diffusion rate of the aluminum in the
silicon is far greater than that of the
boron in the
silicon, the production technology takes the aluminum as the penetrating and diffusing
impurity source, so that the penetrating and diffusing time of the 4-inch silicon
wafer (250-260um) is less than 180h; 2, as the
impurity concentration of the aluminum
diffusion is lower, the production technology further can effectively improve the backward
voltage; and 3, as the transverse
diffusion distance is 65-70% and the normal
boron diffusion is 80%, the diffusion method can effectively improve the effective use ratio of the area of the
chip and reduce the area of the
chip.