The invention provides a preparation method of a
niobium alloy target material. The preparation method comprises the steps: firstly, carrying out hot
extrusion of a
niobium alloy tube blank, then carrying out inner hole
processing of the
niobium alloy tube blank after hot
extrusion, and thus obtaining the
niobium alloy target material. In the preparation process of the
niobium alloy target material, firstly, the surface of the
niobium alloy tube blank is coated with a glass
powder; because the surface of the niobium alloy tube blank is spray-coated with the glass
powder, the niobium alloy tube blank is allowed to have relatively good
lubrication effect in the hot
extrusion process, and thus the surface quality of the niobium alloy tube blank is relatively good; the subsequent hot extrusion
processing and heat treatment are conducive to refinement and homogenization of
crystal grains of the niobium alloy tube blank; and finally, the niobium alloy tube blank after hot extrusion is subjected to mechanical
processing, and an inner hole of the niobium alloy tube blank is bored and milled by selected special tools, so that
chip breaking can be allowed to be continuously discharged from the inner hole, the problem that
chip breaking is accumulated in the inner hole to affect processing of the inner hole surface is avoided, and thus the niobium alloy target material with uniform and fine internal
crystal grains and relatively low
surface roughness value is obtained. The invention also provides the niobium alloy target material.