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255 results about "Copper thin film" patented technology

Abstract Copper thin film was deposited on commercial pure aluminium substrate using electron beam deposition route. (SEM), Atomic Force Microscopy (AFM), and Transmission Electron Microscopy (TEM). showed that the coating is made up of crystallites of 15-20 nm size. and found that roughness value was 4.106 nm (Ra value).

Method for preparing graphite alkyne film

The invention discloses a method for preparing a graphite alkyne film. The method comprises that: a copper sheet or any one substrate the surface of which is covered with a copper film layer is used as a substrate; 6-alkynyl-benzene is subjected to coupling reaction in a solvent under the catalytic action of the copper to obtain the graphite alkyne film on the surface of the substrate. The method for preparing the graphite alkyne film, which is provided by the invention, has simple and convenient process, and can carry out large-scale preparation of the graphite alkyne film on the surface of the copper sheet or the substrate any surface of which is covered with the copper. The electrical conductivity of the graphite alkyne film is 2.516*10-4S / m. The film has uniform surface, can exist stably in the air, is a semiconductor with similar performances with silicon, and has potential application prospect in the fields of catalysis, electron, semiconductor, energy, material and the like.
Owner:INST OF CHEM CHINESE ACAD OF SCI

Semiconductor wafer cleaning agent and cleaning method

A semiconductor surface cleaning agent containing a compound the molecule of which has a nitrogen atom having an unshared electron pair and used for cleaning the surface of a semiconductor on which copper wiring is provided, and a method for cleaning the surface of a semiconductor characterized by treating the surface of a semiconductor on which copper wiring is provided with such a cleaning agent. The cleaning agent does not corrode the copper wiring (copper thin film) on the semiconductor and SiO2 of the interlayer insulating film, does not impair the flatness of the surface, and is effective in removing CuO and particles adhering to the surface of the Cu-CMP step.
Owner:FUJIFILM ELECTRONICS MATERIALS US

Resin composition and semiconductor mounting substrate obtained by molding same

A resin composition which contains at least constituent elements (A)-(E) described below and wherein the epoxy resin (A) contains 80-100% by mass of a bifunctional epoxy resin and component (D) is contained in an amount of 60-85% by mass relative to 100% by mass of the total mass of the resin composition. This resin composition does not substantially contain a solvent and is in a liquid state at room temperature. (A) an epoxy rein (B) an amine-based curing agent (C) an accelerator that has at least one functional group selected from among a dimethylureide group, an imidazole group and a tertiary amino group (D) silica particles (E) a silane coupling agent Provided is a resin composition which has excellent curability at low temperatures and a sufficiently low linear expansion coefficient after curing. This resin composition does not suffer from warping in cases where applied to a copper thin film and molded, and does not suffer from separation or cracks even if a substrate obtained therefrom is bent. Also provided is a semiconductor mounting substrate which is obtained by molding the resin composition.
Owner:TORAY IND INC

Improved nano porous copper thin film and preparation method thereof

The invention discloses an improved nano porous copper thin film. The surface of nano porous copper is modified by a single layer of graphene. The invention further provides a preparation method of the improved nano porous copper thin film. The preparation method comprises the following steps: placing a target material of manganese and a target material of copper manganese alloy at a target position in the cavity of a magnetic-control sputtering film-preparing instrument; fixing a monocrystalline silicon wafer to a tray right above the target position, vacuumizing, setting sputtering conditions, and opening the target material of pure manganese to start sputtering, so as to prepare a pure-manganese thin film on the silicon wafer; opening the target material of the copper manganese alloy to start sputtering, and forming a layer of copper manganese alloy thin film on the pure-manganese thin film; corroding the copper manganese alloy thin film so as to obtain the nano porous copper thin film; steeping and washing the prepared nano porous copper thin film so as to remove hydrochloric acid residual liquid on the surface; placing the clean nano porous copper thin film in graphene gel for soaking; removing the graphene gel floating on the surface so as to obtain the nano porous copper thin film compounded with the graphene. The nano porous copper thin film disclosed by the invention has the electrochemical cycling properties of high specific capacity and stability.
Owner:UNIV OF SHANGHAI FOR SCI & TECH

Broadband perfect absorber based on metallic film-core shell plasma structure

The invention provides a broadband perfect absorber based on a metallic film-core shell plasma structure. The broadband perfect absorber comprises a substrate, the broadband perfect absorber is of a multi-layered structure arranged on the substrate, a metallic film layer and a core shell nano-particle film layer are sequentially arranged from the substrate up, the core shell nano-particle film layer is composed of core shell particles with local surface plasma resonance characteristics, and the core shell particles are constituted by taking precious metals as cores and semiconductors as shells. The invention further provides a preparation method of the broadband perfect absorber. The broadband perfect absorber is simple in structure and optional in substrate, the metallic film can be a gold thin film, a silver thin film, a copper thin film and the like, liquid-liquid interface is used for self-assembling into a film, the operation is convenient, the area is controllable, the broadbandperfect absorber is suitable for a plurality of compounds of the precious metals and the semiconductors, and the manufacturing cost is low.
Owner:THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA

Apparatus and method for depositing superior Ta(N)/copper thin films for barrier and seed applications in semiconductor processing

A method of depositing thin films comprising tantalum, tantalum nitride, and copper for barrier films and seed layers within high aspect ratio openings used for copper interconnects. The barrier films and seed layers are deposited at extremely low temperature conditions wherein the wafer stage temperature of the sputter source is chilled to about -70° C. to about 0° C. Most preferably, the present invention is practiced using a hollow cathode magnetron. The resulting tantalum and / or tantalum nitride barrier films and copper seed layers are superior in surface smoothness, grain size and uniformity such that subsequent filling of the high aspect ratio opening is substantially void-free.
Owner:NOVELLUS SYSTEMS

Preparation method of copper/graphene composite material

The invention provides a preparation method of a copper / graphene composite material. The preparation method comprises the steps: firstly, preparing a graphene thin film on a rolled copper foil after cleaning and polishing by a chemical vapor deposition method, plating a SiO2 / Si sheet with a layer of copper film with the thickness of 400-700 nm by a magnetron sputtering coater, and preparing a copper film / SiO2 / Si sample; then, transferring the graphene thin film prepared by the chemical vapor deposition method to the surface of the copper film / SiO2 / Si sample by a corrosion substrate method, toprepare a graphene / copper film / SiO2 / Si sample; secondly, carrying out magnetron sputtering of the surface of the graphene thin film / copper film / SiO2 / Si sample with a layer of copper film with the thickness of 450-550 nm, to obtain a copper film / graphene / copper film / SiO2 / Si sample; finally, transferring the graphene thin film prepared by the chemical vapor deposition method to the surface of the composite material; and preparing and transferring graphene and sputtering copper thin films repeatedly, and finally obtaining the nanosandwich composite material with four layers of copper films and three layers of graphene thin films. The preparation method is simple, convenient to operate and low in cost, and has good application prospect.
Owner:UNIV OF SHANGHAI FOR SCI & TECH

Cuprous oxide solar battery with surface self-texture structure and manufacturing method thereof

The invention relates to the technical field of solar batteries, in particular to a cuprous oxide thin film solar battery with a surface self-texture structure; a layer of n-type cuprous oxide thin film is deposited on electrically conductive glass; a layer of p-type cuprous oxide thin film with the shape of a pyramid is deposited on the n-type cuprous oxide thin film; and electrodes are arrangedon the electrically conductive glass and the p-type cuprous oxide thin film. A manufacturing method comprises the following step: when the pH value of the electrolyte is 4-5 and the voltage is from minus 0.01V to 0.1V, the n-type cuprous oxide thin film is deposited on the electrically conductive glass; when the pH value of the electrolyte is 11-12 and the voltage is from minus 0.1 V to minus 0.3V, the p-type cuprous oxide thin film is deposited on the n-type cuprous oxide thin film; and the electrodes are manufactured on the electrically conductive glass and the p-type cuprous oxide thin film. The solar battery of the invention can supply stable constant current output and has higher photoelectricity conversion efficiency; and by adopting the manufacturing method, the rapid low-cost pollution-free mass production of the cuprous oxide solar battery is realized.
Owner:刘畅

Organic solar battery and preparation method thereof

The invention relates to an organic solar battery and a preparation method thereof, taking CuS as a hole transport layer. The organic solar battery comprises a transparent conductive substrate, a CuS hole transport layer, an organic active layer, an electron transport layer and metal electrodes. The CuS hole transport layer is a thin film formed in a way that a copper thin film is obtained through magnetron sputtering, and then the copper thin film and powdered sulfur are subjected to in-situ hydrothermal growth. The CuS prepared by the magnetron sputtering and a hydrothermal reaction method is used as the hole transport layer of the organic solar battery, and compared with the energy conversion efficiency of an organic inorganic hybridized solar battery without the CuS hole transport layer, the energy conversion efficiency of the organic solar battery with the CuS hole transport layer is generally improved. Compared with a PEDOT:PSS (poly-ethylenedioxythiophene : p-styrene sulfonate) hole transport layer, the CuS avoids the erosion effect on the conductive substrate, and the stability is enhanced. The organic battery photovoltaic feature, taking the CuS as the hole transport layer, can be on a par with the battery property, taking MoO3 as the hole transport layer, and further, the organic solar battery is lower in cost and is more practical.
Owner:WUHAN UNIV

Semiconductor device, liquid crystal display device having semiconductor device, and method for producing semiconductor device

Disclosed is an electrode film which does not exfoliate from, or diffuse into, an oxide semiconductor or an oxide thin film. An electrode layer comprises a highly adhesive barrier film being a Cu—Mg—Al thin film and a copper thin film; and an oxide semiconductor and an oxide thin film contact with the highly adhesive barrier film. With the highly adhesive barrier film having magnesium in a range of at least 0.5 at % but at most 5 at % and aluminum at least 5 at % but at most 15 at % when the total number of atoms of copper, magnesium, and aluminum is 100 at %, the highly adhesive barrier film has both adhesion and barrier properties. The electrode layer is suitable because a source electrode layer and a drain electrode layer contact the oxide semiconductor layer. A stopper layer having an oxide may be provided on a layer under the electrode layer.
Owner:ULVAC INC
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