The invention relates to the technical field of
laser self-mixing and sensing. An existing
laser self-mixing vibration, displacement and speed
sensing system cannot easily realize high-precision and high-detection-sensitivity sensing measurement, the structure cannot be really miniaturized, and the
system cannot be integrated with a
chip of a modern communication
system very well, and large-scale integrated development and application cannot be realized. Aiming at the problems, the invention provides a micro-chamber
chip type
laser self-mixing vibration, displacement and speed sensing method and
system. Based on a laser self-mixing interference measurement principle, the method realizes high-precision and high-sensitivity sensing measurement by constructing a laser self-mixing and
sensing system through utilizing an optical micro-chamber; meanwhile, the system has the
advantage of
miniaturization so that the system is relatively suitable for large-scale
chip manufacturing and
machining, and is relatively suitable for field measurement under a narrow shield and a complicated environment; and the system can be sufficiently combined with a commercial system in present
optical fiber communication, and sensing and
data processing in a long range and a special application field can be efficiently realized at low cost.