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2630results about "Laser using scattering effects" patented technology

Ultraviolet laser apparatus and exposure apparatus using same

An ultraviolet laser apparatus having a single-wavelength oscillating laser generating laser light between an infrared band and a visible band, an optical amplifier for amplifying the laser light, and a wavelength converting portion converting the amplified laser light into ultraviolet light using a non-linear optical crystal. An exposure apparatus transfers a pattern image of a mask onto a substrate and includes a light source having a laser apparatus emitting laser light having a single wavelength, a first fiber optical amplifier for amplifying the laser light, a light dividing device for dividing or branching the amplified laser light into plural lights, and second fiber optical amplifiers for amplifying the plural divided or branched lights, respectively, and a transmission optical system for transmitting the laser light emitted from the light source to the exposure apparatus.
Owner:NIKON CORP

Modular, high energy, widely-tunable ultrafast fiber source

A modular, compact and widely tunable laser system for the efficient generation of high peak and high average power ultrashort pulses. Modularity is ensured by the implementation of interchangeable amplifier components. System compactness is ensured by employing efficient fiber amplifiers, directly or indirectly pumped by diode lasers. Peak power handling capability of the fiber amplifiers is expanded by using optimized pulse shapes, as well as dispersively broadened pulses. After amplification, the dispersively stretched pulses can be re-compressed to nearly their bandwidth limit by the implementation of another set of dispersive delay lines. To ensure a wide tunability of the whole system, Raman-shifting of the compact sources of the ultrashort pulses in conjunction with frequency-conversion in nonlinear optical crystals can be implemented, or an Anti-Stokes fiber in conjunction with fiber amplifiers and Raman-shifters are used.
Owner:IMRA AMERICA

Apparatus and method for the generation of high-power femtosecond pulses from a fiber amplifier

An apparatus generates femtosecond pulses from laser amplifiers by nonlinear frequency conversion. The implementation of nonlinear frequency-conversion allows the design of highly nonlinear amplifiers at a signal wavelength (SW), while still preserving a high-quality pulse at an approximately frequency-doubled wavelength (FDW). Nonlinear frequency-conversion also allows for limited wavelength tuning of the FDW. As an example, the output from a nonlinear fiber amplifier is frequency-converted. By controlling the polarization state in the nonlinear fiber amplifier and by operating in the soliton-supporting dispersion regime of the host glass, an efficient nonlinear pulse compression for the SW is obtained. The generated pulse width is optimized by utilizing soliton compression in the presence of the Raman-self-frequency shift in the nonlinear fiber amplifier at the SW. High-power pulses are obtained by employing fiber amplifiers with large core-diameters. The efficiency of the nonlinear fiber amplifier is optimized by using a double clad fiber (i.e., a fiber with a double-step refractive index profile) and by pumping light directly into the inner core of this fiber. Periodically poled LiNbO3 (PPLN) is used for efficient conversion of the SW to a FDW. The quality of the pulses at the FDW can further be improved by nonlinear frequency conversion of the compressed and Raman-shifted signal pulses at the SW. The use of Raman-shifting further increases the tuning range at the FDW. For applications in confocal microscopy, a special linear fiber amplifier is used.
Owner:IMRA AMERICA

Systems and methods for reducing the influence of plasma-generated debris on the internal components of an EUV light source

Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a temperature sufficient to remove deposited debris from the mirror. In another aspect, a device is disclosed for removing plasma generated debris from an EUV light source collector mirror having a different debris deposition rate at different zones on the collector mirror. In a particular aspect, an EUV collector mirror system may comprise a source of hydrogen to combine with Li debris to create LiH on a collector surface; and a sputtering system to sputter LiH from the collector surface. In another aspect, an apparatus for etching debris from a surface of a EUV light source collector mirror with a controlled plasma etch rate is disclosed.
Owner:ASML NETHERLANDS BV

LED multiplexer and recycler and micro-projector incorporating the Same

A micro-projector comprises an LED layer, a light pipe coupled to the LED, a LCOS panel, a projection lens, a PBS, an aperture layer coupled to the output end of the light pipe which has a transmissive opening for transmitting a portion of the light output and a reflective surface for reflecting the remaining portion of the light output toward the input end of the light pipe. Thus, the remaining portion of the light output is recycled back to the LED to increase the brightness of the light output of the LED. The micro-projector also comprises a reflective polarizer disposed between the light pipe and the aperture layer for transmitting the light output of a predetermined polarization and reflecting other polarization of the light output, thereby recycling unused polarization of the light output back to the LED to increase the brightness of the light output of the LED.
Owner:WAVIEN

System and method for driving semiconductor laser sources for displays

A light engine includes a multi-color laser source having a set of semiconductor lasers. A controller synchronizes the operation of the laser source to operate in a color sequential order with a spatial modulator.
Owner:ARASOR ACQUISITION +1

Method and apparatus for delivering high power laser energy over long distances

ActiveUS20100044106A1Suppressing nonlinear scattering phenomenonIncrease the lengthDrill bitsLaser using scattering effectsHigh power lasersOptoelectronics
There is provided a system, apparatus and methods for the laser drilling of a borehole in the earth. There is further provided with in the systems a means for delivering high power laser energy down a deep borehole, while maintaining the high power to advance such boreholes deep into the earth and at highly efficient advancement rates.
Owner:FORO ENERGY

High precision GPS/RTK and laser machine control

The integrated laser and satellite positional system receiver is disclosed. The integrated laser and satellite positioning system receiver can provide a plurality of mobile units with a laser plane data determined with a millimeter relative accuracy. The integrated laser and differential satellite positioning system receiver can also generate and transmit the differential correctional data to a plurality of mobile units. Each mobile unit equipped with a mobile satellite positioning system receiver can use the differential correction data and the high precision laser plane data to improve its position determination capabilities.
Owner:TRIMBLE NAVIGATION LTD

System and Method for Single Optical Axis Multi-Detector Microscope Slide Scanner

Systems and methods for microscope slide scanning using multiple sensor arrays that receive imagery data from a single optical axis are provided. A single, high quality, easily obtained microscope objective lens is used to project an image onto two or more sensor arrays. The sensor arrays can be linear or two dimensional and imaging takes place along a single optical axis. Simultaneous sensor acquisition and parallel data processing reduce the image acquisition time by a factor of N, where N represents the number of sensors employed.
Owner:LEICA BIOSYST IMAGING

Laser irradiation method, laser irradiation apparatus, and semiconductor device

An object of the present invention is obtaining a semiconductor film with uniform characteristics by improving irradiation variations of the semiconductor film. The irradiation variations are generated due to scanning while irradiating with a linear laser beam of the pulse emission. At a laser crystallization step of irradiating a semiconductor film with a laser light, a continuous light emission excimer laser emission device is used as a laser light source. For example, in a method of fabricating an active matrix type liquid crystal display device, a continuous light emission excimer laser beam is irradiated to a semiconductor film, which is processed to be a linear shape, while scanning in a vertical direction to the linear direction. Therefore, more uniform crystallization can be performed because irradiation marks can be avoided by a conventional pulse laser.
Owner:SEMICON ENERGY LAB CO LTD

High power short pulse fiber laser

A pulsed laser comprises an oscillator and amplifier. An attenuator and / or pre-compressor may be disposed between the oscillator and amplifier to improve performance and possibly the quality of pulses output from the laser. Such pre-compression may be implemented with spectral filters and / or dispersive elements between the oscillator and amplifier. The pulsed laser may have a modular design comprising modular devices that may have Telcordia-graded quality and reliability. Fiber pigtails extending from the device modules can be spliced together to form laser system. In one embodiment, a laser system operating at approximately 1050 nm comprises an oscillator having a spectral bandwidth of approximately 19 nm. This oscillator signal can be manipulated to generate a pulse having a width below approximately 90 fs.
Owner:IMRA AMERICA

Line-projection apparatus for arrays of diode-laser bar stacks

In optical apparatus for illuminating a mask-plane with a line of light, a light source includes four fast-axis stacks of laser diode bars. One optical arrangement collects light beams from all of the diode-laser bar stacks, homogenizes and expands the beams in the fast-axis direction of the diode-laser bar stacks and partially overlaps the homogenized and expanded beams in the fast-axis direction. Another optical arrangement homogenizes the sum of the partially overlapped beams and images the sum of the beams as a line of light having a length in the fast-axis-direction and a width in the slow-axis direction.
Owner:COHERENT INC

Method and device for creating supercontinuum light pulses

A method of spectrally broadening light pulses includes the steps of providing the light pulses with a laser source, said light pulses having a pulse duration below 1 ps, in-coupling the light pulses into a hollow optical waveguide device, and spectrally broadening the light pulses propagating along the pulse guiding medium by subjecting them to a Raman nonlinearity via excitation of a Raman polarization having a first Raman period, wherein the optical waveguide device subjects the light pulses to anomalous group velocity dispersion which combines with the spectral broadening of the light pulses to result in a Raman-enhanced self-compression of the light pulses, and the light pulses further propagate along the optical waveguide device such that the Raman-enhanced self compression results in a further excitation of a Raman polarization having a second Raman period which is faster than the first Raman period.
Owner:MAX PLANCK GESELLSCHAFT ZUR FOERDERUNG DER WISSENSCHAFTEN EV

Modular fiber-based chirped pulse amplification system

A modular ultrafast pulse laser system is constructed of individually pre-tested components manufactured as modules. The individual modules include an oscillator, pre-amplifier and power amplifier stages, a non-linear amplifier, and a stretcher and compressor. The individual modules can typically be connected by means of simple fiber splices.
Owner:IMRA AMERICA

Fiber laser

A fiber laser with a fiber for laser light generation having an entrance end and an exit end comprises a pump light source for generating pump light to be coupled via the entrance side into the fiber. At the exit end of the fiber a first resonator mirror is provided which is highly reflecting for the laser light to be generated in the wavelength range with the smallest light amplification and to the light of the pump light source. Spaced from the first resonator mirror a second resonator mirror is provided via which light of further wavelength ranges can be fed back into the fiber with the aid of a collimating lens.
Owner:EVOTEC TECH GMBH

Tunable fiber laser light source

An optical fiber loop has a gain medium having a gain at an oscillation wavelength and optical circulators 13 and 14. Collimate lenses 22 and 24 enlarge light bean taken from the optical circulators 13 and 14. A polygon mirror 25 is provided on the light axis, and is rotated. A diffraction grating 27 is provided at the receiving position of the light reflected by the polygon mirror 25, and is of a Littrow configuration which reflects the light in the same direction as the incident light. A selected wavelength changes according to an incident angle to the diffraction grating 27, resulting in increase of selectivity owing to twice incident, thereby permitting to change an oscillation wavelength with narrow band even when changing the selected wavelength by rotating the polygon mirror 25 at high speed.
Owner:SANTEC

Laser source comprising amplifier and adaptive wavefront/polarization driver

A hybrid laser source including a solid state laser driven by an array of fiber laser amplifiers, the inputs of which are controllable in phase and polarization, to compensate for distortions that arise in the solid state laser, or to achieve desired output beam properties relating to direction or focus. The output beam is sampled and compared with a reference beam to obtain phase and polarization difference signals across the output beam cross section, at spatial positions corresponding with the positions of the fiber laser amplifiers providing input to the solid state laser. Therefore, phase and polarization properties of the output beam may be independently controlled by predistortion of these properties in the fiber laser amplifier inputs.
Owner:NORTHROP GRUMMAN SYST CORP

Method and apparatus for controlling and protecting pulsed high power fiber amplifier systems

An electronic circuit for controlling a laser system consisting of a pulse source and high power fiber amplifier is disclosed. The circuit is used to control the gain of the high power fiber amplifier system so that the amplified output pulses have predetermined pulse energy as the pulse width and repetition rate of the oscillator are varied. This includes keeping the pulse energy constant when the pulse train is turned on. The circuitry is also used to control the temperature of the high power fiber amplifier pump diode such that the wavelength of the pump diode is held at the optimum absorption wavelength of the fiber amplifier as the diode current is varied. The circuitry also provides a means of protecting the high power fiber amplifier from damage due to a loss of signal from the pulse source or from a pulse-source signal of insufficient injection energy.
Owner:IMRA AMERICA

Modular, high energy, widely-tunable ultrafast fiber source

A modular, compact and widely tunable laser system for the efficient generation of high peak and high average power ultrashort pulses. Modularity is ensured by the implementation of interchangeable amplifier components. System compactness is ensured by employing efficient fiber amplifiers, directly or indirectly pumped by diode lasers. Peak power handling capability of the fiber amplifiers is expanded by using optimized pulse shapes, as well as dispersively broadened pulses. Dispersive broadening is introduced by dispersive pulse stretching in the presence of self-phase modulation and gain, resulting in the formation of high-power parabolic pulses. In addition, dispersive broadening is also introduced by simple fiber delay lines or chirped fiber gratings, resulting in a further increase of the energy handling ability of the fiber amplifiers. The phase of the pulses in the dispersive delay line is controlled to quartic order by the use of fibers with varying amounts of waveguide dispersion or by controlling the chirp of the fiber gratings. After amplification, the dispersively stretched pulses can be re-compressed to nearly their bandwidth limit by the implementation of another set of dispersive delay lines. To ensure a wide tunability of the whole system, Raman-shifting of the compact sources of ultrashort pulses in conjunction with frequency-conversion in nonlinear optical crystals can be implemented, or an Anti-Stokes fiber in conjunction with fiber amplifiers and Raman-shifters are used. A particularly compact implementation of the whole system uses fiber oscillators in conjunction with fiber amplifiers. Additionally, long, distributed, positive dispersion optical amplifiers are used to improve transmission characteristics of an optical communication system. Finally, an optical communication system utilizes a Raman amplifier fiber pumped by a train of Raman-shifted, wavelength-tunable pump pulses, to thereby amplify an optical signal which counterpropogates within the Raman amplifier fiber with respect to the pump pulses.
Owner:IMRA AMERICA

Optical Coupler Devices, Methods of Their Production and Use

The present invention relates in general to coupling of light from one or more input waveguides to an output waveguide or output section of a waveguide having other physical dimensions and / or optical properties than the input waveguide or waveguides. The invention relates to an optical component in the form of a photonic crystal fibre for coupling light from one component / system with a given numerical aperture to another component / system with another numerical aperture. The invention further relates to methods of producing the optical component, and articles comprising the optical component, and to the use of the optical component. The invention further relates to an optical component comprising a bundle of input fibres that are tapered and fused together to form an input coupler e.g. for coupling light from several light sources into a single waveguide. The invention still further relates to the control of the spatial extension of a guided mode (e.g. a mode-field diameter) of an optical beam in an optical fibre. The invention relates to a tapered longitudinally extending optical waveguide having a relatively larger cross section that over a certain longitudinal distance is tapered down to a relatively smaller cross section wherein the spatial extent of the guided mode is substantially constant or expanding from the relatively larger to the relatively smaller waveguide cross section. The invention may e.g. be useful in applications such as fibre lasers or amplifiers, where light must be coupled efficiently from pump sources to a double clad fibre.
Owner:CRYSTAL FIBRE AS

Laser based material processing methods and scalable architecture for material processing

Methods and systems for laser-based processing of materials are disclosed wherein a scalable laser architecture, based on planar waveguide technology, provides for pulsed laser micromachining applications while supporting higher average power applications like laser welding and cutting. Various embodiments relate to improvements in planar waveguide technology which provide for stable operation at high powers with a reduction in spurious outputs and thermal effects. At least one embodiment provides for micromachining with pulsewidths in the range of femtoseconds to nanoseconds. In another embodiment, 100W or greater average output power operation is provided for with a diode-pumped, planar waveguide architecture.
Owner:THE GSI GRP LLC

Modular, high energy, widely-tunable ultrafast fiber source

A modular, compact and widely tunable laser system for the efficient generation of high peak and high average power ultrashort pulses. Modularity is ensured by the implementation of interchangeable amplifier components. System compactness is ensured by employing efficient fiber amplifiers, directly or indirectly pumped by diode lasers. Peak power handling capability of the fiber amplifiers is expanded by using optimized pulse shapes, as well as dispersively broadened pulses. Dispersive broadening is introduced by dispersive pulse stretching in the presence of self-phase modulation and gain, resulting in the formation of high-power parabolic pulses. In addition, dispersive broadening is also introduced by simple fiber delay lines or chirped fiber gratings, resulting in a further increase of the energy handling ability of the fiber amplifiers. The phase of the pulses in the dispersive delay line is controlled to quartic order by the use of fibers with varying amounts of waveguide dispersion or by controlling the chirp of the fiber gratings. After amplification, the dispersively stretched pulses can be re-compressed to nearly their bandwidth limit by the implementation of another set of dispersive delay lines. To ensure a wide tunability of the whole system, Raman-shifting of the compact sources of ultrashort pulses in conjunction with frequency-conversion in nonlinear optical crystals can be implemented, or an Anti-Stokes fiber in conjunction with fiber amplifiers and Raman-shifters are used. A particularly compact implementation of the whole system uses fiber oscillators in conjunction with fiber amplifiers. Additionally, long, distributed, positive dispersion optical amplifiers are used to improve transmission characteristics of an optical communication system. Finally, an optical communication system utilizes a Raman amplifier fiber pumped by a train of Raman-shifted, wavelength-tunable pump pulses, to thereby amplify an optical signal which counterpropogates within the Raman amplifier fiber with respect to the pump pulses.
Owner:IMRA AMERICA

Pulsed light sources

A source of pulses of coherent radiation at a wavelength of approximately 1 μm, comprises a pump source for producing pump light, a laser cavity comprising an Yb3+-doped gain medium arranged to receive the pump light, the laser cavity being modelocked to generate laser pulses at a defined repetition rate; a pulse detector arranged to generate a pulse selection signal indicative of the repetition rate; a pulse selector arranged to reduce the repetition rate of the laser pulses responsive to the pulse selection signal from the pulse detector by passing only selected ones of the laser pulses; and at least one optical amplifier for amplifying the laser pulses of reduced repetition rate. The at least one optical amplifier can be configured for chirped or parabolic pulse amplification.
Owner:UNIV OF SOUTHAMPTON

Large-mode-area optical fibers with reduced bend distortion

In a LMA optical fiber the index of the core region is graded (i.e., as viewed in a radial cross-section) and has a grading depth of Δng, as measured from a central maximum at or near the axis to a lower level that is not greater than the central maximum and not less than the index of the cladding region. When the fiber is to be bent at a bend radius, the grading depth, the radius of the core region, and the difference between the central maximum index and the cladding region index are configured to reduce bend distortion. They may also advantageously be configured to maximize the effective mode-field area of the fundamental mode, suppress higher order modes, and reduce bend loss. In a preferred embodiment, the core region includes a centralized gain region, which in turn includes a dark region that is no more than 30% of the area of the gain region. Also described is a method of making such LMA fibers.
Owner:FURAKAWA ELECTRIC NORTH AMERICA INC

Color laser display apparatus having fluorescent screen scanned with modulated ultraviolet laser light

A color laser display apparatus which contains a laser light source which emits ultraviolet laser light, a modulation unit which modulates the ultraviolet laser light, a display unit which includes a fluorescent screen, and a scanning unit which two-dimensionally scans the fluorescent screen with the ultraviolet laser light. The fluorescent screen includes, for each pixel, red fluorescent material which emits red light in response to the ultraviolet laser light, green fluorescent material which emits green light in response to the ultraviolet laser light, and blue fluorescent material which emits blue light in response to the ultraviolet laser light. The laser light source may be, for example, a semiconductor laser or a fiber laser.
Owner:FUJIFILM CORP +1
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