266results about How to "Prevented from reaching" patented technology

Systems and methods are disclosed for reducing the influence of plasma generated debris on internal components of an EUV light source. In one aspect, an EUV meteorology monitor is provided which may have a heater to heat an internal multi-layer filtering mirror to a temperature sufficient to remove deposited debris from the mirror. In another aspect, a device is disclosed for removing plasma generated debris from an EUV light source collector mirror having a different debris deposition rate at different zones on the collector mirror. In a particular aspect, an EUV collector mirror system may comprise a source of hydrogen to combine with Li debris to create LiH on a collector surface; and a sputtering system to sputter LiH from the collector surface. In another aspect, an apparatus for etching debris from a surface of a EUV light source collector mirror with a controlled plasma etch rate is disclosed.

A front end structure of a vehicle surrounding heat exchangers with ducts to thereby improve the heat exchangers in cooling ability, that is, a front end structure of a vehicle provided with heat exchangers positioned in an engine compartment in which an engine is mounted and exchanging heat between air and a heat medium, wherein the heat exchangers are surrounded by duct members sticking out to the vehicle front side, preventing hot air in the engine compartment from reaching the front end sides of the heat exchangers, and guiding air present at the vehicle front side to the heat exchangers and wherein among the duct members, a bottom duct positioned at the vehicle bottom side is formed with first through holes running through the vehicle in the up-down direction.

A plate heat exchanger includes a heat exchanger plate having a heat transfer area and an edge area, extending around the heat transfer area. The heat exchanger plate is a double wall plate formed by two adjoining plates compressed to be in contact with each other. A sensor configured to sense at least one parameter and to produce a signal depending on the parameter includes a sensor probe that is provided between the adjoining plates.

A liquid vapor separator for a vehicle's fuel system, said liquid vapor separator comprising a body having an inlet connectable with a venting system of a fuel tank and a vapor outlet connectable to a fuel vapor treating device, and a condensation space for condensation of fuel droplets, said space being in flow communication with said inlet and with said outlet, and said condensation space extending at or being in flow communication with a filler neck of the fuel system.

A robotic mower housing includes a one piece molded bottom chassis having an inner wall and an outer wall. A top cover is removably attached to and covers the bottom chassis. An outer seal is provided between the outer wall of the bottom chassis and the top cover, and an inner seal between the inner wall of the bottom chassis and the top cover. The vehicle control unit and other electronic components may be located in the inner cavity inside the inner seal and an outer cavity between the outer seal and the inner seal.

A case for covering electronic parts and efficiently discharging heat generated from the electronic parts and a display apparatus including the case are provided. The case includes at least one partition wall partially separating at least an inner space of the case. An entry portion, through which air flows in, and an exit portion, through which the air having flowed in through the entry portion and then having absorbed heat from the electronic parts flows out, are formed in each plane of the case. Each plane is separated by the partition wall.

The present invention provides a wafer carrier that includes a plurality of concentric sealing members that provide a seal, with the outer seal independently movable to allow cleaning of a peripheral backside of the wafer to occur while the wafer is still attached to the wafer carrier, and a plurality of vacuum openings that a re disposed only adjacent to an inner side of the inner seal at a location corresponding to the backside periphery of the wafer.

A front end structure of a vehicle surrounding heat exchangers with ducts to thereby improve the heat exchangers in cooling ability, that is, a front end structure of a vehicle provided with heat exchangers positioned in an engine compartment in which an engine is mounted and exchanging heat between air and a heat medium, wherein the heat exchangers are surrounded by duct members sticking out to the vehicle front side, preventing hot air in the engine compartment from reaching the front end sides of the heat exchangers, and guiding air present at the vehicle front side to the heat exchangers and wherein among the duct members, a bottom duct positioned at the vehicle bottom side is formed with first through holes running through the vehicle in the up-down direction.

The disclosure relates to a light out-coupling arrangement for a touch sensitive system comprising a light guide of a material with a refractive index ng and a top surface configured to be exposed to ambient light, and a bottom surface. The out-coupling arrangement comprises at least one detector arranged along the periphery of the light guide and configured to receive the light propagating in the light guide and an optical filter provided between the light guide and the at least one detector. The optical filter has a first side and a second side where the first side is arranged to face the at least one detector, and the second side is arranged to receive light from the light guide. The optical filter is made of a medium with a refractive index nf less than the refractive index ng of the light guide, such that ambient light incident onto the second side at an angle larger than a critical angle θc from a normal of the second side will be reflected on the optical filter by total internal reflection and will not reach the at least one detector. The disclosure also relates to a touch sensitive system comprising a light out-coupling arrangement.

A vehicle seat has seating components, such as a seat piece (20), a backrest (22) and a leg-rest (24), which are adjustable as to their positions, particularly in their relative inclination, by at least one operating device (26, 44). A monitoring device monitors all the boundary geometries (50, 52) of the moving seat components which may cause collisions and which have given spatial constraints (54). The monitoring device controls the operating devices (26, 44) at all points to guarantee a collision-free movement of all seat components within the spatial constraints. The vehicle seat considered as a total system can undergo adjustment processes without a damaging collision occurring.

A convertible piece of upholstered furniture can be converted via motorized conversion aids from a seat function into a bed, by way of any desired number of intermediate stages, and vice versa. All movable parts can be fully stressed by a person during conversion, even when a person is sitting or lying on the piece of furniture. These changes can take place even when the piece is being used by a person, whereby each movable part of the piece of upholstered furniture can be changed by means of a motor drive having a control. The footrest and the seat part are configured so that they can move out of a base frame with their metal fittings. A lever construction arranged on the metal fitting of the footrest and a motor drive adjusts the height and angle of the footrest and moves the piece of furniture to the various positions.