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54results about How to "Reduce vacancy" patented technology

Method for preparing prussian blue material through composite reduction of graphene oxide, and application

The invention relates to a method for preparing a prussian blue material through reduction of graphene oxide, and application. The preparation method comprises the steps of ultrasonically dispersing the graphene oxide into a sodium ferrocyanide water solution, adding ascorbic acid for resisting oxidation, adding sodium citrate for reducing a reaction rate, dropwise adding hydrochloric acid for adjusting the solution to be acidic, heating and stirring for reacting under the inert gas protection to obtain a material, washing, vacuum drying, and carrying out microwave irradiation for reducing thegraphene oxide to obtain the product. When the prussian blue material prepared through composite reduction of the graphene oxide provided by the invention is used as a sodium-ion battery anode, the specific capacity, the cycle performance and the rate capability of a battery are greatly improved, the charge and discharge specific capacity of the battery in an organic system reaches up to not lessthan 153mAh.g<-1>, and the specific capacity of the battery in a water system single platform reaches up to not less than 81mAh.g<-1>; the preparation method is low in cost, fast, simple, and favorable in application prospect.
Owner:HARBIN INST OF TECH SHENZHEN GRADUATE SCHOOL

Preparation method and application of in-situ carbon-compounded prussian blue type compound thin film

The invention discloses a preparation method and application of an in-situ carbon-compounded prussian blue type compound thin film. The preparation method comprises the following steps: (1) carrying out ultrasonic dispersion on carbon materials in a NaCl solution; (2) weighing transition metal cyano complexes, a reducing agent and inorganic acid in a ratio and adding into the solution; (3) electrolyzing for 3-5 minutes in water to clean the surface of an ITO conducting substrate; and (4) generating the in-situ carbon-compounded prussian blue type compound thin film on the ITO conducting substrate under a constant-voltage condition relative to voltage from -2.0V to 2.0V of a standard Ag / AgCl electrode. According to the preparation method and the application, the film is formed in one step, the preparation method is rapid and simple and low in cost and the electrical conductivity of the obtained compound material is greatly improved; and the content of sodium is high, and vacancy and the water content are low. As a sodium-ion battery positive electrode material, the material has the characteristics of high specific capacity, high cycling stability, excellent rate performance and the like, and has a bright prospect in large-scale development and application of sodium-ion batteries.
Owner:ZHEJIANG UNIV

Method and system for monitoring semiconductor production line

A monitoring method on a semiconductor production line is provided, which comprises: obtaining state information of each semiconductor equipment on the production line; establishing an interlinkage between the state information of the each semiconductor equipment and the related information marking; obtaining the state information of the each semiconductor equipment through recognizing the information marking; the invention also provides a monitoring system on a semiconductor production line, which comprises: a data obtaining device for obtaining state information of each semiconductor equipment on the production line; a data processing device for generating information marking of the state information of the semiconductor equipment on the production line and establishing an interlinkage between the state information and the related information marking. The monitoring method and system on the production line in the invention can monitor the state information problem of each equipment on the whole production line.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Method for preparing epoxy novolac nanometer anticorrosive paint

The invention discloses a method for preparing epoxy novolac nanometer anticorrosive paint. The epoxy novolac nanometer anticorrosive paint is prepared from a first component and a second component, wherein the first component comprises, by mass, 8-10% of epoxy resin, 16-20% of phenolic resin, 15-20% of mixed solvent, 1-2% of nano-particles, 0.2-0.5% of coupling agent, 5-8% of zinc phosphate, 40-45% of filler and 1.5-3% of auxiliary, and the second component comprises, by mass, 45-55% of Versamine I-70 type curing agent, and 45-55% of mixed solvent. The first component and the second component are evenly mixed according to the mass ratio of 10:4-5 to prepare the epoxy novolac nanometer anticorrosive paint. By the adoption of the novel nano-modification components, intermolecular gaps and vacancy of paint coatings can be reduced, the paint coatings can be bonded more tightly, and the corrosion resistance of the paint coatings is effectively improved.
Owner:陈曦

On-campus shared facility management and application system based on narrow-band internet of things

The invention discloses an on-campus shared facility management and application system based on the narrow-band internet of things. The system comprises a server, client sides and a shared facility terminal. According to the system, various shared facilities in a campus are uniformly managed and controlled, users inside and outside the campus can conveniently check the application state of the facilities on the client sides such as small phones, advance reservation can be conducted, the trouble of queue-up for waiting and look-up is avoided, the time is shortened, and the efficiency of using the shared facilities is improved; experimental instruments in a laboratory are shared by the users outside the campus, non-occupation of the facilities such as the experimental instruments in the laboratory is reduced, and the application efficiency is improved. By adopting an eMTC and NB-IOT technology of a narrow-band internet-of-things technology, the area covering capacity is high, the cost islow, the power consumption is low, the safety is high, and information transmission and management of a large number of shared facilities are greatly achieved.
Owner:甘来

Interface type atomic memristor and preparation method thereof

The invention discloses an interface type atomic memristor and a preparation method thereof. The memristor structurally comprises a sandwich structure with a bottom electrode / dielectric layer / top electrode on a substrate and a protective layer at the topmost part, the bottom electrode is made of inert metal materials such as platinum, gold and palladium, and flexible conductive materials such as indium tin oxide, graphene and other semimetal type two-dimensional atomic crystal materials or semiconductor type two-dimensional atomic crystals. The top electrode is made of active metal materials such as silver, copper, titanium, tungsten and titanium nitride; the dielectric layer is composed of a two-dimensional atomic crystal material, and the surface of the two-dimensional atomic crystal material is subjected to oxidation treatment; the substrate comprises silicon oxide, silicon nitride, aluminum oxide, polyimide or polydimethylsiloxane. The memristor provided by the invention has the characteristics of large switching ratio, low switching voltage, stable resistance state and excellent cycle durability by utilizing the atomic-level interface effect of the specific two-dimensional atomic crystal surface oxide layer and the active metal top electrode and has a wide application prospect.
Owner:HUAZHONG UNIV OF SCI & TECH

Apparatus for vertical pulling growth of CdZnTe monocrystals, and method thereof

The invention discloses an apparatus for the vertical pulling growth of CdZnTe monocrystals, and a method thereof. The apparatus comprises a tubular furnace body, a quartz ampoule and a graphite boat, the furnace body comprises synthetic furnaces, buffer furnaces, inclined plane furnaces and Cd source furnaces, the quartz ampoule is arranged in the furnace body, the graphite boat is arranged in the quartz ampoule. The method for the vertical pulling growth of CdZnTe monocrystals through adopting the apparatus generally comprises the following steps: uniformly putting a high-purity Te raw material, a high-purity Zn raw material and a high-purity Cd raw material in the graphite boat according to synthetic proportions, putting a small amount of Cd at the bottom of the quartz ampoule, slowly putting the graphite boat on the baffle board of the quartz ampoule, carrying out vacuumizing tube sealing, putting the quartz ampoule in the tubular furnace body to make the graphite boat in the middle of the synthetic furnaces, controlling conditions for synthesizing polycrystals, controlling the temperature distribution of the furnace body, slowly upward moving the furnace body until crystallization finishing, and carrying out vertical pulling growth to obtain the CdZnTe monocrystals. According to the invention, CdZnTe polycrystals are synthesized without using other rocking furnaces; and the obtained CdZnTe monocrystals have the advantages of uniform crystal ingot component, less twin crystals, and less Te precipitation or inclusions.
Owner:SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI

Vehicle and ship freight concealed quotation system and method

The invention discloses a vehicle and ship freight concealed quotation system and method. The system comprises a server module, a delivery information module, a concealed bid module, a GPS real-time tracking module, an insurance purchasing module, an invoice purchasing module, an evaluation module and a B / S query module. By use of the vehicle and ship freight concealed quotation system and method, enormous freight source information or vehicle and ship information can be easily obtained, freight owners and vehicle and ship owners are in direct contact, intermediate links are reduced, the logistics cost is decreased, malicious competition can be reduced, and market order is maintained.
Owner:HANGZHOU SHIFU INFORMATION TECH CO LTD

System and method for predicting surgery progress stage

System and method for predicting a surgery progress stage according to the present disclosure sense a surgery motion pattern according to a surgery motion, store surgery stage information according to the kind of surgery and pattern information of major surgery motions of each surgery stage, determine a present surgery motion pattern corresponding to the sensed surgery motion pattern from the surgery motion pattern information stored in the data storing unit, and predict a surgery stage corresponding to the determined present surgery motion pattern based on the surgery stage information stored in the data storing unit.
Owner:KOREA INST OF SCI & TECH

Perovskite solar cell doped with multifunctional additive and preparation method of perovskite solar cell

The invention discloses a perovskite solar cell doped with a multifunctional additive and a preparation method of the perovskite solar cell. The perovskite material is a bipolar semiconductor materialwhich has the characteristics of low cost, easiness in film formation, narrow band gap, high absorption coefficient, high carrier mobility and the like; the perovskite absorption layer of the cell comprises 2, 2-difluoromalonamide. The 2, 2-difluoromalonamide contains multiple organic functional groups (-NH2,-C = O,-F) and can interact with components in the perovskite material respectively, so that the quality of the perovskite thin film is effectively improved, defects of the perovskite thin film are passivated, recombination is reduced, decomposition of the thin film is inhibited, and finally the efficiency and stability of the perovskite solar cell are improved.
Owner:SHAANXI NORMAL UNIV

Method to improve ge channel interfacial layer quality for CMOS finfet

A method for manufacturing a semiconductor device includes providing a semiconductor structure having a substrate structure, multiple fins having a germanium layer, a dummy gate structure including sequentially a hardmask, a dummy gate, a dummy gate insulating material on the germanium layer, and spacers on opposite sides of the dummy gate structure and on a portion of the germanium layer. The method also includes forming an interlayer dielectric layer on the substrate structure covering the dummy gate structure, planarizing the interlayer dielectric layer to expose a surface of the dummy gate, removing the dummy gate and the dummy gate insulating material to expose a surface of the germanium layer, performing a silane impregnation process on the exposed surface of the germanium layer to introduce silicon to the germanium layer, and performing an oxidation process on the germanium layer to form an oxide layer comprising silicon and germanium.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1

Photoelectric conversion device

It is an object to provide a photoelectric conversion device with high photoelectric conversion efficiency. The photoelectric conversion device includes an electrode layer, and a light absorbing layer located on the electrode layer. The light absorbing layer is comprised of a plurality of stacked semiconductor layers containing a chalcopyrite-based compound semiconductor. The semiconductor layers contain oxygen. A molar concentration of the oxygen in surfaces and their vicinities of the semiconductor layers where the semiconductor layers are stacked on each other is higher than average molar concentrations of the oxygen in the semiconductor layers.
Owner:KYOCERA CORP

Geomagnetism-based community shared parking space management method and device

The invention provides a geomagnetism-based community shared parking space management method and device for efficiently utilizing idle parking spaces of a community. The method comprises the followingsteps that: 1, a sharing platform module registers registration information of an owner party, a vehicle owner party and a property management party; 2, the parking management module receives geomagnetic sensing signals placed in parking spaces and converts and registers the geomagnetic sensing signals into parking space state information; 3, the sharing platform module receives vehicle owner parking application information containing the parking application time period and executes a matching program; and 4, the sharing platform module calls a payment module to request payment or notify a client module to process according to the change of the parking space state information. Supply demand information of an owner party, a vehicle owner party and a property management party is integrated,and waste of idle parking spaces and non-equivalent use and vacancy of public resources can be greatly reduced.
Owner:中穗科技股份有限公司

Near ultraviolet excited charge compensation type red-light phosphate light emitting material and preparation method thereof

The invention provides a near ultraviolet excited charge compensation type red-light phosphate light emitting material and a preparation method thereof. The near ultraviolet excited charge compensation type red-light phosphate light emitting material chemically consists of Sr2-2xP2O7:xEu<3+>, xM<+>, wherein Eu<3+> is a light emitting center; M<+> is a charge compensation agent; M=Li, Na or K; and x=0.02-0.16. Na<+> is a charge compensation agent with the optimal property and can improve the emission intensity and the chromaticity of red light to the maximum extent. The preparation method comprises the following steps: by taking a high temperature solid state method, weighing raw materials SrCO3, Li2CO3, Na2CO3, K2CO3, (NH4)2HPO4 and Eu2O3 according to a chemical weighing ratio of target products, uniformly grinding, calcining in the air atmosphere, and performing furnace cooling to the room temperature, thereby obtaining a target product. The preparation method has the characteristics of being simple to operate, sufficient in reaction, applicable to production and the like, and the prepared light emitting material is high in light emission efficiency, high in brightness, good in chromaticity and good in stability.
Owner:SHAANXI UNIV OF SCI & TECH

Control system and control method of variable inlet plate

The invention provides a control system and a control method of a variable inlet plate. The control system of the variable inlet plate comprises a gear conversion module and an operation module, wherein the gear conversion module comprises a first gear and a second gear, and is used for performing selective conversion between the first gear and the second gear according to the produced gypsum board specifications, and sends a gear signal to the operation module; the operation module comprises a selection unit and a program unit, wherein the selection unit is used for receiving the gear signaland selecting a corresponding program for running in the program unit according to the gear data carried in the gear signal. According to the control system and the control method of the variable inlet plate, plate feeding modes can be switched for different products according to the production requirements, the control system and the control method are suitable for producing plates with various thickness specifications on the same production line, the vacancy of production equipment is reduced, the utilization rate of equipment is improved, and the production cost is saved.
Owner:湖北北新建材有限公司 +1

Parking place management method and device

The invention discloses a parking place management method comprising the steps that parking place leasing information is released when a server receives the parking place leasing information which is transmitted by a first vehicle owner based on a first client side, wherein the parking place leasing information includes the parking place information of the first vehicle owner; when parking place rental information which is transmitted by a second vehicle owner based on a second client side and corresponding to the parking place leasing information is received, license plate number information and rental period information of the second vehicle owner included in the parking place rental information are acquired; and parking place successful leasing information is generated according to the license plate number information and the rental period information of the second vehicle owner and the parking place information of the first vehicle owner. The invention also discloses a parking place management device. The use efficiency of the parking place can be enhanced by the parking place management method and device.
Owner:XIAN IRAIN IOT TECH SERVICES CO LTD

Internet mahjong machine automatic entertainment system

The invention relates to an Internet mahjong machine automatic entertainment system. The Internet mahjong machine automatic entertainment system comprises a mahjong machine shuffling mechanism, a mahjong machine tile carrying mechanism and a mahjong machine operating panel, and further comprises a server, a communication module, an operating panel unlocking controller and a user terminal. A mahjong machine is in communication with the server through the communication module; the user terminal is used for sending request information to the server; the server is used for waiting for the request information sent by the user terminal, generating corresponding user consumption information according to the request information and then sending out the user consumption information; the communication module is used for waiting for and receiving the user consumption information sent by the server in real time, generating a corresponding operation instruction according to the user consumption information and then sending out the operation instruction; the operating panel unlocking controller is used for receiving the operation instruction through a serial port interrupt service program and starting an operating panel key function according to the operation instruction or continuing to wait for the operation instruction. The Internet mahjong machine automatic entertainment system has the advantages of changing a mahjong and chess room operating mode and improving the game experience of players.
Owner:铜陵市恒威包装材料有限公司

Method for manufacturing electrode material and electrode material

It is a method for manufacturing an electrode material containing Cu, Cr, a heat-resistant element, and a low melting metal. A Cr powder and a heat-resistant element powder are mixed together in a ratio such that the Cr is greater than the heat-resistant element by weight. The mixed powder of the heat-resistant element and the Cr powder is baked. A MoCr solid solution obtained by the baking and containing a solid solution of the heat-resistant element and the Cr is pulverized and then classified. The classified MoCr solid solution powder, a Cu powder, and a low-melting metal powder are mixed together, followed by sintering at a temperature that is 1010° C. or higher and is lower than 1038° C., thereby obtaining the electrode material.
Owner:MEIDENSHA ELECTRIC MFG CO LTD

Scenic spot clock-in monitoring system and application method thereof

PendingCN113033965AMake the tour more interestingDeepen your understandingDiscounts/incentivesResourcesTimerServer
The invention provides a scenic spot clock-in monitoring system and an application method thereof.The scenic spot clock-in monitoring system comprises a plurality of display clock-in machines, the display clock-in machines are located at scenic spots, each display clock-in machine comprises a mainframe box, a network server and a single chip microcomputer, a touch display screen is installed on the top of each mainframe box, and the network servers are connected with a wireless receiving module through a network; Each single-chip microcomputer is electrically connected with an RAM, an MRAM, the database and a data analysis module, the output end of the wireless receiving module is electrically connected with the input end of the single-chip microcomputer through the data acquisition control module, a GPS positioning module and an antenna are arranged in each single-chip microcomputer, scenic spot map software is installed in the single-chip microcomputer, and clock-in software is installed in each single-chip microcomputer. A clock-in two-dimensional code is arranged on the touch display screen, a timer, a counter, a data storage module, a data statistics module, a data calculation module and a data analysis module are further arranged in the single chip microcomputer, the plurality of display clock-in machines is connected with a network background through a network server, and the network background is provided with a central processing unit.
Owner:QINGDAO HUANGHAI UNIV

Differential elastic modulus support column array and vacuum glass

ActiveCN110204222AReduce stressReduced maximum deformationFlat glassEngineering
The invention discloses a differential elastic modulus support column array and vacuum glass. In the differential elastic modulus support column array, support columns of a first round near sealing edges of the vacuum glass are low-elasticity modulus support columns, and support columns of a second round near the sealing edges of the vacuum glass are high-elasticity modulus support columns. Similarly, in a direction away from the sealing edges of the vacuum glass, rounds of low-elasticity modulus support columns and rounds of high-elasticity modulus support columns are alternately arranged until the support columns are all arranged. The vacuum glass is formed based on the differential elastic modulus support column array and plate glass. The differential elastic modulus support column array of the invention can reduce the maximum stress and maximum deformation of the vacuum glass, thereby reducing glass damage and support column vacancies. The effect of the arrangement of the differential elastic modulus support columns is established under the condition that the original array spacing of conventional product support columns is constant or under the condition of array spacing of support columns of novel design.
Owner:BEIJING UNIV OF TECH +1

Wire rod having superior hydrogen delayed fracture resistance, method for manufacturing same, high strength bolt using same and method for manufacturing bolt

InactiveUS20140150934A1High strengthSuperior hydrogen delayed fracture resistanceFurnace typesHeat treatment furnacesWire rodHydrogen
The present invention relates to a wire rod used in bolts for automobile engines, for example, and more specifically to a wire rod having an improved resistance to hydrogen delayed fracture, to a manufacturing method for same, to a bolt using same and a method for manufacturing the bolt. Provided are a high strength wire rod having a superior resistance to hydrogen delayed fracture and a method for manufacturing same, a high strength bolt using the wire rod and a method for manufacturing same, wherein.the wire rod comprises, 0.3-0.7 wt % C, 0.05-2.0 wt % Si, 0.7-1.5 wt % Mn, 0.01-0.1 wt % Ni, and 30-70 ppm La, and the remainder thereof is comprised by Fe and inevitable impurities.
Owner:POHANG IRON & STEEL CO LTD

Tilting component of tilting rotor unmanned aerial vehicle, tiltable rotor unmanned aerial vehicle and using method

The invention discloses a tilting component of a tilting rotor unmanned aerial vehicle, which comprises a propeller, a motor base, a steering engine and a tilting base, wherein the propeller is connected with a direct-current brushless motor through propeller fixing screws; the direct-current brushless motor is arranged on the motor base through motor base fixing screws; the steering engine is fixed on a steering engine disc through steering engine fixing screws; the steering engine disc, the motor base and the tilting base are connected, and the tilting base is connected with the wings through tilting base fixing screws; the propeller is driven by the direct-current brushless motor controlled by a steering engine to be switched between a first rotating plane and a second rotating plane, and the first rotating plane is perpendicular to the second rotating plane. In addition, the invention further discloses a tiltable rotor unmanned aerial vehicle which comprises the tilting component of the tiltable rotor unmanned aerial vehicle. Moreover, the invention further discloses a using method of the tiltable rotor unmanned aerial vehicle.
Owner:XIDIAN UNIV

Method to improve GE channel interfacial layer quality for CMOS FINFET

A method for manufacturing a semiconductor device includes providing a semiconductor structure having a substrate structure, multiple fins having a germanium layer, a dummy gate structure including sequentially a hardmask, a dummy gate, a dummy gate insulating material on the germanium layer, and spacers on opposite sides of the dummy gate structure and on a portion of the germanium layer. The method also includes forming an interlayer dielectric layer on the substrate structure covering the dummy gate structure, planarizing the interlayer dielectric layer to expose a surface of the dummy gate, removing the dummy gate and the dummy gate insulating material to expose a surface of the germanium layer, performing a silane impregnation process on the exposed surface of the germanium layer to introduce silicon to the germanium layer, and performing an oxidation process on the germanium layer to form an oxide layer comprising silicon and germanium.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1

Apparatus for vertical pulling growth of CdZnTe monocrystals, and method thereof

The invention discloses an apparatus for the vertical pulling growth of CdZnTe monocrystals, and a method thereof. The apparatus comprises a tubular furnace body, a quartz ampoule and a graphite boat, the furnace body comprises synthetic furnaces, buffer furnaces, inclined plane furnaces and Cd source furnaces, the quartz ampoule is arranged in the furnace body, the graphite boat is arranged in the quartz ampoule. The method for the vertical pulling growth of CdZnTe monocrystals through adopting the apparatus generally comprises the following steps: uniformly putting a high-purity Te raw material, a high-purity Zn raw material and a high-purity Cd raw material in the graphite boat according to synthetic proportions, putting a small amount of Cd at the bottom of the quartz ampoule, slowly putting the graphite boat on the baffle board of the quartz ampoule, carrying out vacuumizing tube sealing, putting the quartz ampoule in the tubular furnace body to make the graphite boat in the middle of the synthetic furnaces, controlling conditions for synthesizing polycrystals, controlling the temperature distribution of the furnace body, slowly upward moving the furnace body until crystallization finishing, and carrying out vertical pulling growth to obtain the CdZnTe monocrystals. According to the invention, CdZnTe polycrystals are synthesized without using other rocking furnaces; and the obtained CdZnTe monocrystals have the advantages of uniform crystal ingot component, less twin crystals, and less Te precipitation or inclusions.
Owner:SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI

Method for manufacturing electrode material and electrode material

It is a method for manufacturing an electrode material containing Cu, Cr, a heat-resistant element, and a low melting metal. A Cr powder and a heat-resistant element powder are mixed together in a ratio such that the Cr is greater than the heat-resistant element by weight. The mixed powder of the heat-resistant element and the Cr powder is baked. A MoCr solid solution obtained by the baking and containing a solid solution of the heat-resistant element and the Cr is pulverized and then classified. The classified MoCr solid solution powder, a Cu powder, and a low-melting metal powder are mixed together, followed by sintering at a temperature that is 1010° C. or higher and is lower than 1038° C., thereby obtaining the electrode material.
Owner:MEIDENSHA ELECTRIC MFG CO LTD

Method for rapidly preparing (100) single crystal copper

The invention provides a method for rapidly preparing (100) single crystal copper, which comprises the following steps of: annealing a (111) preferred orientation nano twin crystal Cu film, applying an electric field to the (111) preferred orientation nano twin crystal Cu film and keeping for a certain time, so that crystal grains of the (111) preferred orientation nano twin crystal Cu film grow rapidly, and finally converting the (111) preferred orientation nano twin crystal Cu into (100) preferred orientation single crystal Cu. According to the method, the production efficiency of the single crystal Cu is remarkably improved, the large-grain-size single crystal Cu with (100) preferred orientation is prepared, and the large-grain-size single crystal Cu has the advantages of being excellent in mechanical property, oxidation resistance, electromigration resistance, thermal stability and the like. The preparation method of the (100) single crystal copper is simple, efficient, low in cost, good in compatibility with an existing microelectronic packaging process and very suitable for large-scale industrial production.
Owner:DALIAN UNIV OF TECH

A system for realizing household appliance energy combination at an APP terminal

The invention discloses a system for realizing household electrical appliance energy combination at an APP terminal. The system comprises an input module, a data analysis module, a storage module, a service module, a monitoring module, an information processing module and an output module, and the input module comprises a registration module, a login module and a search module. The system can realize the household electrical appliance energy combination and reduce the energy waste.
Owner:江苏哪凉快网络科技有限公司

Semiconductor structures and methods of forming them

ActiveCN110400746BReduce bias temperature instabilityInhibited DiffusionSemiconductor devicesGate dielectricSemiconductor structure
A semiconductor structure and its forming method, wherein, the forming method includes: providing a substrate; forming a gate dielectric layer on the substrate; performing a ventilation treatment on the gate dielectric layer to form a modified gate dielectric layer; A work function layer is formed on the modified gate dielectric layer; a gate layer is formed on the work function layer. The ventilation treatment can make nitrogen atoms fill the vacancies and gaps in the gate dielectric layer, thereby preventing the metal atoms in the work function layer from diffusing into the gate dielectric layer, thereby reducing the change of the work function of the gate dielectric layer , thereby reducing the drift of the threshold voltage of the formed semiconductor structure, and reducing the instability of the bias voltage of the formed semiconductor structure.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1
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