The invention provides an array micro-beam unit
deflection angle measurement
system, comprising an illumination
light source, a condenser, a filter needle hole, a collimating
system, a
polarizer, a polarizing
beam splitter, a one quarter wave plate, a fourier conversion
system, a filter edge, a fourier reverse conversion system and a
CCD camera; the light emitted by the illumination
light source passes through the beam filter which consists of the condenser and the filter needle hole, is converted into parallel light by the collimating system, and is converted into a
linearly polarized light beam by the
polarizer; the
linearly polarized light beam illuminates the array micro-beam by the reflection of the polarizing
beam splitter and reaches the polarizing
beam splitter again after being reflected by the array micro-beam; the linearly polarizing
light beam passes through the one quarter wave plate between the polarizing beam splitter and the array micro-beam twice, with the
phase change of Pi / 2; the imaging beam reflected by the array micro-beam can pierce the polarizing beam splitter and is imaged on the
CCD camera after passing through a 4f
filter system which consists of the fourier conversion system, the filter edge and the fourier reverse conversion system. By controlling the polarizing state of the illumination light, the array micro-beam unit
deflection angle measurement system reduces the
background noise of the measured
signal, improves the
signal-
noise-ratio of the system, and presents unique advantages.